Ho Etching ha Cryogenic ho Nolofatsa Ts'ebetso ea Lintho e Nepahetseng le e Laolehang Haholoanyane

Ha tlhahiso e tsoetseng pele e ntse e tsoela pele ho sutumelletsa ho nepahala ho hoholo, taolo e tiileng ea ts'ebetso, le ho lumellana ho pharaletseng ha thepa, mahlale a ho fata a ntse a fetoha ka ho loketseng. Ho fata ka mokhoa o hlakileng, ka taolo e nepahetseng ea mocheso oa kamore le substrate, ho nolofalletsa ts'ebetso e tsitsitseng le e ka phetoang esita le sekaleng sa nanometer. E fetohile ts'ebetso ea bohlokoa tlhahisong ea semiconductor, tlhahiso ea lisebelisoa tsa photonic, tlhahiso ea MEMS, le liforomo tsa lipatlisiso tsa mahlale.

Ho Sebetsa ha Cryogenic ke Eng?
Ho tjhesa ka cryogenic ke ts'ebetso ea ho tjhesa e thehiloeng ho plasma e etsoang mochesong o tlase haholo, hangata ho tloha ho -80 °C ho isa ho -150 °C kapa ka tlase. Nakong ea ts'ebetso, substrate e bolokoa mochesong o tsitsitseng o tebileng oa cryogenic, e leng se lumellang lihlahisoa tse latelang karabelo ho theha lera le laoloang la passivation holim'a thepa. Mokhoa ona o ntlafatsa haholo ho nepahala ha ho tjhesa le taolo ea ts'ebetso.

Mekhoa ea bohlokoa e kenyelletsa:
* Ho betla ka mahlakoreng ho hatelletsoeng: Ho ntlafala ha lebota la mahlakoreng ho hlahisa liprofaele tse otlolohileng haholoanyane, tse otlolohileng.
* Ho tšoana ho ntlafetseng ha karabelo: Lithempereichara tse tlase li fokotsa ho feto-fetoha ha sekhahla sa karabelo, ho ntlafatsa botsitso ba sebopeho.
* Boleng bo phahameng ba bokaholimo: Ho se tsitse ha bokaholimo ho fokoditse ho tshehetsa disebediswa tsa elektroniki tse sebetsang hantle le tse utlwahalang.

Melemo ea Bohlokoa ea ho Etching ea Cryogenic
1. Bokhoni ba Tekanyo e Phahameng ea Mahlakore
Ho tjhesa ka cryogenic ho nolofalletsa dikarolelano tse phahameng haholo tsa ponahalo ka mabota a mahlakoreng a otlolohileng, e leng se etsang hore e be ntle bakeng sa ho tjhesa ka silicon e tebileng, dikanale tse nyane, le dibopeho tse rarahaneng tsa MEMS.

2. Ho Tsitsisa Tsamaiso ka Botlalo le ho Pheta-pheta ha Ts'ebetso
Taolo e tebileng ea mocheso oa cryogenic e tsitsisa sekhahla sa ho lahla, e tšehetsa libaka tsa tlhahiso tse hlokang botsitso bo tiileng ba sehlopha ho sehlopha.

3. Ho lumellana ha thepa e pharaletseng
Ho betla ka cryogenic ho loketse mefuta e fapaneng ya thepa, ho kenyeletswa:
* Silicone
* Di-oxide
* Li-nitride
* Li-polymer tse khethiloeng
* Lisebelisoa tsa photonic tse kang lithium niobate (LiNbO₃)

4. Tšenyo e Fokolitsoeng ea Sebaka
Ho phatloha ha li-ion tse tlase ho fokotsa ho thehwa ha diphoso, e leng se etsang hore tshebetso ena e lokele dikarolo tsa optical, di-infrared detectors, le di-microstructures tse nang le kutlwisiso e phahameng.

