Kungani Ukulawulwa Kwezinga Lokushisa Kubalulekile Ekwenziweni Kwe-Semiconductor?

Ekukhiqizweni kwe-semiconductor, ukulawulwa okunembile kokushisa kudlala indima ebalulekile ekuqinisekiseni ikhwalithi ye-chip, ukusebenza, kanye nokukhiqiza. Ngisho nokushintshashintsha okuncane kokushisa kungabangela izinguquko ezinkulu ekuziphatheni kwezinto kanye nemiphumela yenqubo, okungase kuholele ekuphazamisekeni noma ekuhlulekeni kwedivayisi.

Umthelela Wokucindezeleka Kokushisa

Amadivayisi e-semiconductor aqukethe izendlalelo eziningi zezinto ezine-coefficients ehlukene yokwanda kokushisa (i-CTE). Isibonelo, ama-silicon wafers, izixhumanisi zensimbi, kanye nezendlalelo ze-dielectric ziyanda noma zinciphe ngamazinga ahlukene ngesikhathi sokushisa noma ukupholisa okusheshayo. Lokhu kungafani kungadala ukucindezeleka kokushisa, okuholela ezinkingeni ezinkulu zokukhiqiza ezifana nalezi:

* Imifantu: Imifantu engaphezulu noma yangaphakathi kuma-wafer ingonakalisa ubuqotho bemishini futhi iholele ekungasebenzi kahle kwedivayisi.

* Ukuhlukanisa: Amafilimu amancane, njengezendlalelo zensimbi noma ze-dielectric, angase ahlukane, okwenza kube buthaka ukusebenza kukagesi kwe-chip kanye nokuthembeka kwesikhathi eside.

* Ukuguquguquka kwesakhiwo: Izakhiwo zedivayisi zingase zigobe ngenxa yokucindezeleka, okubangela izinkinga zikagesi njengokuvuza noma izifunda ezimfushane.

Indima Yokulawula Izinga Lokushisa Eliphezulu

Izinhlelo zokulawula izinga lokushisa ezithuthukisiwe njenge-TEYU zezimboni zenzelwe ukugcina izinga lokushisa lizinzile ngokunemba okumangalisayo. Isibonelo, i-TEYU's ultrafast laser chiller inikeza ukunemba kokulawula okufika ku-±0.08°C, okuqinisekisa ukuzinza kwenqubo yemishini ebalulekile ye-semiconductor, kufaka phakathi ama-etcher, izinhlelo zokubeka, kanye nama-ion implanters.

Izinzuzo Zokupholisa Ngokucophelela Ezinqubweni Ze-Semiconductor

1. Kuvimbela Ukuqhekeka Kokucindezeleka Kokushisa: Ngokugcina ukupholisa okufanayo, ama-chiller anciphisa imiphumela yokungafani kwe-CTE phakathi kwezinto ezahlukene, okunciphisa ngempumelelo ingozi yokuqhekeka kanye nokwehlukaniswa ngesikhathi sokujikeleza kokushisa.

2. Kuthuthukisa Ukufana Kokusebenzisa I-Doping: Ekufakweni kwe-ion kanye nokufakwa kwe-annealing okulandelayo, izimo zokushisa ezizinzile ziqinisekisa ukusebenza kwe-dopant okuqhubekayo kuyo yonke i-wafer, okuthuthukisa ukusebenza kwe-chip kanye nokuthembeka.

3. Kuthuthukisa Ukuhambisana Kwezingqimba Ze-Oxide: Ukulawulwa okunembile kwezinga lokushisa kusiza ekuqedeni ukuthambekela kokushisa okusuka emaphethelweni kuya emaphakathi ngesikhathi se-oxidation, okuqinisekisa ukujiya kwe-oxide yesango elifanayo, okubalulekile ezicini ze-transistor ezihambisanayo.

Isiphetho

Ukulawulwa kwezinga lokushisa kubalulekile ekwakhiweni kwe-semiconductor. Ngokuphathwa kokushisa okunembile kakhulu, abakhiqizi banganciphisa amaphutha abangelwa ukucindezeleka kokushisa, bathuthukise ukufana kwezinqubo zokusebenzisa izidakamizwa kanye ne-oxidation, futhi ekugcineni bafinyelele isivuno esiphezulu se-chip kanye nokusebenza okungcono kwedivayisi.