Nkhani za Metallization mu Semiconductor Processing ndi Momwe Mungathetsere

Metallization ndi gawo lofunika kwambiri pakukonza semiconductor, kuphatikiza kupanga zolumikizira zitsulo monga mkuwa kapena aluminiyamu. Komabe, zovuta zazitsulo - makamaka electromigration ndi kuwonjezereka kwa kukhudzana ndi kukhudzana-zimabweretsa zovuta zazikulu pakugwira ntchito ndi kudalirika kwa mabwalo ophatikizika.

Zomwe Zimayambitsa Mavuto a Metallization

Mavuto azitsulo amayamba chifukwa cha kutentha kwachilendo komanso kusintha kwa microstructural panthawi yopanga.:

1. Kutentha kwambiri: Panthawi yotentha kwambiri, zolumikizira zitsulo zimatha kukhala ndi electromigration kapena kukula kwambewu. Kusintha kwa microstructural uku kumasokoneza mphamvu zamagetsi ndikuchepetsa kudalirika kwa interconnect.

2. Kutentha kosakwanira: Ngati kutentha kuli kochepa kwambiri, kukana kukhudzana pakati pa zitsulo ndi silicon sikungatheke, zomwe zimapangitsa kuti pakhale kusayenda bwino kwamakono, kuwonjezereka kwa mphamvu zamagetsi, ndi kusakhazikika kwadongosolo.

Impact pa Chip Performance

Zotsatira zophatikizana za electromigration, kukula kwa tirigu, ndi kuwonjezereka kwa kukhudzana kungawononge kwambiri ntchito ya chip. Zizindikiro zimaphatikizira kufalitsa ma siginecha pang'onopang'ono, zolakwika zamalingaliro, komanso chiwopsezo chachikulu cholephera kugwira ntchito. Izi pamapeto pake zimabweretsa kukwera mtengo kwa kukonza ndikuchepetsa moyo wazinthu.

Zothetsera Mavuto a Metallization

1. Kukhathamiritsa Kutentha Kwambiri: Kukhazikitsa kasamalidwe kabwino ka kutentha, monga kugwiritsa ntchito mafakitale-grade water chillers , kumathandiza kusunga kutentha kosasinthasintha. Kuzizira kokhazikika kumachepetsa chiopsezo cha electromigration ndikukulitsa kukana kwachitsulo-silicon, kupititsa patsogolo magwiridwe antchito a chip ndi kudalirika.

2. Kupititsa patsogolo Njira: Kusintha zida, makulidwe, ndi njira zoyika za gawo lolumikizana lingathandize kuchepetsa kukana kukhudzana. Njira monga zopangira ma multilayer kapena doping yokhala ndi zinthu zinazake zimathandizira kuyenda komanso kukhazikika.

3. Kusankha Zinthu: Kugwiritsa ntchito zitsulo zokhala ndi kukana kwambiri kwa electromigration, monga ma aloyi amkuwa, ndi zida zolumikizirana kwambiri monga doped polysilicon kapena zitsulo zachitsulo, zimatha kuchepetsa kukana ndikuwonetsetsa kugwira ntchito kwanthawi yayitali.

Mapeto

Nkhani za Metallization mu semiconductor processing zitha kuchepetsedwa bwino kudzera pakuwongolera kutentha kwapamwamba, kukhathamiritsa kulumikizidwa kolumikizana, komanso kusankha zinthu mwanzeru. Mayankho awa ndi ofunikira pakusunga magwiridwe antchito a chip, kukulitsa moyo wazinthu, ndikuwonetsetsa kudalirika kwa zida za semiconductor.