Laser Izindaba
Ukulawulwa Kwezinga Lokushisa Okunembile Kwezinhlelo Ze-Laser Nezicelo Zezimboni Kusukela ngo-2002
Ulimi
Ukulawulwa kwezinga lokushisa okunembile kubalulekile ekukhiqizeni i-semiconductor ukuvimbela ukucindezeleka okushisayo, ukuthuthukisa ukuqina kwenqubo, nokuthuthukisa ukusebenza kwe-chip. Ama-chiller anembe kakhulu asiza ekwehliseni iziphambeko njengokuqhekeka kanye ne-delamination, aqinisekise ukudotshwa okufanayo, nokugcina ukujiya kongqimba lwe-oxide obufanayo—izinto ezibalulekile ekukhuliseni isivuno nokwethembeka.
Ekwenziweni kwe-semiconductor, ukulawula izinga lokushisa okunembile kudlala indima ebalulekile ekuqinisekiseni ikhwalithi ye-chip, ukusebenza, kanye nesivuno sokukhiqiza. Ngisho nokuguquguquka okuncane kwezinga lokushisa kungabangela izinguquko ezibalulekile ekuziphatheni okubalulekile kanye nemiphumela yokucubungula, okungase kuholele ekulimaleni noma ekuhlulekeni kwedivayisi.
Umthelela Wokucindezeleka Okushisayo
Amadivayisi we-semiconductor aqukethe izendlalelo eziningi zezinto ezinama-coefficients ahlukene we-thermal expansion (CTE). Isibonelo, amawafa e-silicon, izixhumi zensimbi, nezingqimba ze-dielectric zinwebeka noma zinciphe ngamanani ahlukene phakathi nokushisisa ngokushesha noma ukupholisa. Lokhu kungafani kungadala ingcindezi yokushisa, okuholela ezinkingeni ezinkulu zokukhiqiza ezifana nalezi:
* Imifantu: Ukuqhekeka okungaphezulu noma kwangaphakathi kumawafa kungonakalisa ubuqotho bemishini futhi kuholele ekuhlulekeni kwedivayisi.
* I-Delamination: Amafilimu azacile, njengezendlalelo zensimbi noma ze-dielectric, angase ahlukane, enze buthaka ukusebenza kukagesi we-chip kanye nokwethembeka kwesikhathi eside.
* Ukuguqulwa kwesakhiwo: Izakhiwo zedivayisi zingasonteka ngenxa yengcindezi, kubangele izinkinga zikagesi njengokuvuza noma amasekhethi amafushane.
Iqhaza Lokulawula Ukushisa Okunembayo Okuphezulu
Amasistimu okulawula izinga lokushisa athuthukisiwe njengama-chiller embonini e-TEYU aklanyelwe ukugcina ukuqina kwezinga lokushisa ngokunemba okukhethekile. Isibonelo, i-TEYU's ultrafast laser chiller inikezela ngokunemba kokulawula okufika ku-±0.08°C, iqinisekisa ukuzinza kwenqubo yezinto zokusebenza ze-semiconductor ebalulekile, okuhlanganisa ama-etchers, amasistimu okufakwayo, nezifakeli ze-ion.
Izinzuzo Zokupholisa Okunembayo Ezinqubweni Ze-Semiconductor
1. Ivimbela Ukuqhekeka Kwengcindezi Yokushisa: Ngokugcina ukupholisa okufanayo, ama-chiller anciphisa imiphumela yokungafani kwe-CTE phakathi kwezinto ezihlukene, ehlisa ngempumelelo ingcuphe yokuqhekeka kanye ne-delamination ngesikhathi sokuhamba ngebhayisikili elishisayo.
2. Ithuthukisa I-Doping Uniformity: Ekufakweni kwe-ion nasekufakweni okulandelayo, izimo zokushisa ezizinzile ziqinisekisa ukusebenza kwe-dopant okungaguquki kuyo yonke i-wafer, ithuthukisa ukusebenza kwe-chip nokuthembeka.
3. Ithuthukisa Ukungaguquguquki Kwesendlalelo Se-oksidi: Ukulawulwa okunembile kwezinga lokushisa kusiza ukuqeda ama-gradient ashisayo ukusuka onqenqemeni kuye-maphakathi phakathi ne-oxidation, iqinisekisa ukujiya kwesango elifanayo le-oxide, okubalulekile kuzici ze-transistor ezingaguquki.
Isiphetho
Ukulawulwa kwezinga lokushisa kubalulekile ekwenziweni kwe-semiconductor. Ngokuphathwa kwe-thermal okunembayo okuphezulu, abakhiqizi banganciphisa iziphambeko ezibangelwa ukucindezeleka okushisayo, bathuthukise ukufana kwezinqubo ze-doping ne-oxidation, futhi ekugcineni bazuze ukuvunwa okuphezulu kwe-chip nokusebenza okungcono kwedivayisi.
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Sicela ugcwalise ifomu ukuze uxhumane nathi, futhi sizokujabulela ukukusiza.
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I-TEYU S&A Chiller yasungulwa ngo-2002 ineminyaka engama-23 yesipiliyoni sokukhiqiza okupholile, futhi manje isiqashelwa njengephayona lobuchwepheshe bokupholisa kanye nozakwethu onokwethenjelwa embonini ye-laser.
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