Imiba ye-Metallization kwi-Semiconductor Processing kunye nendlela yokuSombulula

I-Metallization yinyathelo elibalulekileyo ekuqhutyweni kwe-semiconductor, ebandakanya ukubunjwa koqhagamshelwano lwetsimbi olufana nobhedu okanye i-aluminium. Nangona kunjalo, imiba ye-metallization-ingakumbi i-electromigration kunye nokunyuka kokuxhatshazwa koqhagamshelwano-kubangela imingeni ebalulekileyo ekusebenzeni kunye nokuthembeka kweesekethe ezidibeneyo.

Oonobangela beMiba yeMetallization

Iingxaki ze-metallization zibangelwa ikakhulu ziimeko zobushushu obungaqhelekanga kunye notshintsho lwe-microstructural ngexesha lokwenziwa:

1. Ubushushu obugqithisileyo: Ngexesha lobushushu obuphezulu be-annealing, i-metal interconnects ingaba ne-electromigration okanye ukukhula okuziinkozo okugqithisileyo. Olu tshintsho lwe-microstructural luphazamisa iimpawu zombane kunye nokunciphisa ukuthembeka koqhagamshelwano.

2. Ukushisa okunganeleyo: Ukuba iqondo lokushisa liphantsi kakhulu, ukuchasana koqhagamshelwano phakathi kwesinyithi kunye ne-silicon akukwazi ukulungiswa, okukhokelela ekuhanjisweni okungahambi kakuhle kwangoku, ukwanda kokusetyenziswa kwamandla, kunye nokungazinzi kwenkqubo.

Impembelelo kwi-Chip Performance

Iziphumo ezidityanisiweyo ze-electromigration, ukukhula okuziinkozo, kunye nokwanda kokuchasana nokunxibelelana kunokunciphisa kakhulu ukusebenza kwe-chip. Iimpawu ziquka ukuhanjiswa komqondiso okucothayo, iimpazamo zengqiqo, kunye nomngcipheko ophezulu wokungaphumeleli kokusebenza. Oku ekugqibeleni kukhokelela ekunyukeni kweendleko zokulondolozwa kunye nokunciphisa imijikelo yobomi bemveliso.

Izisombululo kwiingxaki zeMetallization

1. Ukulungiswa koLawulo lobushushu: Ukuphumeza ulawulo oluchanekileyo lwe-thermal, njengokusebenzisa i-industrial-grade water chillers , inceda ukugcina ubushushu benkqubo ehambelanayo. Ukupholisa okuzinzile kunciphisa umngcipheko we-electromigration kunye nokwandisa ukuxhathisa ukudibanisa kwe-metal-silicon, ukuphucula ukusebenza kwe-chip kunye nokuthembeka.

2. Ukuphuculwa kweNkqubo: Ukulungelelanisa izinto, ubukhulu, kunye neendlela zokubeka umgca woqhagamshelwano kunokuncedisa ukunciphisa ukuchasana koqhagamshelwano. Ubuchwephesha obufana nezakhiwo ezininzi okanye i-doping enezinto ezithile ziphucula ukuhamba kwangoku kunye nokuzinza.

3. Ukukhetha izinto eziphathekayo: Ukusebenzisa isinyithi esinokumelana okuphezulu kwi-electromigration, njenge-alloys zethusi, kunye nezixhobo zoqhagamshelwano eziqhuba kakhulu ezifana ne-polysilicon ye-doped okanye i-silicicides yensimbi, inokunciphisa ngakumbi ukuxhatshazwa koqhagamshelwano kunye nokuqinisekisa ukusebenza kwexesha elide.

Ukuqukumbela

Imiba ye-metallization ekusetyenzweni kwe-semiconductor inokuthotywa ngokusebenzayo ngolawulo oluphezulu lobushushu, ukwenziwa koqhagamshelwano olulungisiweyo, kunye nokukhethwa kwezinto ezicwangcisiweyo. Ezi zisombululo zibalulekile ekugcineni ukusebenza kwetshiphu, ukwandisa ubomi bemveliso, kunye nokuqinisekisa ukuthembeka kwezixhobo ze-semiconductor.