Kujambula kwa Cryogenic Kumathandiza Kukonza Zinthu Molondola Kwambiri komanso Mosasinthika

Pamene kupanga zinthu zapamwamba kukupitilirabe kulondola kwambiri, kuwongolera njira zolimba, komanso kugwirizana kwakukulu kwa zinthu, ukadaulo wokongoletsa zinthu ukupitirirabe. Kukongoletsa zinthu mozama, kudzera mu kuwongolera kutentha kwa chipinda ndi substrate, kumathandiza kuti zinthu ziyende bwino komanso mobwerezabwereza ngakhale pa sikelo ya nanometer. Yakhala njira yofunika kwambiri popanga zinthu za semiconductor, kupanga zida za photonic, kupanga MEMS, ndi nsanja zofufuzira zasayansi.

Kodi Kujambula kwa Cryogenic N'chiyani?
Kuduladula kwa cryogenic ndi njira yoduladula yochokera ku plasma yomwe imachitika pa kutentha kochepa kwambiri, nthawi zambiri kuyambira -80 °C mpaka -150 °C kapena kutsika. Panthawi yoduladula, gawo lapansi limasungidwa pa kutentha kokhazikika kwa cryogenic, zomwe zimapangitsa kuti zinthu zomwe zimachitika zipange gawo lolamulidwa la passivation pamwamba pa chinthucho. Njirayi imawongolera kwambiri kulondola kwa kuduladula komanso kulamulira njira.

Njira zazikulu ndi izi:
* Kupindika kwa mbali: Kupindika kwa mbali kumapangitsa kuti ma profiles olunjika komanso olunjika azikhala olunjika.
* Kugwirizana kwa zinthu zomwe zimachitika: Kutentha kochepa kumachepetsa kusinthasintha kwa kuchuluka kwa zinthu zomwe zimachitika, zomwe zimapangitsa kuti kapangidwe kake kakhale kolimba.
* Ubwino wapamwamba kwambiri wa pamwamba: Kuchepa kwa kuuma kwa pamwamba kumathandiza zipangizo zamagetsi zowunikira komanso zowunikira.

Ubwino Waukulu wa Cryogenic Etching
1. Kuthekera Kwambiri kwa Chiŵerengero cha Mawonekedwe
Kujambula kwa Cryogenic kumalola kuti zinthu zikhale ndi ma aspect ratios apamwamba kwambiri okhala ndi ma vertical sidewalls, zomwe zimapangitsa kuti zikhale zoyenera kugwiritsa ntchito silicon etching yozama, microchannels, ndi ma MEMS structures ovuta.

2. Kugwirizana Kwabwino Kwambiri ndi Kubwerezabwereza kwa Njira
Kulamulira kutentha kwa cryogenic kumalimbitsa kuchuluka kwa etch, kuthandizira malo opangira omwe amafuna kusinthasintha kwa batch-to-batch.

3. Kugwirizana kwa Zinthu Zambiri
Kudula kwa cryogenic ndikoyenera kugwiritsa ntchito zinthu zosiyanasiyana, kuphatikizapo:
* Silikoni
* Ma oxide
* Ma nitride
* Ma polima osankhidwa
* Zipangizo za Photonic monga lithiamu niobate (LiNbO₃)

4. Kuchepetsa Kuwonongeka kwa Malo
Kuphulika kwa ma ion otsika kumachepetsa kupangika kwa zolakwika, zomwe zimapangitsa kuti ntchitoyi ikhale yoyenera kwambiri pazinthu zowunikira, zowunikira za infrared, ndi ma microstructures okhala ndi mphamvu zambiri.

