Teknụzụ Site-Glass Via (TGV) apụtala dị ka ọganihu dị mkpa na ngwa eletrọnịkị ọgbara ọhụrụ yana ụlọ ọrụ semiconductor. Ụzọ kachasị ewu ewu maka ịmepụta vias ndị a bụ laser na-akpata etching, nke na-eji lasers femtosecond mepụta mpaghara mebiri emebi na iko site na ultrafast pulses. Usoro etching a ziri ezi na-enye ohere ịmepụta vias akụkụ dị elu dị mkpa maka ngwa eletrọnịkị dị elu.
Iji hụ na arụmọrụ kacha mma nke laser ultrafast ejiri na usoro etching a, idobe njikwa okpomọkụ dị oke mkpa. TEYU Laser Chiller CWUP-20ANP pụtara na nke a, na-enye nkwụsi ike dị elu nke ± 0.08 ℃, na-eme ka ntụkwasị obi nke usoro etching laser na-ebute. Site n'ijikwa ọnọdụ okpomọkụ nke ọma, CWUP-20ANP laser chiller dị elu na-enye aka na mmepụta
