Ngā Pouaka Whakamatao Tika i roto i te Hanganga Ārahi-Haumaru: He aha te Hiranga o te Pūmautanga o te Pāmahana

I roto i te taiao hanga Semiconductor o ēnei rā, he mea nui te pumau o te pāmahana ki te whakahaere tukanga. I te neke haere o ngā hanganga taputapu ki ngā tauine nanometer, ahakoa ngā piki me ngā heke iti o te pāmahana ka pā ki ngā inenga nui, te ōritetanga o te kiriata, me te tika o te whakarārangi. Mai i te whakairo me te whakatakotoranga ki te whakaahua me te tirotiro, ka pā tika te whakahaere pāmahana tika ki te hua, te mahi, me te pono o ngā taputapu mō te wā roa.

He aha te mea nui o te whakamatao tika i roto i te hanga wafer
1. Te Pūmautanga o te Tukanga me te Tiakitanga Hua
Ka whakahaerehia ngā taputapu haurua-whakahaere i raro i ngā tawhā e tino whakahaeretia ana. Ka pupuri te pouaka whakamatao ahumahi tino tika i te pāmahana wai pumau, kia rite ai ngā āhuatanga wera o ia papa. Ka whakaitihia e tēnei ōritetanga te rerekētanga o te puranga, ā, ka tautoko i te putanga whakaputa pumau.
2. Te Whakamararatanga o te Utaina Wera Teitei
Ka puta he wera nui i te wā e mahi ana mā te whakairo plasma, te whakatakotoranga CVD/PVD, me ngā pūnaha whakauru katote. Ka tere te tango a ngā pūnaha whakamatao porowhita-katia whai hua i te kaha wera nui, ka ārai i te nekeneke, ka tiaki i ngā wāhanga taputapu, ka pupuri hoki i te pumau tonu o te whakaputanga.
3. Te Tiakitanga o te Pūnaha Whatu me te Nekehanga
Ka whakawhirinaki ngā papaaho tuhi me ngā papa tirotiro ki te tika o te taumata nanometer. Ka taea e te whānui o te pāmahana i roto i ngā huihuinga whatu, i ngā wāhanga nekehanga rānei te whakararu i te tūnga tika. Ka āwhina ngā pouaka whakamatao tika ki te whakau i ēnei pūnaha tairongo, kia mau tonu ai te tika me te āheinga ki te ine.
4. Te Roa o te Ora o ngā Taputapu
Mā te whakahaere pāmahana pumau ka whakaitihia te ahotea wera i runga i ngā rūma, ngā papu, me ngā hanganga miihini. I roto i te wā, ka whai wāhi tēnei ki te whakaiti i te auau tiaki me te whakapai ake i te whai huatanga whānui o ngā taputapu (OEE), he mea nui tēnei i roto i ngā whare hanga haurua-rahi.

Ngā mea hei tirotiro māu i roto i tētahi pouaka whakamatao tino tika o te taumata semiconductor
Ko te tikanga, ko te hanga i ngā hiko haurua-arataki e hiahiatia ana:
* Te tika o te whakahaere pāmahana teitei (he maha ngā wā ±0.1°C, he kikī ake rānei)
* Te tohanga porowhita kati pumau
* He iti te wiri me te iti o te haruru
* Te aroturuki atamai me te tiaki whakaoho maha-taumata
* He mahi pono, he mahi tonu mō te wā roa

Ko ngā pūnaha whakamatao tika i hangaia mō ngā taiao hangahanga matatau e whakakotahi ana i te mana whakahaere whakamatao pumau, ngā wāhanga matua kounga teitei, me te whakahaere pāmahana atamai hei whakatutuki i ēnei tono tino pakari.

Hei tauira, ko ngā otinga whakamatao tino tika pērā i te raupapa TEYU CWUP me te RMUP kua hangaia me te tika o te whakahaere, ngā hanganga kiato, me te mahi pumau e tika ana mō ngā tono e hiahia ana ki te whakahaere wera pai. E whakamahia whānuitia ana ēnei pūnaha i roto i ngā ahumahi e pā tika ana te pumau o te pāmahana ki te tika o te tukanga, kia urutau ai ki ngā āhuatanga whakamatao e pā ana ki te haurua-ira.

I roto i te hanga haurua-haurua, ehara i te mea he tautoko āwhina anake te whakamatao; he wāhanga nui tōna i roto i te whakapūmautanga o te tukanga. Mā te whiriwhiri i tētahi pouaka whakamatao tika i hangaia mō te pumau, te pono, me te mahi roa ka āwhina i ngā kaihanga ki te tiaki i te hua me te pupuri i ngā paerewa hanga whakataetae.