Kugadzira Cryogenic Kunogonesa Kugadzirisa Zvinhu Zvakanyatsojeka uye Zvinodzorwa

Sezvo kugadzira zvinhu zvemhando yepamusoro kuri kuramba kuchiwedzera kusimbaradza, kudzora maitiro kwakasimba, uye kushandira pamwe kwezvinhu zvakawanda, matekinoroji ekucheka ari kuchinja zvinoenderana nazvo. Kucheka kweCryogenic, kuburikidza nekudzora tembiricha yekamuri nesubstrate, kunoita kuti kugadziriswa kwakasimba uye kudzokororwe kunyangwe pachikero chenanometer. Yave nzira yakakosha mukugadzira semiconductor, kugadzira michina yephotonic, kugadzira MEMS, uye mapuratifomu ekutsvagisa kwesainzi.

Chii Chinonzi Cryogenic Etching?
Kucheka kweCryogenic inzira yekucheka yakavakirwa paplasma inoitwa patembiricha yakaderera zvakanyanya, inowanzo tangira pa -80 °C kusvika -150 °C kana pasi. Munguva yekuita uku, substrate inochengetwa patembiricha yakadzika-yakadzika, zvichibvumira zvigadzirwa zve reaction kuti zvigadzire layer inodzorwa pamusoro pechinhu. Iyi nzira inovandudza zvakanyanya kunaka kwekucheka uye kudzora maitiro.

Nzira huru dzinosanganisira:
* Kucheka kwakavharwa kwemativi: Kudzikama kwemativi kwakawedzerwa kunoita kuti ma profiles acho anyatsomira uye akatwasuka.
* Kuvandudzwa kwekufanana kwemhinduro: Kupisa kwakaderera kunoderedza kushanduka kwehuwandu hwemhinduro, zvichivandudza kugadzikana kwechimiro.
* Hunhu hwepamusoro hwepamusoro: Kusagadzikana kwepamusoro kunotsigira michina yemagetsi inoshanda zvakanyanya uye inonzwisisika.

Mabhenefiti Akakosha eCryogenic Etching
1. Kugona Kugona Kuyera Chiyero Chepamusoro
Kucheka kweCryogenic kunoita kuti zvive nyore kushandisa ma aspect ratios akakwira zvikuru nemadziro akamira, zvichiita kuti zvive zvakanaka pakucheka kwesilicon yakadzika, ma microchannels, uye ma MEMS structures akaomarara.

2. Kuenderana Kwakanaka Kwemaitiro uye Kudzokororwa
Kudzora tembiricha yakadzika inosimbisa mwero we etch, zvichitsigira nzvimbo dzekugadzira dzinoda kuenderana kwakasimba kwe batch-to-batch.

3. Kuenderana Kwezvinhu Zvakakura
Kucheka kweCryogenic kwakakodzera zvinhu zvakasiyana-siyana, zvinosanganisira:
* Silikoni
* MaOkisidi
* Madhiridhi
* Mapolima akasarudzwa
* Zvinhu zvePhotonic zvakaita se lithium niobate (LiNbO₃)

4. Kuderedzwa Kwekukuvadzwa Kwepamusoro
Kuputika kwemaion pasi kunoderedza kuumbwa kwezvikanganiso, zvichiita kuti maitiro acho akwane zvakanaka kune zvikamu zve optical, infrared detectors, uye high-sensitivity microstructures.

Zvikamu Zvikuru zveCryogenic Etching System
Sisitimu yekucheka cryogenic inowanzoitwa inosanganisira:
* Kamuri reCryogenic uye danho re electrode rakatonhorera rekushanda kwakasimba kwekupisa kwakanyanya
* Plasma source (RF / ICP) kugadzira mhando dzemhando dze reactive dzine density yakakura
* Sisitimu yekudzora tembiricha (midziyo yekutonhodza) kuchengetedza hwindo rekuita rakagadzikana
* Sisitimu yekuendesa gasi, inotsigira magasi akadai seSF₆ neO₂
* Sisitimu yekudzora yakavharika-yakavharika inobatanidza tembiricha, kumanikidzwa, simba, uye kuyerera kwegesi
Pakati peizvi, mashandiro ekudzora tembiricha ndicho chinhu chikuru chinoita kuti maitiro acho agare kwenguva refu uye kuti adzokororwe.

Kubatanidzwa kweThermal muMaitiro eMicro- neNano-Fabrication
Mumabasa ekugadzira zvinhu zvidiki-diki uye zvidiki, masisitimu ekucheka e cryogenic anowanzo shandiswa pamwe chete nemasisitimu ekugadzira zvinhu ne laser micromachining. Mashandisirwo akajairika anosanganisira kugadzira girazi kuburikidza nekugadzira, kugadzira michina ine photonic, uye kutara mawafer.

Kunyange zvazvo zvinangwa zvavo zvekupisa zvichisiyana:
* Kucheka kwe cryogenic kunoda kuchengetedza wafer pakupisa kwakanyanya kwe cryogenic
* Masisitimu eLaser anoda kuti laser irambe iri mukati mehwindo rekushanda rakamanikana, riri pedyo netembiricha yekamuri.
Maitiro ese ari maviri anoda kugadzikana kwakanyanya kwekushisa.
Kuti ive nechokwadi chekuti simba rekubuda kwelaser rakasimba, mhando yemwaranzi, uye kugara kwenguva refu kwekugadzirisa, machiller emvura elaser anonyatsonaka anowanzo shandiswa. Mukushandiswa kwelaser inokurumidza, kurongeka kwekudzora tembiricha kwe±0.1 °C kana kupfuura (senge ±0.08 °C) kunowanzo dikanwa.

Munzvimbo chaidzo dzemaindasitiri nedzekutsvaga, ma "constant-temperature coolers" akadai seTEYU CWUP-20 PRO ultrafast laser chiller , ane ±0.08 °C tembiricha yakagadzikana, anopa kudzora kupisa kwakavimbika panguva yekushanda kwenguva refu. Pamwe chete nema "cryogenic etching systems", ma "precision chillers" aya anoumba hurongwa hwakakwana uye hwakabatana hwekutarisira kupisa kwekugadzira zvinhu zvidiki-diki uye zvidiki.

Maitiro Akajairika
* Cryogenic etching inoshandiswa zvakanyanya mu:
* Kucheka kwemaion akadzika (DRIE)
* Kugadzirwa kwechimiro chePhotonic chip
* Kugadzirwa kwemidziyo yeMEMS
* Kugadziriswa kwechiteshi cheMicrofluidic
* Zvivako zvemaziso zvakanyatsonaka
* Nanofabrication pamapuratifomu ekutsvagisa
Mashandisirwo aya ese anoda kudzora zvakanyanya kutwasuka kwemadziro emativi, kutsvedzerera kwenzvimbo, uye kugadzikana kwemaitiro acho.

Mhedziso
Kucheka kweCryogenic hakusi kungodzikisa tembiricha chete. Kunoda kuti pave nemamiriro ekupisa akadzikama uye anodzora zvakadzama ayo anogonesa mwero wekururama uye kuenderana kupfuura miganhu yemaitiro ekucheka echinyakare. Sezvo matekinoroji e semiconductor, photonic, uye nanomanufacturing achiramba achifambira mberi, kucheka kwecryogenic kuri kuva chinhu chakakosha, uye masisitimu ekudzora tembiricha akavimbika anoramba ari hwaro hunoibvumira kushanda nesimba rayo rose.