Ama-Precision Chiller Ekukhiqizeni Ama-Semiconductor: Kungani Kubalulekile Ukuzinza Kwezinga Lokushisa

Esimweni sanamuhla sokukhiqiza ama-Semiconductor, ukuzinza kokushisa kubalulekile ekulawuleni izinqubo. Njengoba izakhiwo zedivayisi zingena ezikalini ze-nanometer, ngisho nokushintshashintsha okuncane kokushisa kungathinta ubukhulu obubalulekile, ukufana kwefilimu, kanye nokunemba kokuqondanisa. Kusukela ekuqopheni nasekubekeni kuya ekuthonyweni nasekuhlolweni, ukuphathwa kokushisa okunembile kuthinta ngqo isivuno, ukusebenza, kanye nokuthembeka kwemishini yesikhathi eside.

Kungani Ukupholisa Ngokucophelela Kubalulekile Ekwenziweni Kwe-Wafer
1. Ukuvumelana Kwenqubo Nokuvikelwa Kwesivuno
Amathuluzi e-semiconductor asebenza ngaphansi kwamapharamitha alawulwa kahle. I-chiller yezimboni enembile kakhulu igcina izinga lokushisa lamanzi lingaguquki, iqinisekisa ukuthi i-wafer ngayinye ihlangabezana nezimo zokushisa ezifanayo. Lokhu kuhambisana kunciphisa ukuhlukahluka kwe-batch futhi kusekela umkhiqizo ozinzile.
2. Ukushabalaliswa Komthwalo Oshisayo Ophezulu
Ukugqwala nge-plasma, ukufakwa kwe-CVD/PVD, kanye nezinhlelo zokufakelwa kwama-ion kukhiqiza ukushisa okukhulu ngesikhathi sokusebenza. Izinhlelo zokupholisa ezisebenza kahle ezivala i-closed-loop zisusa ngokushesha amandla okushisa amaningi, zivimbele ukukhukhuleka, zivikele izingxenye zemishini, futhi zigcine ukuqina kokukhiqiza okuqhubekayo.
3. Ukuvikelwa Kwesistimu Yokukhanya Nokunyakaza
Amapulatifomu e-Lithography kanye nokuhlola ancike ekuqondeni kwezinga le-nanometer. Ukwanda okubangelwa ukushisa kuma-optical assembly noma ezigabeni zokunyakaza kungonakalisa ukuhambisana. Ama-precision chiller asiza ekuqiniseni lezi zinhlelo ezincane ezibucayi, alondoloze ukunemba kokulinganisa kanye nokuphindaphindwa.
4. Isikhathi Sokuphila Semishini Eseluliwe
Ukulawulwa kwezinga lokushisa okuzinzile kunciphisa ukucindezeleka kokushisa emakamelweni, emaphampini, nasezindlini zemishini. Ngokuhamba kwesikhathi, lokhu kunegalelo ekunciphiseni imvamisa yokulungisa kanye nokusebenza kahle kwemishini iyonke (OEE), okubaluleke kakhulu ezindlini ze-semiconductor ezinevolumu ephezulu.

Okufanele Ukubheke Ku-Semiconductor-Grade Precision Chiller
Ukukhiqizwa kwe-semiconductor ngokuvamile kudinga:
* Ukunemba kokulawula izinga lokushisa eliphezulu (ngokuvamile ± 0.1°C noma okuqinile)
* Ukujikeleza okuqinile kwe-closed-loop
* Ukudlidliza okuphansi kanye nokusebenza komsindo ophansi
* Ukuqapha okuhlakaniphile kanye nokuvikelwa kwe-alamu yamazinga amaningi
* Ukusebenza okuqhubekayo okuthembekile, kwesikhathi eside

Izinhlelo zokupholisa ezinembile ezenzelwe izindawo zokukhiqiza ezithuthukisiwe zihlanganisa ukulawulwa kokuqandisa okuzinzile, izingxenye eziyinhloko zekhwalithi ephezulu, kanye nokulawulwa kokushisa okuhlakaniphile ukuze kuhlangatshezwane nalezi zidingo eziqinile.

Isibonelo, izixazululo ze-precision chiller ezifana nochungechunge lwe-TEYU CWUP kanye ne-RMUP zakhiwe ngokunemba okuphezulu kokulawula, izakhiwo eziqinile, kanye nokusebenza okuzinzile okufanele izinhlelo zokusebenza ezidinga ukuphathwa kahle kokushisa. Lezi zinhlelo zisetshenziswa kabanzi ezimbonini lapho ukuzinza kokushisa kuthinta ngqo ukunemba kwenqubo, okwenza zivumelane nezimo zokupholisa ezihlobene ne-semiconductor.

Ekwenziweni kwe-semiconductor, ukupholisa kungaphezu kokusekela okusizayo; kudlala indima ebalulekile ekuqinisekisweni kwenqubo. Ukukhetha i-chiller enembile eyakhelwe ukuzinza, ukuthembeka, kanye nokusebenza kwesikhathi eside kungasiza abakhiqizi ukuthi bavikele isivuno futhi balondoloze amazinga okukhiqiza ancintisanayo.