Me yasa Kula da Zazzabi Yayi Mahimmanci a Masana'antar Semiconductor?

A cikin masana'antar semiconductor, madaidaicin kula da zafin jiki yana taka muhimmiyar rawa wajen tabbatar da ingancin guntu, aiki, da yawan samarwa. Ko da ɗan canjin zafin jiki na iya haifar da manyan canje-canje a halayen kayan aiki da sakamakon aiwatarwa, mai yuwuwar haifar da lahani ko gazawar na'urar.

Tasirin Matsi na thermal

Na'urorin Semiconductor sun ƙunshi kayan yadudduka da yawa tare da ƙididdiga daban-daban na faɗaɗa thermal (CTE). Misali, wafers na siliki, haɗin haɗin ƙarfe, da dielectric yadudduka suna faɗaɗa ko kwangila a farashi daban-daban yayin saurin dumama ko sanyaya. Wannan rashin daidaituwa na iya haifar da damuwa na thermal, yana haifar da matsalolin masana'antu masu tsanani kamar:

* Cracks: Sama ko fashewar ciki a cikin wafers na iya lalata amincin injina kuma ya haifar da gazawar na'urar.

* Delamination: Fina-finai na bakin ciki, kamar karfe ko yadudduka dielectric, na iya rabuwa, raunana aikin guntu da dogaro na dogon lokaci.

* Nakasar tsari: Tsarin na'ura na iya jujjuyawa saboda damuwa, yana haifar da matsalolin lantarki kamar zubewa ko gajeriyar kewayawa.

Matsayin Sarrafa Madaidaicin Madaidaicin Zazzabi

Babban tsarin sarrafa zafin jiki kamar TEYU masana'antu chillers an ƙera su don kula da kwanciyar hankali na zafin jiki tare da na musamman na musamman. Misali, TEYU's ultrafast Laser chiller yana ba da daidaiton sarrafawa har zuwa ± 0.08°C, yana tabbatar da daidaiton tsari don mahimman kayan aikin semiconductor, gami da etchers, tsarin ajiya, da ion implanters.

Fa'idodin Daidaitaccen Sanyi a cikin Tsarin Semiconductor

1. Yana Hana Fasa Damuwa na thermal: Ta hanyar kiyaye sanyi iri ɗaya, masu sanyi suna rage tasirin rashin daidaituwar CTE tsakanin kayan daban-daban, yadda ya kamata yana rage haɗarin fashewa da lalata yayin hawan keken zafi.

2. Inganta Doping Uniformity: A cikin ion implantation da na gaba annealing, m thermal yanayi tabbatar da daidaitaccen kunna dopant a fadin wafer, haɓaka aikin guntu da aminci.

3. Haɓaka daidaiton Layer Oxide: Madaidaicin tsarin zafin jiki yana taimakawa kawar da ƙarancin zafin jiki daga gefe-zuwa-tsakiyar lokacin iskar oxygen, yana tabbatar da kauri na ƙofa oxide, mai mahimmanci ga daidaitattun halayen transistor.

Kammalawa

Sarrafa zafin jiki yana da mahimmanci a ƙirƙira semiconductor. Tare da ingantacciyar kulawar thermal, masana'antun na iya rage lahani da damuwa na thermal ke haifarwa, haɓaka daidaituwa a cikin tsarin doping da oxidation, kuma a ƙarshe cimma babban rabon guntu da ingantaccen aikin na'urar.