Chifukwa Chiyani Kuwongolera Kutentha Ndikofunikira Pakupanga Ma Semiconductor?

Pakupanga semiconductor, kuwongolera bwino kutentha  imagwira ntchito yofunika kwambiri pakuwonetsetsa kuti chip chili chabwino, magwiridwe antchito, ndi zokolola. Ngakhale kusinthasintha pang'ono kwa kutentha kumatha kubweretsa kusintha kwakukulu pamachitidwe azinthu ndikukonza zotuluka, zomwe zitha kubweretsa kuwonongeka kapena kuwonongeka kwa zida.

Zotsatira za Kupsinjika kwa Matenthedwe

Zipangizo za semiconductor zimakhala ndi zigawo zingapo zazinthu zokhala ndi ma coefficients osiyanasiyana owonjezera kutentha (CTE). Mwachitsanzo, zowotcha za silicon, zolumikizira zitsulo, ndi zigawo za dielectric zimakula kapena kukhazikika pamitengo yosiyana pakuwotcha kapena kuziziritsa mwachangu. Kusagwirizana kumeneku kungayambitse kupsinjika kwamafuta, zomwe zimabweretsa zovuta zopanga monga:

* Ming'alu: Ming'alu yam'mwamba kapena yamkati mwa zowotcha zimatha kusokoneza kukhulupirika kwa makina ndikupangitsa kuti chipangizocho chilephereke.

*Delamination: Makanema owonda, monga zitsulo kapena zigawo za dielectric, amatha kupatukana, kufooketsa mphamvu yamagetsi ya chip komanso kudalirika kwanthawi yayitali.

* Mapangidwe apangidwe: Zomangamanga za chipangizo zimatha kupindika chifukwa cha kupsinjika, zomwe zimayambitsa mavuto amagetsi monga kutayikira kapena mafupi afupikitsa.

Udindo wa High-Precision Temperature Control

Makina apamwamba owongolera kutentha ngati ma TEYU mafakitale otenthetsera amapangidwa kuti azisunga kutentha mwatsatanetsatane mwapadera. Mwachitsanzo, TEYU ultrafast laser chiller  imapereka kulondola kowongolera mpaka ± 0.08 ° C, kuwonetsetsa kukhazikika kwa zida zofunika kwambiri za semiconductor, kuphatikiza ma etchers, makina oyikapo, ndi implanters ion.

Ubwino Wozizira Kwambiri mu Semiconductor Processes

1. Amalepheretsa Kupsinjika kwa Matenthedwe Kutentha:  Pokhala ndi kuzizira kofanana, zoziziritsa kukhosi zimachepetsa kusagwirizana kwa CTE pakati pa zinthu zosiyanasiyana, kuchepetsa chiopsezo cha ming'alu ndi delamination panthawi yanjinga yotentha.

2. Kupititsa patsogolo Doping Uniformity:  Pakuyika ma ion ndi kuyatsa kotsatira, kutentha kosasunthika kumatsimikizira kuti dopant imatsegulidwa mosasinthasintha, kumapangitsa kuti chip chigwire ntchito komanso kudalirika.

3. Imawonjezera Kusasinthika kwa Gulu la Oxide:  Kuwongolera kolondola kwa kutentha kumathandiza kuthetsa matenthedwe apakati mpaka pakati pa ma oxidation, kuwonetsetsa kuti chipata cha oxide chikufanana, chofunikira kuti chikhale chofanana ndi mawonekedwe a transistor.

Mapeto

Kuwongolera kutentha ndikofunikira pakupanga semiconductor. Ndi kasamalidwe kolondola kwambiri kwa kutentha, opanga amatha kuchepetsa zolakwika zomwe zimadza chifukwa cha kupsinjika kwamafuta, kuwongolera kufanana kwa doping ndi ma oxidation, ndipo pamapeto pake amapeza zokolola zapamwamba za chip ndikuchita bwino kwa chipangizocho.