Sibolla kamoo li-chiller tse nepahetseng li tšehetsang tlhahiso ea li-semiconductor ka botsitso ba mocheso oa ± 0.1°C, taolo e sebetsang ea mojaro oa mocheso, le pholiso e tšepahalang ea ts'ebetso ea wafer bakeng sa litsamaiso tsa ho fata, ho beha le ho lahla lithography.