Ukuqopha Okune-Cryogenic Kuvumela Ukucutshungulwa Kwezinto Ezinembe Kakhulu Nokulawulwa Kakhulu

Njengoba ukukhiqiza okuthuthukile kuqhubeka nokuqhubekela phambili ekuqondeni okuphezulu, ukulawulwa kwenqubo okuqinile, kanye nokuhambisana okubanzi kwezinto, ubuchwepheshe bokuqopha buyashintsha ngokufanele. I-Cryogenic Etching, ngokulawula okunembile kwamazinga okushisa egumbi kanye ne-substrate, yenza kube lula ukucubungula okuzinzile nokuphindaphindekayo ngisho nasesikalini se-nanometer. Sekuyinqubo ebalulekile ekukhiqizeni i-semiconductor, ekwakhiweni kwamadivayisi e-photonic, ekukhiqizweni kwe-MEMS, kanye nasezinkundleni zocwaningo lwesayensi.

Kuyini Ukuqopha Okune-Cryogenic?
Ukuqopha okune-cryogenic kuyinqubo yokuqopha esekelwe ku-plasma eyenziwa emazingeni okushisa aphansi kakhulu, ngokuvamile kusukela ku--80 °C kuya ku--150 °C noma ngaphansi. Phakathi nenqubo, i-substrate igcinwa ekushiseni okuzinzile okune-cryogenic okujulile, okuvumela imikhiqizo yokusabela ukuthi yakhe ungqimba olulawulwayo lokudlula phezu kwezinto ezibonakalayo. Le ndlela ithuthukisa kakhulu ukunemba kokuqopha kanye nokulawulwa kwenqubo.

Izindlela ezibalulekile zifaka:
* Ukugoba okucindezelwe eceleni: Ukuphambuka okuthuthukisiwe kodonga oluseceleni kukhiqiza amaphrofayili aqondile futhi aqonde phezulu.
* Ukufana kokusabela okuthuthukisiwe: Amazinga okushisa aphansi anciphisa ukuguquguquka kwesilinganiso sokusabela, okuthuthukisa ukuzinza kwesakhiwo.
* Ikhwalithi ephezulu kakhulu: Ukungaguquguquki kobuso okuncishisiwe kusekela amadivayisi kagesi asebenza kahle kakhulu futhi azwelayo.

Izinzuzo Eziyinhloko Zokuqopha I-Cryogenic
1. Amandla Okulinganisa Okuphezulu
Ukugoba kwe-Cryogenic kuvumela izilinganiso eziphezulu kakhulu zesici ezinezindonga eziqondile, okwenza kube kuhle kakhulu ekugobeni kwe-silicon ejulile, iziteshi ezincane, kanye nezakhiwo ze-MEMS eziyinkimbinkimbi.

2. Ukuvumelana Okuhle Kakhulu Kwenqubo Nokuphindaphindwa
Ukulawulwa kwezinga lokushisa okujulile kwe-cryogenic kumisa amazinga e-etch, kusekela izindawo zokukhiqiza ezidinga ukuhambisana okuqinile kwe-batch-to-batch.

3. Ukuhambisana Okubanzi Kwezinto Ezibonakalayo
Ukuqopha nge-cryogenic kufanelekile ezintweni eziningi ezahlukene, okuhlanganisa:
* I-Silicon
* Ama-oxide
* Ama-nitride
* Ama-polymer akhethiwe
* Izinto ze-Photonic ezifana ne-lithium niobate (LiNbO₃)

4. Umonakalo Ophansi Oncishisiwe
Ukuqhuma kwama-ion aphansi kunciphisa ukwakheka kweziphambeko, okwenza inqubo ifaneleke kahle izingxenye ze-optical, ama-infrared detectors, kanye nezakhiwo ezincane ezizwela kakhulu.

