Kungani Ukulawulwa Kwezinga Lokushisa Kubalulekile Ekwenziweni Kwe-Semiconductor?

Ekwenziweni kwe-semiconductor, ukulawula izinga lokushisa okunembile  idlala indima ebalulekile ekuqinisekiseni ikhwalithi ye-chip, ukusebenza, kanye nesivuno sokukhiqiza. Ngisho nokuguquguquka okuncane kwezinga lokushisa kungabangela izinguquko ezibalulekile ekuziphatheni okubalulekile kanye nemiphumela yokucubungula, okungase kuholele ekulimaleni noma ekuhlulekeni kwedivayisi.

Umthelela Wokucindezeleka Okushisayo

Amadivayisi we-semiconductor aqukethe izendlalelo eziningi zezinto ezinama-coefficients ahlukene we-thermal expansion (CTE). Isibonelo, amawafa e-silicon, izixhumi zensimbi, nezingqimba ze-dielectric zinwebeka noma zinciphe ngamanani ahlukene phakathi nokushisisa ngokushesha noma ukupholisa. Lokhu kungafani kungadala ukucindezeleka okushisayo, okuholela ezinkingeni ezinkulu zokukhiqiza ezifana:

* Imifantu: Ukuqhekeka okungaphezulu noma kwangaphakathi kumawafa kungalimaza ubuqotho bemishini futhi kuholele ekuhlulekeni kwedivayisi.

* Ukuhlukaniswa: Amafilimu azacile, njengezendlalelo zensimbi noma ze-dielectric, angase ahlukane, enze buthaka ukusebenza kukagesi we-chip kanye nokwethembeka kwesikhathi eside.

* Ukuguqulwa kwesakhiwo: Izakhiwo zedivayisi zingasonteka ngenxa yengcindezi, zibangele izinkinga zikagesi njengokuvuza noma amasekhethi amafushane.

Iqhaza Lokulawula Ukushisa Okunembayo Okuphezulu

Amasistimu okulawula izinga lokushisa athuthukisiwe njengama-chiller embonini e-TEYU aklanyelwe ukugcina ukuqina kwezinga lokushisa ngokunemba okukhethekile. Isibonelo, i-TEYU's i-laser chiller esheshayo  inikeza ukunemba kokulawula okufika ku-±0.08°C, iqinisekisa ukuzinza kwenqubo yemishini ye-semiconductor ebalulekile, okuhlanganisa ama-etchers, amasistimu okufakwayo, nezifakeli ze-ion.

Izinzuzo Zokupholisa Okunembayo Ezinqubweni Ze-Semiconductor

1. Ivimbela Ukuqhekeka Kwe-Thermal Stress:  Ngokugcina ukupholisa okufanayo, ama-chiller anciphisa imiphumela yokungafani kwe-CTE phakathi kwezinto ezihlukene, ehlisa ngempumelelo ingcuphe yokuqhekeka kanye ne-delamination ngesikhathi sokuhamba ngebhayisikili elishisayo.

2. Ithuthukisa I-Doping Uniformity:  Ekufakweni kwe-ion kanye nokunamathisela okulandelayo, izimo zokushisa ezizinzile ziqinisekisa ukusebenza kwe-dopant okungaguquki kuyo yonke i-wafer, kuthuthukisa ukusebenza kwe-chip nokuthembeka.

3. Ithuthukisa Ukungaguquguquki Kwesendlalelo se-Oxide:  Ukulawulwa okunembile kwezinga lokushisa kusiza ukuqeda ama-gradient ashisayo ukusuka onqenqemeni kuye-maphakathi ngesikhathi se-oxidation, kuqinisekiswe ukujiya kwe-oxide yesango elifanayo, okubalulekile kuzici ze-transistor ezingaguquki.

Isiphetho

Ukulawulwa kwezinga lokushisa kubalulekile ekwenziweni kwe-semiconductor. Ngokuphathwa kwe-thermal okunembayo okuphezulu, abakhiqizi banganciphisa iziphambeko ezibangelwa ukucindezeleka okushisayo, bathuthukise ukufana kwezinqubo ze-doping ne-oxidation, futhi ekugcineni bazuze ukuvunwa okuphezulu kwe-chip nokusebenza okungcono kwedivayisi.