Li-chiller tsa laser li bapala karolo ea bohlokoa tlhahisong ea li-semiconductor ka ho netefatsa taolo e nepahetseng ea mocheso bakeng sa ho seha li-wafer, ho tšoaea ka laser, ho annealing le ho hlahloba. Ithute kamoo li-chiller tsa indasteri tse nepahetseng li ntlafatsang botsitso, ho nepahala le chai ea tlhahiso.
Sibolla kamoo li-chiller tse nepahetseng li tšehetsang tlhahiso ea li-semiconductor ka botsitso ba mocheso oa ± 0.1°C, taolo e sebetsang ea mojaro oa mocheso, le pholiso e tšepahalang ea ts'ebetso ea wafer bakeng sa litsamaiso tsa ho fata, ho beha le ho lahla lithography.