Sei Kudzora Kwekushisa Kwakakosha muSemiconductor Manufacturing?

Mukugadzira semiconductor, chaiyo tembiricha control  inoita basa rakakosha mukuona chip mhando, kuita, uye goho rekugadzira. Kunyangwe kuderera kushoma kwetembiricha kunogona kukonzera shanduko huru mumabatiro enyama uye maitiro ekugadzirisa, izvo zvinogona kutungamirira kukukanganisika kana kutadza kwemudziyo.

Mhedzisiro yeThermal Stress

Semiconductor midziyo ine akawanda akaturikidzana emidziyo ane akasiyana coefficients ekuwedzera kwekupisa (CTE). Semuyenzaniso, silicon wafers, metal interconnects, uye dielectric layers dzinowedzera kana chibvumirano pamitengo yakasiyana panguva yekudziya nekukurumidza kana kutonhora. Kusawirirana uku kunogona kugadzira kushushikana kwekupisa, zvichitungamira kune dzakakomba nyaya dzekugadzira senge:

* Mitswe: Kutsemuka kwepamusoro kana kwemukati mumawafers kunogona kukanganisa kutendeseka kwemuchina uye kukonzeresa kutadza kwemudziyo.

* Delamination: Mafirimu matete, akadai sesimbi kana dielectric layers, anogona kupatsanura, achinetesa mashandiro emagetsi echip uye kuvimbika kwenguva refu.

* Deformation yemaitiro: Zvimiro zvemudziyo zvinogona kuchinjika nekuda kwekushushikana, zvichikonzera matambudziko emagetsi senge kuvuza kana mapfupi maseketi.

Basa reHigh-Precision Temperature Control

Yepamberi tembiricha yekudzora masisitimu senge TEYU maindasitiri anopisa akagadzirirwa kuchengetedza kugadzikana kwetembiricha nekunyatso kurongeka. Semuenzaniso, TEYU's Ultrafast laser chiller  inopa kurongeka kwekutonga kunosvika ± 0.08 ° C, kuve nechokwadi kugadzikana kwemaitiro emidziyo yakakosha semiconductor, kusanganisira etchers, deposition system, uye ion implanters.

Mabhenefiti e Precision Kutonhodza muSemiconductor Maitiro

1. Inodzivirira Thermal Stress Cracking:  Nekuchengetedza kutonhora kweyunifomu, machiller anoderedza mhedzisiro yeCTE kusawirirana pakati pezvinhu zvakasiyana, nekudzikisa zvakanyanya njodzi yekutsemuka uye delamination panguva yekupisa bhasikoro.

2. Inovandudza Doping Uniformity:  Mukuisirwa ion uye kunotevera annealing, yakagadzikana yekupisa mamiriro anovimbisa kuenderana dopant activation mukati mewafer, inosimudzira chip performance uye kuvimbika.

3. Inovandudza Oxide Layer Consistency:  Kunyatso kudzora tembiricha kunobatsira kubvisa kumucheto-ku-pakati-kusvika-pakati ekupisa kwemagetsi panguva yeoxidation, kuve nechokwadi cheyunifomu gedhi oxide ukobvu, yakakosha kune inofanana transistor maitiro.

Mhedziso

Kudzora tembiricha kunokosha mukugadzira semiconductor. Iine yakakwirira-chaiyo yekupisa manejimendi, vagadziri vanogona kuderedza kuremara kunokonzerwa nekupisa kwekushushikana, kunatsiridza kufanana mune doping uye oxidation maitiro, uye pakupedzisira kuwana yakakwira chip goho uye zvirinani mashandiro echishandiso.