Kutheni Ulawulo Lobushushu Lubaluleke Kakhulu Kwimveliso Yee-Semiconductor?

Kwimveliso ye-semiconductor, ulawulo oluchanekileyo lobushushu ludlala indima ebalulekileyo ekuqinisekiseni umgangatho weetship, ukusebenza, kunye nemveliso. Nokuba ukuguquguquka okuncinci kobushushu kunokubangela utshintsho olukhulu kwindlela izinto ezisebenza ngayo kunye neziphumo zenkqubo, okunokubangela iziphene okanye ukusilela kwesixhobo.

Impembelelo yoxinzelelo lobushushu

Izixhobo ze-semiconductor zenziwe ngamaleya amaninzi ezinto ezinee-coefficients ezahlukeneyo zokwandiswa kobushushu (CTE). Umzekelo, ii-silicon wafers, ii-metal interconnects, kunye namaleya e-dielectric ayanda okanye anciphe ngamanani ahlukeneyo ngexesha lokufudumeza okanye ukupholisa ngokukhawuleza. Oku kungafani kunokubangela uxinzelelo lobushushu, okukhokelela kwiingxaki ezinkulu zokuvelisa ezifana nezi:

* Iimfanta: Iimfanta ezingaphezulu okanye zangaphakathi kwiiwafers zingonakalisa ukuthembeka koomatshini kwaye zikhokelele ekungasebenzi kakuhle kwesixhobo.

* Ukwahlulahlula: Iifilimu ezincinci, ezifana neengqimba zesinyithi okanye ze-dielectric, zinokwahlukana, nto leyo ebangela ukuba ukusebenza kombane kwetship kube buthathaka kwaye kuthembeke ixesha elide.

* Ukuguquguquka kwesakhiwo: Izakhiwo zesixhobo zinokugoba ngenxa yoxinzelelo, nto leyo ebangela iingxaki zombane ezifana nokuvuza okanye ii-short circuits.

Indima yoLawulo loBushushu obuPhezulu

Iinkqubo zokulawula ubushushu eziphucukileyo ezifana nee-TEYU industrial chillers zenzelwe ukugcina uzinzo lobushushu ngokuchanekileyo okukhulu. Umzekelo, i-TEYU's ultrafast laser chiller inikezela ngokuchanekileyo kolawulo ukuya kuthi ga kwi-±0.08°C, iqinisekisa uzinzo lwenkqubo kwizixhobo ezibalulekileyo ze-semiconductor, kubandakanya ii-etchers, iinkqubo zokubeka, kunye nee-ion implanters.

Iingenelo zokuPholisa ngokuchanekileyo kwiinkqubo zeSemiconductor

1. Ithintela ukuqhekeka koxinzelelo lobushushu: Ngokugcina ukupholisa okufanayo, ii-chillers zinciphisa imiphumo yokungalingani kwe-CTE phakathi kwezinto ezahlukeneyo, zinciphisa ngempumelelo umngcipheko wokuqhekeka kunye nokwahlukana ngexesha lokujikeleza kobushushu.

2. Iphucula ukufana kwe-Doping: Kwi-ion implantation kunye ne-annealing elandelayo, iimeko zobushushu ezizinzileyo ziqinisekisa ukusebenza kwe-dopant rhoqo kwi-wafer, nto leyo ephucula ukusebenza kwe-chip kunye nokuthembeka.

3. Yomeleza Ukuhambelana Kwemaleko E-Oxide: Ulawulo oluchanekileyo lobushushu lunceda ekususeni i-edge-to-center thermal gradients ngexesha le-oxidation, ukuqinisekisa ubukhulu be-oxide yesango elifanayo, kubalulekile kwiimpawu ze-transistor ezihambelanayo.

Isiphelo

Ulawulo lobushushu lubaluleke kakhulu ekwenziweni kwe-semiconductor. Ngolawulo lobushushu oluchanekileyo, abavelisi banokunciphisa iziphene ezibangelwa kuxinzelelo lobushushu, baphucule ukufana kwiinkqubo ze-doping kunye ne-oxidation, kwaye ekugqibeleni bafumane isivuno esiphezulu se-chip kunye nokusebenza ngcono kwesixhobo.