Xov Xwm Tshiab: MIIT Txhawb Nqa Cov Tshuab DUV Lithography Hauv Tebchaws nrog ≤8nm Overlay Accuracy

Nyob rau ob peb lub hlis dhau los no, Ministry of Industry and Information Technology (MIIT) tau tshaj tawm "Cov Lus Qhia rau Kev Txhawb Nqa thiab Kev Siv Cov Khoom Siv Tseem Ceeb Thawj Zaug (2024 Edition)". Qhov no tau qhib txoj hauv kev rau kev tsim cov khoom siv chip loj rau cov nodes saum toj no 28nm!

Txawm hais tias 28nm thev naus laus zis tsis yog qhov tshiab, nws tseem ceeb heev ua kab faib ntawm cov chips qis-rau-nruab nrab thiab nruab nrab-rau-siab. Sib nrug ntawm cov CPUs siab heev, GPUs, thiab AI chips, feem ntau cov chips qib kev lag luam vam khom 28nm lossis cov thev naus laus zis siab dua.

Txoj Cai Ua Haujlwm: Kev Nce Qib Hauv Kev Siv Ultraviolet Lithography Sib Sib Zog

Cov tshuab luam ntawv KrF (Krypton Fluoride) thiab ArF (Argon Fluoride) poob rau hauv qeb ntawm Deep Ultraviolet (DUV) lithography. Ob leeg siv cov teeb ci tshwj xeeb uas tau tso tawm los ntawm cov kab ke kho qhov muag mus rau ntawm txheej photoresist ntawm silicon wafer, hloov cov qauv sib xyaw ua ke.

Cov Tshuab Lithography KrF: Siv lub teeb ci 248nm wavelength, ua tiav qhov kev daws teeb meem qis dua 110nm, tsim nyog rau ntau yam txheej txheem tsim khoom sib xyaw ua ke.

Cov Tshuab Lithography ArF: Siv lub teeb ci 193nm wavelength, muab kev daws teeb meem siab dua rau cov txheej txheem thev naus laus zis sub-65nm, ua rau muaj peev xwm tsim cov voj voog zoo dua.

Qhov Tseem Ceeb ntawm Kev Siv Tshuab: Kev Txhim Kho Kev Lag Luam thiab Kev Cia Siab Rau Tus Kheej

Kev tsim cov tshuab lithography no yog ib qho tseem ceeb hauv kev txhim kho kev tsim khoom semiconductor thiab ua tiav kev ywj pheej hauv kev lag luam:

Kev Txhim Kho Txuj Ci: Kev tsim cov tshuab KrF thiab ArF lithography ua tiav qhia txog kev nce qib tseem ceeb hauv kev siv tshuab lithography siab, muab kev txhawb nqa kev siv tshuab zoo rau kev tsim khoom semiconductor.

Kev Txhim Kho Kev Lag Luam: Cov tshuab lithography uas muaj qhov tseeb siab ua rau muaj peev xwm tsim cov circuits sib xyaw ua ke uas nyuaj dua thiab ua tau zoo dua, tsav kev tsim kho tshiab thoob plaws tag nrho cov saw hlau semiconductor.

Kev Lag Luam thiab Kev Ruaj Ntseg Hauv Tebchaws: Los ntawm kev txo qhov kev vam khom rau cov thev naus laus zis txawv teb chaws, cov tshuab no ua rau kev lag luam semiconductor hauv tebchaws muaj zog dua, txhawb nqa kev ruaj ntseg ntawm kev lag luam thiab kev lag luam.

Lub Tshuab Txias Dej : Tus yuam sij rau kev ua haujlwm ntawm lub tshuab Lithography ruaj khov

Kev tswj qhov kub kom raug yog qhov tseem ceeb rau kev ua kom zoo thiab cov txiaj ntsig ntawm cov txheej txheem lithography. Cov dej txias, ua cov khoom tseem ceeb ntawm cov tshuab txias, ua lub luag haujlwm tseem ceeb:

Cov Kev Xav Tau Txias: Cov tshuab lithography muaj kev nkag siab heev rau qhov kub thiab txias hloov pauv thaum lub sijhawm raug, xav tau cov dej txias uas muab kev tswj kub kom raug thiab ruaj khov.

Cov Haujlwm ntawm Chillers: Los ntawm kev ncig cov dej txias, cov chillers ua kom cov cua sov tsim tawm thaum lub sijhawm ua haujlwm, tswj cov khoom siv laser hauv qhov kub thiab txias zoo tshaj plaws thiab xyuas kom meej qhov tseeb thiab kev ntseeg tau hauv cov txheej txheem lithography.

TEYU Chiller Muab Kev Pabcuam Txias Rau Cov Tshuab Lithography

TEYU CWUP series ultrafast laser chillers tuaj yeem muab kev tswj qhov kub thiab txias kom raug thiab ruaj khov rau cov tshuab lithography. Lub chiller qauv CWUP-20ANP ua tiav qhov kub thiab txias ruaj khov ntawm ± 0.08 ° C, xa cov cua txias zoo heev rau kev tsim khoom raug.

Hauv lub ntiaj teb tseeb ntawm kev tsim khoom semiconductor, cov tshuab lithography yog cov khoom siv tseem ceeb rau kev hloov pauv cov qauv microcircuit. Nrog kev nce qib ntawm thev naus laus zis, tshuab krypton fluoride lithography thiab tshuab argon fluoride lithography tau dhau los ua lub zog tseem ceeb los txhawb kev txhim kho ntawm kev lag luam nrog lawv cov kev ua tau zoo heev.