A cikin masana'antar semiconductor,
madaidaicin sarrafa zafin jiki
yana taka muhimmiyar rawa wajen tabbatar da ingancin guntu, aiki, da yawan samarwa. Ko da ɗan canjin zafin jiki na iya haifar da manyan canje-canje a halayen kayan aiki da sakamakon aiwatarwa, mai yuwuwar haifar da lahani ko gazawar na'urar.
![Why Temperature Control Is Critical in Semiconductor Manufacturing?]()
Tasirin Matsi na thermal
Na'urorin Semiconductor sun ƙunshi kayan yadudduka da yawa tare da ƙididdiga daban-daban na faɗaɗa thermal (CTE). Misali, wafers na siliki, haɗin haɗin ƙarfe, da dielectric yadudduka suna faɗaɗa ko kwangila a farashi daban-daban yayin saurin dumama ko sanyaya. Wannan rashin daidaituwa na iya haifar da damuwa na thermal, yana haifar da matsalolin masana'antu masu tsanani kamar:
* Kararraki:
Filaye ko tsagewar ciki a cikin wafers na iya yin lahani ga amincin injina kuma ya haifar da gazawar na'urar.
* Delamination:
Fina-finai na bakin ciki, kamar karfe ko yadudduka na dielectric, na iya rabuwa, suna raunana aikin wutar lantarki na guntu da dogaro na dogon lokaci.
* Nakasar tsari:
Tsarin na'ura na iya jujjuyawa saboda damuwa, yana haifar da matsalolin lantarki kamar yatsa ko gajeriyar da'ira.
Matsayin Sarrafa Madaidaicin Madaidaicin Zazzabi
Babban tsarin sarrafa zafin jiki kamar TEYU masana'antu chillers an ƙera su don kula da kwanciyar hankali na zafin jiki tare da na musamman na musamman. Misali, TEYU's
ultrafast Laser chiller
yana ba da daidaiton sarrafawa har zuwa ± 0.08 ° C, tabbatar da kwanciyar hankali na tsari don kayan aikin semiconductor mai mahimmanci, gami da etchers, tsarin sakawa, da masu shigar da ion.
![TEYU Ultrafast Laser Chiller CWUP-20ANP]()
Fa'idodin Daidaitaccen Sanyi a cikin Tsarin Semiconductor
1. Yana Hana Fasa Damuwar zafin jiki:
Ta hanyar kiyaye sanyi iri ɗaya, masu sanyi suna rage tasirin rashin daidaituwar CTE tsakanin kayan daban-daban, yadda ya kamata rage haɗarin fashewa da lalata yayin hawan keken zafi.
2. Yana inganta Uniformity na Doping:
A cikin dasawa da ion na gaba, ingantaccen yanayin zafi yana tabbatar da daidaitaccen kunna dopant a cikin wafer, haɓaka aikin guntu da aminci.
3. Yana Haɓaka Daidaituwar Layer Oxide:
Madaidaicin tsarin zafin jiki yana taimakawa kawar da gefuna-zuwa-tsakiyar thermal gradients yayin oxidation, yana tabbatar da kauri iri ɗaya oxide, mai mahimmanci ga daidaiton halayen transistor.
Kammalawa
Sarrafa zafin jiki yana da mahimmanci a ƙirƙira semiconductor. Tare da ingantacciyar kulawar thermal, masana'antun na iya rage lahani da damuwa na thermal ke haifarwa, haɓaka daidaituwa a cikin tsarin doping da oxidation, kuma a ƙarshe cimma babban rabon guntu da ingantaccen aikin na'urar.