Cryogenic Etching Ua Rau Kev Ua Khoom Siv Tau Zoo Dua Thiab Tswj Tau

Raws li kev tsim khoom siab heev txuas ntxiv mus rau qhov tseeb dua, kev tswj hwm cov txheej txheem nruj dua, thiab kev sib raug zoo ntawm cov khoom siv dav dua, cov thev naus laus zis etching tab tom hloov pauv raws li. Cryogenic Etching, los ntawm kev tswj hwm qhov kub ntawm chav thiab substrate, ua rau muaj kev ua tiav ruaj khov thiab rov ua dua txawm tias ntawm qhov ntsuas nanometer. Nws tau dhau los ua ib qho txheej txheem tseem ceeb hauv kev tsim khoom semiconductor, kev tsim khoom siv photonic, MEMS kev tsim khoom, thiab cov platform tshawb fawb.

Cryogenic Etching Yog Dab Tsi?
Cryogenic etching yog ib qho txheej txheem etching raws li plasma ua tiav ntawm qhov kub qis heev, feem ntau yog li ntawm -80 ° C txog -150 ° C lossis qis dua. Thaum lub sijhawm ua haujlwm, lub substrate raug tswj hwm ntawm qhov kub tob tob-cryogenic ruaj khov, tso cai rau cov khoom siv tshuaj tiv thaiv los tsim ib txheej passivation tswj hwm ntawm qhov chaw ntawm cov khoom siv. Lub tshuab no txhim kho qhov tseeb ntawm etching thiab kev tswj hwm cov txheej txheem.

Cov txheej txheem tseem ceeb suav nrog:
* Kev tshem tawm sab nraud: Kev ua kom zoo dua ntawm phab ntsa sab nraud ua rau cov qauv ncaj dua, ntau dua ntsug.
* Txhim kho qhov sib xws ntawm cov tshuaj tiv thaiv: Qhov kub qis dua txo qhov kev hloov pauv ntawm cov tshuaj tiv thaiv, txhim kho kev ruaj khov ntawm cov qauv.
* Qhov zoo tshaj plaws ntawm qhov chaw: Qhov roughness ntawm qhov chaw txo qis txhawb nqa kev ua haujlwm siab ntawm cov khoom siv kho qhov muag thiab cov khoom siv hluav taws xob rhiab heev.

Cov txiaj ntsig tseem ceeb ntawm Cryogenic Etching
1. Muaj Peev Xwm Sib Piv Siab
Kev siv cryogenic etching ua rau muaj qhov sib piv siab heev nrog cov phab ntsa ntsug, ua rau nws zoo tagnrho rau kev sib sib zog nqus silicon etching, microchannels, thiab cov qauv MEMS nyuaj.

2. Kev Ua Haujlwm Zoo Tshaj Plaws thiab Rov Ua Dua
Kev tswj qhov kub thiab txias tob tob ua rau cov nqi etch ruaj khov, txhawb nqa cov chaw tsim khoom uas xav tau kev sib xws ntawm cov khoom sib txawv.

3. Kev Sib Txuas Lus Dav Dav
Cryogenic etching yog tsim rau ntau yam khoom siv, suav nrog:
* Silicon
* Cov oxides
* Cov Nitrides
* Cov polymers xaiv
* Cov ntaub ntawv Photonic xws li lithium niobate (LiNbO₃)

4. Txo Kev Puas Tsuaj Ntawm Qhov Chaw
Kev tawg ion qis dua txo qhov tsis zoo, ua rau cov txheej txheem zoo rau cov khoom siv kho qhov muag, cov khoom siv infrared detectors, thiab cov qauv microstructures siab.