Zigawo Zazikulu za Dongosolo Lojambula la Cryogenic
Dongosolo lodziwika bwino la cryogenic etching limapangidwa ndi:
* Chipinda cha Cryogenic ndi siteji ya elekitirodi yozizira kuti igwire ntchito bwino kwambiri kutentha kwambiri
* Gwero la plasma (RF / ICP) kuti lipange mitundu yothamanga kwambiri
* Dongosolo lowongolera kutentha (zida zoziziritsira) kuti likhale ndi zenera lokhazikika la njira
* Njira yotumizira gasi, yothandizira mpweya monga SF₆ ndi O₂
* Dongosolo lolamulira lotsekedwa logwirizanitsa kutentha, kuthamanga, mphamvu, ndi kuyenda kwa mpweya
Pakati pa izi, magwiridwe antchito owongolera kutentha ndiye chinthu chofunikira chomwe chimatsimikizira kukhazikika kwa nthawi yayitali komanso kubwerezabwereza kwa njira.

Kugwirizana kwa Kutentha mu Njira Zopangira Zinthu Zazing'ono ndi Zazing'ono
Mu ntchito zogwira ntchito zazing'ono komanso zazing'ono, makina ojambulira a cryogenic nthawi zambiri amagwiritsidwa ntchito limodzi ndi makina ojambulira a laser. Ntchito zambiri zimaphatikizapo magalasi kudzera mu mapangidwe, kupanga zida za photonic, ndi kulemba chizindikiro cha wafer.

Ngakhale zolinga zawo za kutentha zimasiyana:
* Kudula kwa cryogenic kumafuna kusunga wafer pamalo otentha kwambiri
* Makina a laser amafuna kuti gwero la laser likhale mkati mwa zenera logwirira ntchito lopapatiza, pafupi ndi kutentha kwa chipinda.
Njira zonsezi zimafuna kukhazikika kwa kutentha kwambiri.
Kuti muwonetsetse kuti mphamvu yotulutsa laser yokhazikika, mtundu wa beam, komanso kusinthasintha kwa nthawi yayitali, ma laser water chillers olondola kwambiri amagwiritsidwa ntchito nthawi zambiri. Mu ma laser othamanga kwambiri, kulondola kwa kutentha kwa ±0.1 °C kapena kupitirira apo (monga ±0.08 °C) nthawi zambiri kumafunika.

Mu mafakitale enieni ndi kafukufuku, ma chiller otenthetsera kutentha monga TEYU CWUP-20 PRO ultrafast laser chiller , okhala ndi kutentha kokhazikika kwa ±0.08 °C, amapereka mphamvu yodalirika yowongolera kutentha panthawi yogwira ntchito kwa nthawi yayitali. Pamodzi ndi machitidwe odulira a cryogenic, ma chiller olondola awa amapanga dongosolo lathunthu komanso logwirizana lowongolera kutentha kwa kupanga zinthu zazing'ono ndi zazing'ono.

Mapulogalamu Odziwika
* Kujambula kwa Cryogenic kumagwiritsidwa ntchito kwambiri mu:
* Kudula kwa ma ion ofunikira kwambiri (DRIE)
* Kupanga kapangidwe ka Photonic chip
* Kupanga zida za MEMS
* Kukonza njira ya Microfluidic
* Kapangidwe kolondola kwambiri ka kuwala
* Kupanga zinthu zopangidwa ndi nanofabrication pamapulatifomu ofufuza
Ntchito zonsezi zimafuna kuwongolera kwambiri momwe mbali ya khoma imayimirira, kusalala kwa pamwamba, komanso kusinthasintha kwa njira.

Mapeto
Kudula kwa cryogenic sikungokhudza kuchepetsa kutentha kokha. Kukutanthauza kupeza kutentha kokhazikika komanso kolamulidwa bwino komwe kumathandiza kuti pakhale kulondola komanso kusinthasintha kopitilira malire a njira zachikhalidwe zodula. Pamene ukadaulo wa semiconductor, photonic, ndi nanomanufacturing ukupitilira patsogolo, kudula kwa cryogenic kukukhala njira yofunika kwambiri, ndipo machitidwe odalirika owongolera kutentha amakhalabe maziko omwe amalola kuti igwire ntchito mokwanira.