Njikwa okpomọkụ ziri ezi maka sistemụ Laser na ngwa nrụpụta kemgbe 2002
Asụsụ
Laser chillers dị mkpa maka ịhụ na mma wafer dicing n'ichepụta semiconductor. Site n'ijikwa ọnọdụ okpomọkụ na ibelata nrụgide okpomọkụ, ha na-enyere aka ibelata ihe mgbakasị ahụ, nchichi, na adịghị mma n'elu. Ntu oyi a pụrụ ịdabere na ya na-eme ka nkwụsi ike nke laser gbasaa ma gbasaa ndụ akụrụngwa, na-enye aka na mkpụrụ mgbawa dị elu.
Wafers bụ ihe ntọala na nrụpụta semiconductor, na-eje ozi dị ka ihe ntinye maka sekit agbakwunyere na ngwaọrụ microelectronic ndị ọzọ. A na-eme ya site na silicon monocrystalline, wafers dị larịị, dị larịị ma na-abụkarị 0.5 mm n'obosara, yana dayameta nke 200 mm (inch 8) ma ọ bụ 300 mm (inch 12). Usoro mmepụta dị mgbagwoju anya nke ukwuu, gụnyere nchacha silicon, slicing ingot, polishing wafer, photolithography, etching, implantation ion, electroplating, wafer test, na n'ikpeazụ, wafer dicing. N'ihi ihe onwunwe ha, wafers na-achọ njikwa siri ike maka ịdị ọcha, ịdị larịị na ọnụego ntụpọ, n'ihi na ndị a na-emetụta arụmọrụ mgbawa ozugbo.
Ihe ịma aka mgbawa Wafer a na-ahụkarị
A na-anakwere teknụzụ dicing laser n'ọtụtụ ebe na nhazi wafer n'ihi uru ya dị elu na nke enweghị kọntaktị. Agbanyeghị, ọtụtụ nsogbu nwere ike ibilite n'oge dicing:
Burrs na Chipping: Nrụrụ ndị a na-ebutekarị site na ezughị oke oyi ma ọ bụ ngwaọrụ ịkpụ akwa. Ịkwalite sistemu jụrụ oyi site n'ịkwalite ikike chiller na ịba ụba mmiri nwere ike inye aka belata kpo oku na-ezighi ezi ma belata mmebi ọnụ.
Izizi mbelata mbelata: Ihe kpatara ndokwa igwe adịghị mma, igwe anaghị akwụsi ike, ma ọ bụ parampat ịkpụ ezighi ezi. Enwere ike iweghachi nke ọma site na imeziwanye nhazi igwe na ịkwalite ntọala oke.
Elu ebipụghị nke ọma: Oyi agụba, ntọala na-ezighi ezi, ma ọ bụ ngbanwe mkpịsị mkpịsị ụkwụ nwere ike bute mmebi nke elu. Ndozi mgbe niile na nhazigharị igwe dị mkpa iji hụ na mbelata dị mma.
Ọrụ nke Laser Chillers na Wafer Dicing
Laser chillers na-arụ ọrụ dị mkpa n'ịkwado arụmọrụ na nkwụsi ike nke laser na ngwa anya nke ejiri na wafer dicing. Site n'iwepụta njikwa okpomoku ziri ezi, ha na-egbochi ịkwọ ụgbọ mmiri laser nke ngbanwe nke ọnọdụ okpomọkụ kpatara, nke dị oke mkpa maka idowe izi ezi nke ịkpụ. Igwe oyi dị mma na-ebelatakwa nrụgide okpomọkụ n'oge dicing, na-ebelata ihe ize ndụ nke mgbagha lattice, chipping, ma ọ bụ microcracks nke nwere ike imebi àgwà wafer.
Na mgbakwunye, laser chillers na-eji usoro mmiri jụrụ oyi na-emechi emechi nke na-ekewa sekit jụrụ oyi site na mmetọ nke mpụga. Site na ntinye nleba anya na sistemu oti mkpu, ha na-abawanye ntụkwasị obi ogologo oge nke akụrụngwa dicing wafer.
Dika mma wafer dicing na-emetụta mkpụrụ mgbawa ozugbo, itinye chiller laser a pụrụ ịdabere na ya na-enyere aka belata ntụpọ ndị a na-ahụkarị ma na-arụ ọrụ na-agbanwe agbanwe. Ịhọrọ chiller kwesịrị ekwesị dabere na ibu ọkụ nke sistemu laser na gburugburu ebe a na-arụ ọrụ, yana nhazi oge niile, bụ isi ihe iji hụ na arụ ọrụ kwụsiri ike na nke ọma.
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TEYU S&A Chiller tọrọ ntọala na 2002 na 23 afọ nke chiller n'ichepụta ahụmahụ, na ugbu a ghọtara dị ka a jụrụ technology ọsụ ụzọ na a pụrụ ịdabere na onye mmekọ na laser ụlọ ọrụ.
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