As semiconductor becomes smaller and smaller, the integrated circuit manufacturing technique becomes more and more complicated, requiring several hundred or thousand procedures. And going through every procedure, the semiconductor is inevitably to be covered with more or less particle pollutants, metal residue or organics residue. And these particles and residues have a strong absorptive power with the foundation of the semiconductor base materials. Removing those particles and residues is a big challenge for traditional methods like chemical cleaning, mechanical cleaning and ultrasonic cleaning. But for laser cleaning, it’s very nice and easy.
Laser cleaning has many advantages that traditional cleaning methods don’t have, which makes it the ideal cleaning solution for semiconductor.
Advantages:
1.Laser cleaning is non-contact and can easily integrate with robotic arm to perform long-distance cleaning, reaching the spots that are hard to reach with traditional cleaning methods;
2.Laser cleaning machine can work stably in a long period of time without any consumables. Therefore, its running and maintenance cost are pretty low. Once investment can ensure multiple use;
3.Laser cleaning machine can deal with different kinds of pollutants on the material surface and realize high degree of cleanness. Plus, it won’t produce any waste during the operation, so it is a green cleaning technology.
Like many other laser equipment, laser cleaning machine is powered by certain kinds of laser sources. And the common laser sources for laser cleaning machine are CO2 laser and fiber laser. And in order to avoid overheating, laser cleaning machine often comes with an industrial water chiller. S&A Teyu laser water chillers are suitable for cooling CO2 lasers and fiber lasers of different powers. The CW series chillers are very popular in cooling CO2 glass laser tube and CO2 metal laser tube with the temperature stability ranging from ±1℃ to ±0.1℃. The CWFL series chillers are ideal for cooling fiber lasers from 500W to 20000W and are available in stand-alone units and rack mount units. If you are not sure which laser water chiller to choose, you can just e-mail to marketing@teyu.com.cn and our colleagues will reply to you soon.
