Ii-Precision Chillers kwiMveliso ye-Semiconductor: Kutheni Uzinzo lobushushu lubalulekile

Kwimeko-bume yokwenziwa kweSemiconductor yanamhlanje, ukuzinza kobushushu kubalulekile kulawulo lwenkqubo. Njengoko izakhiwo zesixhobo zingena kwizikali ze-nanometer, nokuguquguquka okuncinci kobushushu kunokuchaphazela ubukhulu obubalulekileyo, ukufana kwefilimu, kunye nokuchaneka kokulungelelaniswa. Ukusuka ekukroleni nasekubekeni ukuya kwi-lithography kunye nokuhlolwa, ulawulo oluchanekileyo lobushushu luchaphazela ngokuthe ngqo isivuno, ukusebenza, kunye nokuthembeka kwezixhobo ixesha elide.

Kutheni Ukupholisa Ngokucokisekileyo Kubalulekile Ekwenzeni I-Wafer
1. Ukungqinelana kwenkqubo kunye nokukhuselwa kwemveliso
Izixhobo ze-semiconductor zisebenza phantsi kweeparamitha ezilawulwa ngokuqinileyo. I -chiller yemizi-mveliso echanekileyo igcina ubushushu bamanzi obungaguqukiyo, iqinisekisa ukuba i-wafer nganye ifumana iimeko zobushushu ezifanayo. Oku kuhambelana kunciphisa ukuguquguquka kwebhetshi kwaye kuxhasa imveliso ezinzileyo.
2. Ukusasazwa koMthwalo woBushushu obuphezulu
Ukugrumba ngeplasma, ukufakwa kweCVD/PVD, kunye neenkqubo zokufakelwa kwee-ion zivelisa ubushushu obukhulu ngexesha lokusebenza. Iinkqubo zokupholisa ezivaliweyo ezisebenzayo zisusa ngokukhawuleza amandla obushushu agqithisileyo, zithintele ukushukuma, zikhusele izixhobo, kwaye zigcina uzinzo oluqhubekayo lwemveliso.
3. Ukhuseleko lweNkqubo yokuKhangela nokuHamba
Iiplatfomu zeLithography kunye nokuhlolwa zixhomekeke ekuchanekeni kwinqanaba le-nanometer. Ukwandiswa okubangelwa bubushushu kwiindibano ze-optical okanye kwizigaba zokuhamba kunokuphazamisa ukulungelelaniswa. Ii-precision chillers zinceda ukuzinzisa ezi nkqubo zincinci zibuthathaka, zigcina ukuchaneka kokulinganisa kunye nokuphindaphinda.
4. Ixesha Lobomi Bezixhobo Ezandisiweyo
Ulawulo lobushushu oluzinzileyo lunciphisa uxinzelelo lobushushu kwiigumbi, iimpompo, kunye nezakhiwo zoomatshini. Ngokuhamba kwexesha, oku kuncedisa ekunciphiseni amaxesha okugcinwa kunye nokuphuculwa kokusebenza kakuhle kwezixhobo ngokubanzi (OEE), nto leyo ibalulekileyo kwiifektri ze-semiconductor eziphezulu.

Yintoni Omele Uyijonge Kwi-Semiconductor-Grade Precision Chiller
Ukuveliswa kwee-semiconductors kudla ngokufuna:
* Ukuchaneka kokulawula ubushushu obuphezulu (ngokuqhelekileyo ± 0.1°C okanye ngaphezulu)
* Ukujikeleza okuzinzileyo kweluphu evaliweyo
* Ukungcangcazela okuphantsi kunye nokusebenza kwengxolo ephantsi
* Ukubeka esweni okukrelekrele kunye nokukhuselwa kwe-alamu yamanqanaba amaninzi
* Ukusebenza okuthembekileyo, okuhlala ixesha elide

Iinkqubo zokupholisa ezichanekileyo ezenzelwe iimeko zokuvelisa eziphambili zidityaniswe nolawulo oluzinzileyo lwefriji, izinto eziphambili ezisemgangathweni ophezulu, kunye nolawulo lobushushu olukrelekrele ukuhlangabezana nezi mfuno zinzima.

Umzekelo, izisombululo ze-precision chiller ezifana ne-TEYU CWUP kunye ne-RMUP series ziyilwe ngolawulo oluphezulu lokuchaneka, izakhiwo ezincinci, kunye nokusebenza okuzinzileyo ezifanelekileyo kwizicelo ezifuna ulawulo oluhle lobushushu. Ezi nkqubo zisetyenziswa kakhulu kumashishini apho uzinzo lobushushu luchaphazela ngokuthe ngqo ukuchaneka kwenkqubo, nto leyo eyenza ukuba zilungelelaniswe neemeko zokupholisa ezinxulumene ne-semiconductor.

Kwimveliso ye-semiconductor, ukupholisa kungaphezulu nje kwenkxaso yokuncedisa; kudlala indima ebalulekileyo ekuqinisekiseni inkqubo. Ukukhetha i-chiller echanekileyo eyakhelwe ukuzinza, ukuthembeka, kunye nokusebenza kwexesha elide kunokunceda abavelisi bakhusele isivuno kwaye bagcine imigangatho yokuvelisa ekhuphisanayo.