Izingxenye Eziyinhloko Zesistimu Yokuqopha I-Cryogenic
Uhlelo olujwayelekile lokusika i-cryogenic luqukethe:
* Igumbi le-cryogenic kanye nesigaba se-electrode esipholile sokusebenza okuzinzile kwezinga lokushisa eliphansi kakhulu
* Umthombo we-plasma (RF / ICP) ukukhiqiza izinhlobo ezisabelayo ezinobuningi obukhulu
* Uhlelo lokulawula izinga lokushisa (imishini yokupholisa) ukuze kugcinwe iwindi lenqubo elizinzile
* Uhlelo lokulethwa kwegesi, olusekela amagesi afana ne-SF₆ kanye ne-O₂
* Uhlelo lokulawula oluvaliwe oluhlanganisa izinga lokushisa, ingcindezi, amandla, kanye nokugeleza kwegesi
Phakathi kwalokhu, ukusebenza kokulawula izinga lokushisa kuyisici esiyinhloko esinquma ukuzinza kwenqubo yesikhathi eside kanye nokuphindaphindeka kwayo.

Ukuhlanganiswa Kokushisa Kwezinqubo Zokwenziwa Kwezinto Ezincane Nezincane
Emisebenzini yokusebenza okusebenzayo kwe-micro- kanye ne-nano-fabrication, izinhlelo zokuqopha ze-cryogenic zivame ukusetshenziswa kanye nezinhlelo ze-laser micromachining. Izinhlelo zokusebenza ezijwayelekile zifaka phakathi ingilazi ngokwakhiwa, ukwenziwa kwedivayisi ye-photonic, kanye nokumaka i-wafer.

Nakuba izinhloso zabo zokushisa zihlukile:
* Ukuqopha okubangelwa yi-cryogenic kudinga ukugcina i-wafer emazingeni okushisa ajulile abangelwa yi-cryogenic
* Izinhlelo ze-laser zidinga ukugcina umthombo we-laser ngaphakathi kwefasitela lokusebenza elincane, eliseduze nokushisa kwegumbi
Zombili lezi zinqubo zidinga ukuzinza okukhulu kwezinga lokushisa.
Ukuqinisekisa amandla okukhipha i-laser azinzile, ikhwalithi ye-beam, kanye nokuvumelana kwesikhathi eside kokucubungula, kuvame ukusetshenziswa ama-laser water chiller anembile kakhulu. Ezisetshenzisweni ze-laser ezisheshayo kakhulu, ukunemba kokulawula izinga lokushisa okungu-±0.1 °C noma ngaphezulu (njengo-±0.08 °C) kuyadingeka njalo.

Ezindaweni zangempela zezimboni nezocwaningo, ama-chiller okushisa angaguquki njenge-TEYU CWUP-20 PRO ultrafast laser chiller , anokuqina kokushisa okungu-±0.08 °C, ahlinzeka ngokulawula ukushisa okuthembekile ngesikhathi sokusebenza isikhathi eside. Kanye nezinhlelo zokuchoboza ze-cryogenic, la ma-chiller anembile akha uhlaka oluphelele noluhlelekile lokuphathwa kokushisa kokukhiqiza okuncane kanye nokuncane.

Izicelo Ezijwayelekile
* Ukuqopha kwe-Cryogenic kusetshenziswa kabanzi ku:
* Ukuchoboza okujulile kwe-ion esabelayo (i-DRIE)
* Ukwakhiwa kwesakhiwo se-Photonic chip
* Ukukhiqizwa kwamadivayisi e-MEMS
* Ukucutshungulwa kwesiteshi se-Microfluidic
* Izakhiwo ezibonakalayo eziqondile
* Ukwenziwa kwe-nanofabrication kumapulatifomu ocwaningo
Zonke lezi zinhlelo zokusebenza zidinga ukulawulwa okuqinile kokuma kodonga oluseceleni, ukushelela kobuso, kanye nokungaguquguquki kwenqubo.

Isiphetho
Ukuqopha okune-cryogenic akukhona nje ukwehlisa izinga lokushisa. Kumayelana nokufinyelela izimo zokushisa ezizinzile nezilawulwa ngokujulile ezivumela izinga lokunemba nokuvumelana ngale kwemingcele yezinqubo zokuqopha ezivamile. Njengoba ubuchwepheshe be-semiconductor, i-photonic, kanye ne-nanomanufacturing buqhubeka nokuthuthuka, ukuqopha okune-cryogenic kuba inqubo ebalulekile ebaluleke kakhulu, futhi izinhlelo zokulawula izinga lokushisa ezithembekile zihlala ziyisisekelo esivumela ukuthi zisebenze ngokugcwele.