Taolo e Nepahetseng ea Mocheso bakeng sa Litsamaiso tsa Laser le Lisebelisoa tsa Indasteri Ho tloha ka 2002
Puo
Taolo e nepahetseng ea mocheso e bohlokoa tlhahisong ea semiconductor ho thibela khatello ea mocheso, ho ntlafatsa botsitso ba ts'ebetso, le ho ntlafatsa ts'ebetso ea chip. Li-chillers tse nepahetseng haholo li thusa ho fokotsa likoli tse kang mapetsong le delamination, ho netefatsa doping e ts'oanang, le ho boloka botenya ba oxide layer bo sa fetoheng - lintlha tsa bohlokoa ho eketsa chai le ho ts'epahala.
Tlhahisong ea semiconductor, taolo e nepahetseng ea mocheso e bapala karolo ea bohlokoa ho netefatsa boleng ba chip, ts'ebetso le tlhahiso ea tlhahiso. Esita le ho feto-fetoha ho fokolang ha thempereichara ho ka baka liphetoho tse kholo boitšoarong ba lintho tse bonahalang le ho sebetsa sephethong, e leng se ka bakang bokooa kapa ho hloleha ha lisebelisoa.
Phello ea Khatello ea Mocheso
Lisebelisoa tsa semiconductor li na le likarolo tse ngata tsa lisebelisoa tse nang le li-coefficients tse fapaneng tsa ho atolosa mocheso (CTE). Mohlala, li-wafers tsa silicon, likhokahano tsa tšepe, le likarolo tsa dielectric lia hola kapa li konteraka ka litheko tse fapaneng nakong ea ho futhumatsa kapa ho tsidifala ka potlako. Ho se lumellane hona ho ka baka khatello ea maikutlo, e lebisang litabeng tse tebileng tsa tlhahiso tse kang:
* Mapetso: Mapetso a bokaholimo kapa ka hare ho li-wafers a ka senya botsitso ba mochini mme a lebisa ho hloleheng ha sesebelisoa.
* Delamination: Lifilimi tse tšesaane, tse kang likarolo tsa tšepe kapa tsa dielectric, li ka 'na tsa arohana, tsa fokolisa ts'ebetso ea motlakase oa chip le ho tšepahala ha nako e telele.
* Phetoho ea sebopeho: Meaho ea sesebelisoa e ka sotheha ka lebaka la khatello ea maikutlo, ea baka mathata a motlakase joalo ka ho lutla kapa li-circuits tse khutšoane.
Karolo ea Taolo ea Mocheso o nepahetseng ka ho Fetisisa
Sistimi e tsoetseng pele ea taolo ea mocheso joalo ka li-chiller tsa indasteri tsa TEYU li etselitsoe ho boloka botsitso ba mocheso ka nepo e ikhethang. Mohlala, TEYU's ultrafast laser chiller e fana ka taolo e nepahetseng ea ho fihla ho ± 0.08 ° C, e netefatsa botsitso ba ts'ebetso bakeng sa lisebelisoa tsa bohlokoa tsa semiconductor, ho kenyeletsoa li-etchers, li-deposition system, le li-implanters tsa ion.
Melemo ea ho Pholisa ka ho Fetisisa Mekhoeng ea Semiconductor
1. E thibela Thermal Stress Cracking: Ka ho boloka pholileng e tšoanang, li-chillers li fokotsa liphello tsa ho se lumellane ha CTE pakeng tsa lisebelisoa tse fapaneng, ka katleho ho fokotsa kotsi ea mapetsong le delamination nakong ea libaesekele tse futhumetseng.
2. E Ntlafatsa Doping Uniformity: Ka ho kenngoa ha ion le ho kenngoa ka mor'a moo, maemo a tsitsitseng a mocheso a tiisa ts'ebetso e tsitsitseng ea dopant ho pholletsa le sephaphatha, ho matlafatsa ts'ebetso ea chip le ho tšepahala.
3. E Ntlafatsa Botenya ba Lera la Oxide: Taolo e nepahetseng ea mocheso e thusa ho felisa likhahla tsa mocheso ho isa bohareng nakong ea oxidation, ho netefatsa botenya ba heke ea oxide e lekanang, ea bohlokoa bakeng sa litšobotsi tse tsitsitseng tsa transistor.
Qetello
Taolo ea mocheso ke ea bohlokoa haholo tlhahisong ea semiconductor. Ka taolo e phahameng ea mocheso o phahameng, bahlahisi ba ka fokotsa likoli tse bakoang ke khatello ea mocheso, ba ntlafatsa ho tšoana ha mekhoa ea doping le oxidation, 'me qetellong ba finyella lihlahisoa tse phahameng tsa chip le ts'ebetso e ntle ea lisebelisoa.
Re mona bakeng sa hau ha o re hloka.
Ka kopo tlatsa foromo ho ikopanya le rona, 'me re tla thabela ho u thusa.
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TEYU S&A Chiller e thehiloe ka 2002 e na le boiphihlelo ba lilemo tse 23 tsa tlhahiso ea chiller, 'me joale e amoheloa e le pula-maliboho ea mahlale a pholiso le molekane ea tšepahalang indastering ea laser.
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