Mā te Whakairo Cryogenic ka taea te tukatuka rauemi tika ake, ka taea hoki te whakahaere

I te mea kei te piki haere tonu te hanga matatau ki te tika ake, ki te whakahaere tukanga pakari ake, me te hototahi whānui o ngā rauemi, kei te whanake haere ngā hangarau whakairo. Mā te whakairo Cryogenic, mā te whakahaere tika i ngā pāmahana o te rūma me te papa, ka taea te tukatuka pumau me te auau ahakoa i te tauine nanometer. Kua waiho hei tukanga nui i roto i te hanga semiconductor, te hanga taputapu photonic, te hanga MEMS, me ngā tūāpapa rangahau pūtaiao.

He aha te Whakairo Cryogenic?
Ko te whakairo kiri-ā-roto he tukanga whakairo e ahu mai ana i te plasma e mahia ana i ngā pāmahana tino iti, mai i te –80 °C ki te –150 °C, iti iho rānei. I roto i te tukanga, ka mau tonu te papa i te pāmahana hohonu-kiri-ā-roto pumau, ka taea ai e ngā hua tauhohenga te hanga i tētahi paparanga whakakorekore whakahaeretia i runga i te mata o te rauemi. Ka whakapai ake tēnei tikanga i te tika o te whakairo me te whakahaere i te tukanga.

Ko ngā tikanga matua ko:
* Te whakairo taha kua pehia: Mā te whakarei ake i te korenga o te pakitara taha ka puta he āhua tika ake, he poutū ake.
* Te ōritetanga o te tauhohenga kua whakapaitia: Ka whakaitihia e ngā pāmahana iti ngā rerekētanga o te tere tauhohenga, ka whakapai ake i te pumau o te hanganga.
* Kounga mata tino pai: Ka tautokona e te taratara mata iti ngā taputapu hiko whatu me ngā taputapu hiko tairongo mahi teitei.

Ngā Painga Matua o te Whakairo Cryogenic
1. Te Āheinga Āhuatanga Teitei
Mā te whakairo cryogenic ka taea te hanga ōwehenga āhua tino teitei me ngā pakitara taha poutū, he mea tino pai mō te whakairo silicon hohonu, ngā hongere moroiti, me ngā hanganga MEMS matatini.

2. Te Pūmautanga me te Whakahokinga o te Tukanga Tino Pai
Mā te whakahaere pāmahana hohonu o te waikura ka whakau i ngā tere keri, ka tautoko i ngā taiao hanga e hiahia ana kia rite tonu te hanga i ia puranga.

3. Hototahitanga Rauemi Whānui
He pai te whakairo cryogenic mō te whānuitanga o ngā rauemi, tae atu ki:
* Hiraka
* Ngā waikura
* Ngā Nitride
* Ngā pūmua kua tīpakohia
* Ngā rauemi photonic pērā i te lithium niobate (LiNbO₃)

4. Te Whakaiti i te Kino o te Mata
Mā te iti o te pupuhi katote ka whakaitihia te hanganga hapa, ka pai ai te tukanga mō ngā wāhanga whatu, ngā pūoko infrared, me ngā hanganga moroiti tairongo-teitei.

Ngā Wāhanga Matua o te Pūnaha Whakairo Cryogenic
Ko te pūnaha whakairo cryogenic noa ko:
* Rūma cryogenic me te atamira hiko whakamatao mō te mahi pāmahana tino iti pumau
* Pūtake plasma (RF / ICP) hei whakaputa i ngā momo tauhohenga kiato-teitei
* Pūnaha whakahaere pāmahana (taputapu whakamatao) hei pupuri i te matapihi tukanga pumau
* Pūnaha tuku hau, e tautoko ana i ngā hau pēnei i te SF₆ me te O₂
* Pūnaha whakahaere porowhita-kati e whakarite ana i te pāmahana, te pēhanga, te mana, me te rere o te hau
I roto i ēnei, ko te mahi whakahaere pāmahana te mea matua e whakatau ana i te pumau o te tukanga mō te wā roa me te taea o te tukurua.

Te Whakaritenga Wera i roto i ngā Tukanga Hanga-iti me te Hanga-Nano
I roto i ngā rerenga mahi hanga-iti me te hanga-nano, he maha ngā wā ka whakamahia ngā pūnaha whakairo cryogenic me ngā pūnaha miihini iti laser. Ko ngā tono noa ko te hanganga karāhe, te hanga taputapu photonic, me te tohu wafer.

Ahakoa he rerekē ā rātou whāinga wera:
* Ko te whakairo cryogenic me pupuri te wafer i ngā pāmahana cryogenic hohonu
* Me pupuri te pūtake o te reera i roto i tētahi matapihi mahi whaiti, tata ki te pāmahana rūma
E hiahiatia ana e ngā tukanga e rua te pumau o te pāmahana.
Hei whakarite i te mana whakaputa taiaho pumau, te kounga o te hihi, me te rite tonu o te tukatuka mō te wā roa, he mea noa te whakamahi i ngā whakamatao wai taiaho tino tika. I roto i ngā tono taiaho tino tere, he maha ngā wā e hiahiatia ana te tika o te whakahaere pāmahana o te ±0.1 °C, neke atu rānei (pēnei i te ±0.08 °C).

I roto i ngā taiao ahumahi me ngā taiao rangahau tūturu, ka whakaratohia e ngā pouaka whakamatao pāmahana pumau pērā i te pouaka whakamatao taiaho tere rawa a TEYU CWUP-20 PRO, me te pumau pāmahana ±0.08 °C, te whakahaere pāmahana pono i te wā roa o te mahi. I te taha o ngā pūnaha whakairo cryogenic, ka hangaia e ēnei pouaka whakamatao tika he anga whakahaere pāmahana katoa me te taurite mō te hanga moroiti me te nano-tauine.

Ngā tono noa
* He whānuitia te whakamahinga o te whakairo kiri-ā-rangi i roto i:
* Te whakairo katote tauhohenga hohonu (DRIE)
* Te hanganga hanganga maramara photonic
* Te hanga taputapu MEMS
* Te tukatuka hongere moroiti
* Ngā hanganga whatu tino tika
* Te hanga nano i runga i ngā papaaho rangahau
Ko ēnei mahi katoa e hiahia ana kia tino whakahaerehia te poutū o te pakitara taha, te maeneene o te mata, me te ōritetanga o te tukanga.

Whakamutunga
Ehara i te mea ko te whakaheke i te pāmahana anake te mahi whakairo kiriuhi. Engari ko te whakatutuki i ngā āhuatanga pāmahana pumau, tino whakahaeretia e taea ai te taumata tika me te ōrite ki tua atu i ngā rohe o ngā tukanga whakairo tikanga. I te haere tonu o te whanaketanga o ngā hangarau semiconductor, photonic, me te nanomanufacturing, kei te noho te whakairo kiriuhi hei tukanga matua e kore e taea te whakakore, ā, ko ngā pūnaha whakahaere pāmahana pono tonu te turanga e taea ai e ia te mahi i tōna kaha katoa.