Ndeapi Matambudziko Anowanzoitwa neWafer Dicing uye Laser Chillers Inogona Kubatsira Sei?

Mawafer ndiwo anonyanya kushandiswa mukugadzira ma semiconductor, anoshanda se substrates dzema integrated circuits nezvimwe zvishandiso zve microelectronic. Kazhinji akagadzirwa ne monocrystalline silicon, mawafer akatsetseka, akati sandara, uye anowanzova 0.5 mm ukobvu, ane 200 mm (8 inches) kana 300 mm (12 inches). Maitiro ekugadzira acho akaomarara zvikuru, anosanganisira kuchenesa silicon, kucheka ingot, kupukuta wafer, photolithography, etching, ion implantation, electroplating, wafer testing, uye pakupedzisira, wafer dicing. Nekuda kwehunhu hwawo hwezvinhu, mawafer anoda kudzora zvakanyanya kuchena, flatness, uye defect rates, sezvo izvi zvichikanganisa zvakananga mashandiro echip.

Matambudziko Anowanzoitwa Pakutema Wafer

Tekinoroji yekucheka nelaser inoshandiswa zvakanyanya mukugadzira wafer nekuda kwekushanda kwayo nemazvo uye mabhenefiti ayo asingabatanidzi ganda. Zvisinei, pane matambudziko akawanda emhando yepamusoro anogona kumuka panguva yekucheka:

Mabur uye Chipping: Kukanganisika uku kunowanzo konzerwa nekusakwana kwezvishandiso zvekutonhodza kana zvekuchekerera zvakasakara. Kuvandudza sisitimu yekutonhodza nekuvandudza kugona kwechiller uye kuwedzera kuyerera kwemvura kunogona kubatsira kuderedza kupisa kusina kuenzana uye kuderedza kukuvara kwemucheto.

Kuderedza Kururama Kwekucheka: Kunokonzerwa nekusamira zvakanaka kwemuchina, matafura ekushanda asina kugadzikana, kana maparamita ekucheka asina kunaka. Kururama kunogona kudzoserwa nekuvandudza calibration yemuchina uye kugadzirisa marongero emaparamita.

Nzvimbo Dzisina Kuchekwa: Kusakara kwebanga, marongero asina kunaka, kana kusarongeka zvakanaka kwesimbi zvinogona kukonzera kusarongeka kwepamusoro. Kugadziriswa nguva dzose uye kugadziriswa kwemichina kwakakosha kuti kuve nechokwadi chekuti kucheka kwacho kwakatsetseka.

Basa reLaser Chillers muWafer Dicing

MaLaser chillers anoita basa rakakosha mukuchengetedza mashandiro uye kugadzikana kwemasisitimu elaser neoptical anoshandiswa muwafer dicing. Nekupa kudzora tembiricha kwakaringana, anodzivirira kudonha kwewavelength yelaser kunokonzerwa nekuchinja-chinja kwetembiricha, izvo zvakakosha pakuchengetedza kurongeka kwekucheka. Kutonhodza kunobudirira kunoderedzawo kushushikana kwekupisa panguva yekucheka, zvichideredza njodzi yekukanganiswa kwelattice, chipping, kana microcracks zvinogona kukanganisa kunaka kwewafer.

Pamusoro pezvo, ma laser chiller anoshandisa sisitimu yekutonhodza mvura yakavharika iyo inoparadzanisa circuit yekutonhodza kubva pakusvibiswa kwekunze. Nehurongwa hwakabatanidzwa hwekutarisa uye hwekunyevera, zvinosimudzira zvakanyanya kuvimbika kwenguva refu kwemidziyo yekucheka wafer.

Sezvo kunaka kwewafer dicing kuchikanganisa zvakananga kukura kwemachip, kushandisa laser chiller yakavimbika kunobatsira kuderedza zvikanganiso zvinowanzoonekwa uye kuchengetedza kushanda kwakafanana. Kusarudza chiller yakakodzera zvichienderana nekupisa kwesystem yelaser uye nzvimbo yekushanda, pamwe nekugadzirisa nguva dzose, chinhu chakakosha pakuona kuti inoshanda zvakanaka uye yakagadzikana.