Likarolo tsa Bohlokoa tsa Sistimi ea ho Etching ea Cryogenic
Sistimi e tloaelehileng ea ho betla ea cryogenic e na le:
* Kamore ea cryogenic le sethala sa electrode se pholileng bakeng sa ts'ebetso e tsitsitseng ea mocheso o tlase haholo
* Mohloli oa plasma (RF / ICP) ho hlahisa mefuta e arabelang ka bongata bo boholo
* Sistimi ea taolo ea mocheso (lisebelisoa tsa ho pholisa) ho boloka fensetere ea ts'ebetso e tsitsitse
* Sistimi ea ho fana ka khase, e tšehetsang likhase tse kang SF₆ le O₂
* Sistimi ea taolo ea selika-likoe e hokahanyang mocheso, khatello, matla le phallo ea khase
Har'a tsena, ts'ebetso ea taolo ea mocheso ke ntlha ea bohlokoa e khethollang botsitso ba ts'ebetso ea nako e telele le ho pheta-pheta.

Khokahano ea Thermal Mekhoeng ea ho Etsa Lintho tse Nyenyane le tse Nyenyane
Mekhoeng ea tšebetso e sebetsang ea ho etsa lintho tse nyenyane le tse nyenyane, litsamaiso tsa ho betla tse nang le cryogenic hangata li sebelisoa hammoho le litsamaiso tsa ho betla tse nang le laser micromachining. Litšebeliso tse tloaelehileng li kenyelletsa khalase ka mokhoa oa ho bopa, ho etsa lisebelisoa tsa photonic, le ho tšoaea li-wafer.

Leha merero ea bona ea mocheso e fapana:
* Ho hlaba ka cryogenic ho hloka ho boloka wafer mochesong o tebileng oa cryogenic
* Litsamaiso tsa laser li hloka ho boloka mohloli oa laser ka har'a fensetere e moqotetsane, e haufi le mocheso oa kamore.
Mekhoa ena ka bobeli e hloka botsitso bo ikhethang ba mocheso.
Ho netefatsa matla a tsitsitseng a tlhahiso ea laser, boleng ba mahlaseli, le botsitso ba ts'ebetso ea nako e telele, hangata ho sebelisoa li-chiller tsa metsi tsa laser tse nepahetseng haholo. Lits'ebetsong tsa laser tse potlakileng haholo, ho nepahala ha taolo ea mocheso oa ± 0.1 °C kapa ho feta (joalo ka ± 0.08 °C) hangata hoa hlokahala.

Libakeng tsa 'nete tsa indasteri le tsa lipatlisiso, li-chiller tsa mocheso o sa fetoheng tse kang TEYU CWUP-20 PRO ultrafast laser chiller , tse nang le botsitso ba mocheso oa ±0.08 °C, li fana ka taolo e tšepahalang ea mocheso nakong ea ts'ebetso ea nako e telele. Hammoho le litsamaiso tsa ho betla tsa cryogenic, li-chiller tsena tse nepahetseng li theha moralo o felletseng le o hokahaneng oa taolo ea mocheso bakeng sa tlhahiso ea micro- le nano-scale.

Likopo tse Tloaelehileng
* Ho betla ha Cryogenic ho sebelisoa haholo ho:
* Ho tjhesa ha ion e arabelang ka botebo (DRIE)
* Tlhahiso ea sebopeho sa li-chip tsa Photonic
* Tlhahiso ea lisebelisoa tsa MEMS
* Ts'ebetso ea kanale ea Microfluidic
* Meaho e nepahetseng ea mahlo
* Nanofabrication lipulong tsa lipatlisiso
Ditshebediso tsena kaofela di hloka taolo e tiileng hodima ho otloloha ha mahlakore, boreledi ba bokahodimo, le botsitso ba tshebetso.

Qetello
Ho tjhesa ka cryogenic ha se feela taba ea ho theola mocheso. Ke taba ea ho fihlela maemo a mocheso a tsitsitseng, a laoloang ka botebo a nolofalletsang boemo ba ho nepahala le botsitso ho feta meeli ea lits'ebetso tsa ho tjhesa tse tloaelehileng. Ha mahlale a semiconductor, photonic, le nanomanufacturing a ntse a tsoela pele, ho tjhesa ka cryogenic ho fetoha ts'ebetso ea mantlha ea bohlokoa, 'me litsamaiso tse tšepahalang tsa taolo ea mocheso li ntse li le motheo o e lumellang ho sebetsa ka botlalo.