Cov Cheebtsam Tseem Ceeb ntawm Lub Tshuab Cryogenic Etching
Ib qho system cryogenic etching feem ntau muaj xws li:
* Cryogenic chamber thiab txias electrode theem rau kev ua haujlwm ruaj khov ultra-low-kub
* Qhov chaw plasma (RF / ICP) los tsim cov hom kab mob uas muaj zog heev
* Lub kaw lus tswj qhov kub thiab txias (cov khoom siv txias) kom tswj tau lub qhov rais txheej txheem ruaj khov
* Lub kaw lus xa roj, txhawb nqa cov roj xws li SF₆ thiab O₂
* Lub kaw lus tswj hwm kaw-voj sib koom ua ke qhov kub, siab, fais fab, thiab roj ntws
Ntawm cov no, kev tswj qhov kub thiab txias yog qhov tseem ceeb uas txiav txim siab qhov ruaj khov ntawm cov txheej txheem mus sij hawm ntev thiab rov ua dua.

Kev Sib Koom Tes Thermal hauv Micro- thiab Nano-Fabrication Processes
Hauv cov txheej txheem ua haujlwm micro- thiab nano-fabrication, cov txheej txheem cryogenic etching feem ntau siv nrog rau cov txheej txheem laser micromachining. Cov ntawv thov ib txwm muaj xws li iav los ntawm kev tsim, kev tsim khoom siv photonic, thiab kev cim wafer.

Txawm hais tias lawv cov hom phiaj thermal sib txawv:
* Cryogenic etching yuav tsum tau tswj cov wafer ntawm qhov kub tob-cryogenic
* Cov tshuab laser xav tau kom lub laser qhov chaw nyob hauv qhov rais ua haujlwm nqaim, ze rau chav sov
Ob qho txheej txheem xav tau qhov kub thiab txias ruaj khov heev.
Yuav kom ntseeg tau tias lub zog tso zis laser ruaj khov, qhov zoo ntawm lub teeb, thiab kev ua haujlwm ntev, cov tshuab txias dej laser uas muaj qhov tseeb siab feem ntau siv. Hauv kev siv laser ceev heev, kev tswj qhov kub thiab txias raug ntawm ±0.1 °C lossis zoo dua (xws li ±0.08 °C) feem ntau yog qhov yuav tsum tau ua.

Hauv kev lag luam tiag tiag thiab kev tshawb fawb, cov tshuab txias kub tas li xws li TEYU CWUP-20 PRO ultrafast laser chiller , nrog ± 0.08 °C kub ruaj khov, muab kev tswj hwm thermal txhim khu kev qha thaum lub sijhawm ua haujlwm ntev. Ua ke nrog cov tshuab cryogenic etching, cov tshuab txias precision no tsim cov txheej txheem tswj thermal tiav thiab sib koom tes rau kev tsim khoom me me thiab nano.

Cov Ntawv Thov Ib Txwm Muaj
* Cryogenic etching yog dav siv rau hauv:
* Kev sib sib zog nqus reactive ion etching (DRIE)
* Kev tsim cov qauv photonic chip
* Kev tsim khoom siv MEMS
* Kev ua cov channel microfluidic
* Cov qauv kho qhov muag precision
* Nanofabrication ntawm cov platform tshawb fawb
Cov ntawv thov no txhua yam yuav tsum tau tswj hwm nruj heev rau qhov ntsug ntawm phab ntsa, qhov du ntawm qhov chaw, thiab kev ua haujlwm sib xws.

Xaus lus
Kev siv cryogenic etching tsis yog hais txog kev txo qhov kub xwb. Nws yog hais txog kev ua tiav qhov ruaj khov, tswj tau qhov kub tob uas ua rau muaj qib kev raug thiab kev sib xws dhau ntawm cov txheej txheem etching ib txwm muaj. Raws li semiconductor, photonic, thiab nanomanufacturing technologies txuas ntxiv mus, cryogenic etching tab tom dhau los ua ib qho txheej txheem tseem ceeb, thiab cov txheej txheem tswj qhov kub thiab txias txhim khu kev qha tseem yog lub hauv paus uas tso cai rau nws ua haujlwm ntawm nws lub peev xwm tag nrho.