Okwu Metallization na Semiconductor nhazi yana otu esi edozi ha

Metallization bụ nzọụkwụ dị oke egwu na nhazi semiconductor, gụnyere nhazi njikọ njikọ igwe dịka ọla kọpa ma ọ bụ aluminom. Otú ọ dị, ihe gbasara ntọhapụ—karịsịa eletrọnịkị na mmụba kọntaktị—na-ebute nnukwu ihe ịma aka na arụmọrụ na ntụkwasị obi nke sekit agbakwunyere.

Ihe na-ebute Okwu Metallization

A na-ebute nsogbu mgbanaka nke ọma site na ọnọdụ okpomọkụ na-adịghị mma na mgbanwe microstructural mgbe a na-emepụta ihe:

1. Oke okpomọkụ: N'oge anneal okpomọkụ dị elu, njikọta ígwè nwere ike ịnweta electromigration ma ọ bụ oke ọka. Mgbanwe microstructural ndị a na-emebi akụrụngwa eletrik ma belata ntụkwasị obi njikọ njikọ.

2. Okpomọkụ ezughi oke: Ọ bụrụ na ọnọdụ okpomọkụ dị oke ala, enweghị ike ịkwalite nguzogide kọntaktị dị n'etiti metal na silicon, na-eduga na nnyefe adịghị mma ugbu a, ịba ụba ike oriri, na nkwụsị usoro.

Mmetụta na arụrụ ọrụ Chip

Mmetụta njikọta nke elektrọnịk, uto ọka na mmụba kọntaktị nwere ike weda arụmọrụ mgbawa nke ukwuu. Mgbaàmà gụnyere nnyefe mgbaama ji nwayọọ nwayọọ, njehie mgbagha, yana ihe egwu dị elu nke ọdịda arụmọrụ. Nke a na-ebute n'ikpeazụ na-abawanye ụgwọ mmezi yana belata usoro ndụ ngwaahịa.

Ngwọta maka Nsogbu Metallization

1. Nkwalite njikwa okpomọkụ: Na-eme ihe njikwa ọkụ, dị ka iji ụlọ ọrụ mmepụta ihe-ọkwa mmiri chillers , na-enyere aka ịnọgide na-enwe okpomọkụ usoro na-agbanwe agbanwe. Iju oyi kwụsiri ike na-ebelata ohere nke electromigration ma na-ebuli nguzogide kọntaktị metal-silicon, na-eme ka arụmọrụ mgbawa na ntụkwasị obi dịkwuo elu.

2. Mmelite usoro: Idozi ihe, ọkpụrụkpụ, na ụzọ ntinye nke oyi akwa kọntaktị nwere ike inye aka belata nguzogide kọntaktị. Usoro dị ka ihe owuwu multilayer ma ọ bụ doping nwere ihe ụfọdụ na-eme ka ọsọ na kwụsie ike ugbu a.

3. Nhọrọ ihe: Iji ọla nwere nnukwu nguzogide electromigration, dị ka ọla kọpa alloys, yana ihe kọntaktị na-eduzi nke ukwuu dị ka doped polysilicon ma ọ bụ silicide metal, nwere ike ibelata nguzogide kọntaktị wee hụ na arụ ọrụ ogologo oge.

Mmechi

Enwere ike ibelata ihe gbasara nrụpụta igwe na nhazi semiconductor nke ọma site na njikwa okpomọkụ dị elu, nrụpụta kọntaktị kachasị mma, yana nhọrọ ngwa ngwa. Ihe ngwọta ndị a dị mkpa maka ịnọgide na-arụ ọrụ mgbawa, ịgbatị ogologo ndụ ngwaahịa, na ịhụ na ntụkwasị obi nke ngwaọrụ semiconductor.