Txhawm rau ua kom tau raws li qhov xav tau ntawm kev tsim khoom, cov khoom siv ua cov khoom siv semiconductor yuav muaj kev loj hlob zoo heev. Cov cuab yeej muaj xws li stepper, laser etching tshuab, nyias zaj duab xis depositional khoom, ion implanter, laser scribing tshuab, laser qhov drilling tshuab thiab hais txog.