Kungani Ukulawulwa Kwezinga Lokushisa Kubalulekile Ekwenziweni Kwe-Semiconductor?

Ekwenziweni kwe-semiconductor, ukulawula izinga lokushisa okunembile idlala indima ebalulekile ekuqinisekiseni ikhwalithi ye-chip, ukusebenza, kanye nokukhiqiza. Ngisho nokushintshashintsha okuncane kwezinga lokushisa kungabangela izinguquko ezinkulu ekuziphatheni kwezinto ezibonakalayo kanye nemiphumela yenqubo, okungase kuholele ekuphazamisekeni noma ekuhlulekeni kwedivayisi.

Umthelela Wokucindezeleka Kokushisa

Amadivayisi e-semiconductor aqukethe izendlalelo eziningi zezinto ezine-coefficients ehlukene yokwanda kokushisa (i-CTE). Isibonelo, ama-silicon wafers, izixhumanisi zensimbi, kanye nezendlalelo ze-dielectric ziyanda noma zinciphe ngamazinga ahlukene ngesikhathi sokushisa noma ukupholisa okusheshayo. Lokhu kungafani kungadala ukucindezeleka kokushisa, okuholela ezinkingeni ezinkulu zokukhiqiza ezifana nalezi:

* Imifantu: Imifantu engaphezulu noma yangaphakathi kuma-wafer ingonakalisa ubuqotho bemishini futhi iholele ekungasebenzi kahle kwedivayisi.

* Ukuhlukanisa: Amafilimu amancane, njengezendlalelo zensimbi noma ze-dielectric, angase ahlukane, okwenza kube buthaka ukusebenza kukagesi kwe-chip kanye nokuthembeka kwesikhathi eside.

* Ukuguquguquka kwesakhiwo: Izakhiwo zedivayisi zingase zigobe ngenxa yokucindezeleka, okubangela izinkinga zikagesi njengokuvuza noma izifunda ezimfushane.

Indima Yokulawula Izinga Lokushisa Eliphezulu

Izinhlelo zokulawula izinga lokushisa ezithuthukisiwe ezifana neziqandisi zezimboni TEYU zenzelwe ukugcina izinga lokushisa lizinzile ngokunemba okukhulu. Isibonelo, TEYU's i-laser chiller esheshayo kakhulu inikeza ukunemba kokulawula okufika ku-±0.08°C, okuqinisekisa ukuzinza kwenqubo yemishini ebalulekile ye-semiconductor, kufaka phakathi ama-etcher, izinhlelo zokubeka, kanye nezifakeli ze-ion.

Izinzuzo Zokupholisa Ngokucophelela Ezinqubweni Ze-Semiconductor

1. Kuvimbela Ukuqhekeka Kokucindezeleka Kokushisa: Ngokugcina ukupholisa okufanayo, ama-chiller anciphisa imiphumela yokungafani kwe-CTE phakathi kwezinto ezahlukene, okunciphisa ngempumelelo ingozi yokuqhekeka kanye nokwehlukaniswa ngesikhathi sokujikeleza kokushisa.

2. Kuthuthukisa Ukufana Kokusebenzisa I-Doping: Ekufakweni kwe-ion kanye nokufakwa kwe-annealing okulandelayo, izimo zokushisa ezizinzile ziqinisekisa ukusebenza kwe-dopant okuqhubekayo kuyo yonke i-wafer, okuthuthukisa ukusebenza kwe-chip kanye nokuthembeka.

3. Kuthuthukisa Ukuhambisana Kwezingqimba Ze-Oxide: Ukulawulwa okunembile kwezinga lokushisa kusiza ekuqedeni ukuthambekela kokushisa okusuka emaphethelweni kuya emaphakathi ngesikhathi se-oxidation, okuqinisekisa ukujiya kwe-oxide yesango elifanayo, okubalulekile ezicini ze-transistor ezihambisanayo.

Isiphetho

Ukulawulwa kwezinga lokushisa kubalulekile ekwakhiweni kwe-semiconductor. Ngokuphathwa kokushisa okunembile kakhulu, abakhiqizi banganciphisa amaphutha abangelwa ukucindezeleka kokushisa, bathuthukise ukufana kwezinqubo zokusebenzisa izidakamizwa kanye ne-oxidation, futhi ekugcineni bafinyelele isivuno esiphezulu se-chip kanye nokusebenza okungcono kwedivayisi.