Vim li cas Kev Tswj Kub Kub yog qhov tseem ceeb hauv Semiconductor Manufacturing?

Hauv kev tsim khoom semiconductor, kev tswj qhov kub thiab txias ua lub luag haujlwm tseem ceeb hauv kev ua kom cov nti zoo, kev ua tau zoo, thiab cov khoom tsim tawm. Txawm tias qhov kub thiab txias me ntsis tuaj yeem ua rau muaj kev hloov pauv tseem ceeb hauv cov khoom siv thiab cov txheej txheem tshwm sim, uas ua rau muaj qhov tsis xws luag lossis cov cuab yeej ua tsis tiav.

Qhov cuam tshuam ntawm Thermal Stress

Cov khoom siv semiconductor muaj ntau txheej txheej ntawm cov ntaub ntawv nrog sib txawv coefficients ntawm thermal expansion (CTE). Piv txwv li, silicon wafers, hlau interconnects, thiab dielectric khaubncaws sab nraud povtseg nthuav los yog cog lus ntawm txawv tus nqi thaum lub sij hawm ceev cua sov los yog txias. Qhov kev tsis sib haum no tuaj yeem tsim kev ntxhov siab thermal, ua rau muaj teeb meem loj xws li:

* Cracks: Nto lossis sab hauv cov kab nrib pleb hauv wafers tuaj yeem cuam tshuam kev ncaj ncees thiab ua rau cov cuab yeej tsis ua haujlwm.

* Delamination: nyias zaj duab xis, xws li hlau lossis dielectric txheej, tuaj yeem sib cais, ua rau cov nti hluav taws xob tsis muaj zog thiab kev ntseeg tau ntev.

* Cov txheej txheem deformation: Cov cuab yeej cuab tam yuav ua rau muaj kev ntxhov siab, ua rau muaj teeb meem hluav taws xob xws li xau lossis luv luv.

Lub luag haujlwm ntawm High-Precision Temperature Control

Advanced kub tswj tshuab zoo li TEYU industrial chillers yog tsim los tswj qhov kub thiab txias nrog tshwj xeeb precision. Piv txwv li, TEYU's ultrafast laser chiller muaj kev tswj qhov tseeb txog li ± 0.08 ° C, ua kom cov txheej txheem ruaj khov rau cov khoom siv semiconductor tseem ceeb, suav nrog etchers, deposition systems, thiab ion implanters.

Cov txiaj ntsig ntawm Precision Cooling hauv Semiconductor Txheej Txheem

1. Tiv thaiv thermal Stress Cracking: Los ntawm kev tswj cov cua txias, cov chillers txo qhov cuam tshuam ntawm CTE mismatch ntawm cov khoom sib txawv, zoo txo ​​qhov kev pheej hmoo ntawm cov kab nrib pleb thiab delamination thaum lub sij hawm thermal cycling.

2. Txhim kho Doping Uniformity: Nyob rau hauv ion implantation thiab tom qab annealing, ruaj thermal tej yam kev mob xyuas kom meej dopant activation nyob rau hauv lub wafer, txhim kho nti kev ua tau zoo thiab kev ntseeg tau.

3. Txhim kho Oxide Layer Consistency: Kev tswj xyuas qhov kub thiab txias yuav pab tshem tawm cov npoo-rau-nruab nrab thermal gradients thaum oxidation, kom ntseeg tau tias cov rooj vag oxide tuab tuab, tseem ceeb heev rau cov yam ntxwv ntawm cov transistor zoo ib yam.

Xaus

Kev tswj kub yog qhov tseem ceeb hauv kev tsim khoom semiconductor. Nrog high-precision thermal tswj, manufacturers tuaj yeem txo qhov tsis xws luag los ntawm thermal stress, txhim kho uniformity hauv doping thiab oxidation txheej txheem, thiab thaum kawg ua tiav cov nti yields ntau dua thiab cov cuab yeej zoo dua.