Hobaneng Taolo ea Mocheso e le Bohlokoa Tlhahisong ea Semiconductor?

Ka tlhahiso ea semiconductor, taolo e nepahetseng ea mocheso  e bapala karolo ea bohlokoa ho netefatsa boleng ba chip, ts'ebetso, le tlhahiso ea tlhahiso. Esita le ho feto-fetoha ho fokolang ha thempereichara ho ka baka liphetoho tse kholo boitšoarong ba lintho tse bonahalang le ho sebetsa sephethong, e leng se ka bakang bokooa kapa ho hloleha ha lisebelisoa.

Phello ea Khatello ea Mocheso

Lisebelisoa tsa semiconductor li na le likarolo tse ngata tsa lisebelisoa tse nang le li-coefficients tse fapaneng tsa ho atolosa mocheso (CTE). Mohlala, li-wafers tsa silicon, likhokahano tsa tšepe, le likarolo tsa dielectric lia hola kapa li konteraka ka litheko tse fapaneng nakong ea ho futhumatsa kapa ho tsidifala ka potlako. Ho se lumellane hona ho ka baka khatello ea mocheso, e lebisang litabeng tse tebileng tsa tlhahiso tse kang:

* Mapetso: Mapetsong a ka holimo kapa a ka hare ho li-wafers a ka senya botšepehi ba mochine 'me a lebisa ho hloleheng ha lisebelisoa.

* Ho nyenyefatsa: Lifilimi tse tšesaane, joalo ka lira tsa tšepe kapa tsa dielectric, li ka 'na tsa arohana, tsa fokolisa ts'ebetso ea motlakase oa chip le ho ts'epahala ha nako e telele.

* Deformation ea sebopeho: Mehaho ea lisebelisoa e ka 'na ea sotheha ka lebaka la khatello ea maikutlo, ea baka mathata a motlakase joalo ka ho lutla kapa li-circuits tse khutšoane.

Karolo ea Taolo ea Mocheso o nepahetseng ka ho Fetisisa

Sistimi e tsoetseng pele ea taolo ea mocheso joalo ka li-chiller tsa indasteri tsa TEYU li etselitsoe ho boloka botsitso ba mocheso ka nepo e ikhethang. Ka mohlala, TEYU ultrafast laser chiller  e fana ka taolo e nepahetseng ea ho fihla ho ± 0.08 ° C, ho netefatsa botsitso ba ts'ebetso bakeng sa lisebelisoa tsa bohlokoa tsa semiconductor, ho kenyelletsa le li-etchers, li-deposition systems, le li-implanters tsa ion.

Melemo ea ho Pholisa ka ho Fetisisa Mekhoeng ea Semiconductor

1. E thibela Thermal Stress Cracking:  Ka ho boloka pholiso e ts'oanang, li-chillers li fokotsa litlamorao tsa ho se lumellane ha CTE lipakeng tsa lisebelisoa tse fapaneng, ka ho fokotsa kotsi ea mapetsong le delamination nakong ea libaesekele tse futhumetseng.

2. E ntlafatsa ho tšoana ha Doping:  Ho kenyelletsoang ha ion le ho anneal ka mor'a moo, maemo a tsitsitseng a mocheso a netefatsa ts'ebetso ea dopant e sa fetoheng ho pholletsa le sephaphatha, ho matlafatsa ts'ebetso ea chip le ho ts'epahala.

3. E Ntlafatsa Lera la Oxide e tsitsitseng:  Taolo e nepahetseng ea mocheso e thusa ho felisa likhahla tsa mocheso ho tloha bohareng ho isa bohareng nakong ea oxidation, ho netefatsa botenya ba heke e ts'oanang ea oxide, e bohlokoa bakeng sa litšobotsi tse tsitsitseng tsa transistor.

Qetello

Taolo ea mocheso ke ea bohlokoa haholo tlhahisong ea semiconductor. Ka taolo e phahameng ea mocheso o phahameng, bahlahisi ba ka fokotsa likoli tse bakoang ke khatello ea mocheso, ba ntlafatsa ho tšoana ha mekhoa ea doping le oxidation, 'me qetellong ba finyella lihlahisoa tse phahameng tsa chip le ts'ebetso e ntle ea lisebelisoa.