Kutheni ulawulo lobushushu lubalulekile kwiSemiconductor Manufacturing?

Kwimveliso ye-semiconductor, ulawulo lobushushu oluchanekileyo  idlala indima ebalulekileyo ekuqinisekiseni umgangatho we-chip, ukusebenza, kunye nemveliso yemveliso. Nokuba ukuguquguquka okuncinci kobushushu kunokubangela utshintsho olukhulu kwindlela yokuziphatha kunye neziphumo zenkqubo, okunokukhokelela kwiziphene okanye ukusilela kwesixhobo.

Impembelelo yoxinzelelo lwe-Thermal

Izixhobo ze-Semiconductor ziquka iileyile ezininzi zezixhobo kunye ne-coefficients eyahlukeneyo yokwandiswa kwe-thermal (CTE). Umzekelo, ii-silicone wafers, i-metal interconnects, kunye ne-dielectric layers zanda okanye zikhontraktha ngemilinganiselo eyahlukeneyo ngexesha lokufudumeza okanye ukupholisa ngokukhawuleza. Oku kungafaniyo kunokudala uxinzelelo lwe-thermal, ekhokelela kwimiba enzulu yokuvelisa njenge:

* Iintanda: Umphezulu okanye iintanda zangaphakathi kwii-wafers zinokubeka esichengeni intembeko yoomatshini kwaye kukhokelela ekungasebenzini kwesixhobo.

* Ukunciphisa: Iifilim ezibhityileyo, ezinje ngentsimbi okanye iileya zedielectric, zinokuhlukana, zenze buthathaka ukusebenza kombane wetshiphu kunye nokuthembeka kwexesha elide.

* Ukuguqulwa kwesakhiwo: Izakhiwo zesixhobo zinokujika ngenxa yoxinzelelo, zibangele iingxaki zombane njengokuvuza okanye iisekethe ezimfutshane.

Indima yoLawulo loBubushushu obuchanekileyo

Iinkqubo zokulawula ubushushu obuphezulu njenge-TEYU i-industrial chillers ziyilelwe ukugcina uzinzo lobushushu ngokuchaneka okukhethekileyo. Ngokomzekelo, i-TEYU's ultrafast laser chiller  inika ukuchaneka kokulawula ukuya kuthi ga kwi-± 0.08 ° C, iqinisekisa uzinzo lwenkqubo yezixhobo ezibalulekileyo ze-semiconductor, kubandakanywa i-etchers, iinkqubo zokubeka, kunye ne-ion implanters.

IiNzuzo zokuPholisa ngokuchanekileyo kwiiNkqubo zeSemiconductor

1. Ikhusela ukuCaphuka koxinzelelo lweThermal:  Ngokugcina ukupholisa okufanayo, ii-chillers zinciphisa iziphumo zokungafani kwe-CTE phakathi kwezixhobo ezahlukeneyo, ngokufanelekileyo ukunciphisa umngcipheko wokuqhekeka kunye ne-delamination ngexesha lokuhamba ngebhayisikile eshushu.

2. Ukuphucula iDoping Uniformity:  Ekufakelweni kwe-ion kunye nokufakwa okulandelayo, iimeko ezizinzileyo ze-thermal ziqinisekisa ukusebenza okungaguqukiyo kwe-dopant kwi-wafer, ukuphucula ukusebenza kwe-chip kunye nokuthembeka.

3. Ukwandisa ukuNxibelelana koMaleko we-Oxide:  Ulawulo oluchanekileyo lobushushu lunceda ekupheliseni i-edge-to-center gradients ngexesha le-oxidation, iqinisekisa ubukhulu besango le-oxide yesango elifanayo, kubalulekile kwiimpawu ze-transistor ezingaguqukiyo.

Ukuqukumbela

Ulawulo lobushushu luyimfuneko kwimveliso ye-semiconductor. Ngolawulo oluchanekileyo oluchanekileyo lwe-thermal, abavelisi banokunciphisa iziphene ezibangelwa uxinzelelo lwe-thermal, ukuphucula ukufana kwe-doping kunye neenkqubo ze-oxidation, kwaye ekugqibeleni bafezekise izivuno eziphezulu ze-chip kunye nokusebenza okungcono kwesixhobo.