Xov xwm Laser
Precise Temperature Control rau Laser Systems thiab Industrial Applications txij li xyoo 2002
Lus
MIIT's 2024 cov lus qhia txhawb nqa cov txheej txheem ua haujlwm hauv zos rau 28nm + chip manufacturing, ib qho tseem ceeb ntawm kev siv thev naus laus zis. Cov kev nce qib tseem ceeb suav nrog KrF thiab ArF lithography cov cav tov, ua kom muaj kev ua haujlwm siab thiab txhawb kev lag luam rau tus kheej. Kev tswj qhov kub thiab txias yog qhov tseem ceeb rau cov txheej txheem no, nrog TEYU CWUP dej chillers kom ntseeg tau tias kev ua haujlwm ruaj khov hauv kev tsim khoom semiconductor.
Nyob rau hauv lub hlis tsis ntev los no, Ministry of Industry thiab Information Technology (MIIT) tau tshaj tawm "Cov Lus Qhia rau Kev Tshaj Tawm thiab Kev Siv Ua Ntej (Tshooj) Cov Khoom Siv Tseem Ceeb (2024 Edition)". Qhov no yog txoj hauv kev rau kev ua haujlwm puv npo ntawm kev tsim cov chips paub tab rau cov nodes saum 28nm!
Txawm hais tias 28nm thev naus laus zis tsis yog kev txiav-ntug, nws tuav qhov tseem ceeb raws li kev faib kab ntawm qis-rau-nruab nrab-kawg thiab nruab nrab-rau-siab-kawg chips. Ib sab ntawm cov CPUs siab heev, GPUs, thiab AI chips, feem ntau cov khoom lag luam-qib chips cia siab rau 28nm lossis siab dua thev naus laus zis.
Txoj Cai Ua Haujlwm: Kev nce qib hauv Deep Ultraviolet Lithography
KrF (Krypton Fluoride) thiab ArF (Argon Fluoride) lithography tshuab poob rau hauv qeb ntawm Deep Ultraviolet (DUV) lithography. Ob leeg siv lub teeb wavelengths tshwj xeeb los ntawm cov tshuab kho qhov muag mus rau cov txheej txheem photoresist ntawm silicon wafer, hloov cov qauv hauv Circuit Court intricate.
KrF Lithography Machines: Siv 248nm wavelength lub teeb qhov chaw, ua tiav cov kev daws teeb meem hauv qab 110nm, haum rau ntau yam kev tsim hluav taws xob sib txuas.
ArF Lithography Machines: Siv 193nm wavelength lub teeb qhov chaw, muab kev daws teeb meem siab dua rau cov txheej txheem sub-65nm, ua rau kev tsim cov txheej txheem zoo dua.
Technological tseem ceeb: Kev Txhim Kho Kev Lag Luam thiab Kev Ntseeg Tus Kheej
Txoj kev loj hlob ntawm cov tshuab lithography no yog qhov tseem ceeb hauv kev nce qib semiconductor kev tsim khoom thiab ua tiav kev lag luam autonomy:
Technical Breakthroughs: Kev ua tiav ntawm KrF thiab ArF lithography tshuab qhia txog kev nce qib hauv high-end lithography technology, muab kev txhawb zog rau kev tsim khoom semiconductor.
Kev Txhim Kho Kev Lag Luam: Cov tshuab lithography high-precision ua kom cov khoom siv ntau dua thiab ua haujlwm siab ua ke, tsav kev tsim kho tshiab thoob plaws tag nrho cov khoom siv hluav taws xob.
Kev Lag Luam thiab Kev Ruaj Ntseg Hauv Tebchaws: Los ntawm kev txo qis kev cia siab rau kev siv tshuab txawv teb chaws, cov tshuab no ntxiv dag zog rau kev lag luam semiconductor kev lag luam tus kheej txaus, txhawb kev lag luam thiab kev ruaj ntseg.
Dej Chiller : Tus yuam sij rau Stable Lithography Tshuab Performance
Kev tswj qhov kub thiab txias yog qhov tseem ceeb rau kev ua kom zoo thiab tawm los ntawm cov txheej txheem lithography. Dej chillers, raws li cov khoom tseem ceeb ntawm cov tshuab cua txias, ua lub luag haujlwm tseem ceeb:
Cov Cuab Yeej Cuab Yeej Cuab Yeej: Cov tshuab lithography yog qhov tsis tshua muaj siab rau qhov kub thiab txias hloov thaum raug, xav tau cov dej chillers uas muab kev tswj qhov kub thiab txias.
Kev ua haujlwm ntawm Chillers: Los ntawm cov dej txias txias, cov chillers zoo dissipate cua sov tsim thaum lub sijhawm ua haujlwm, tswj cov khoom siv laser nyob rau hauv qhov ntsuas kub zoo thiab ua kom qhov tseeb thiab kev ntseeg siab hauv cov txheej txheem lithography.
TEYU Chiller Muab Kev Ua Haujlwm Txias Txias rau Lithography Machine
TEYU CWUP series ultrafast laser chillers tuaj yeem muab kev tswj qhov kub thiab txias rau cov tshuab lithography. Lub chiller qauv CWUP-20ANP ua tiav qhov ntsuas kub ntawm ± 0.08 ° C, xa cov cua txias kom zoo rau kev tsim khoom.
Nyob rau hauv lub ntiaj teb meej ntawm kev tsim khoom semiconductor, cov tshuab lithography yog cov khoom siv tseem ceeb rau kev hloov ntawm microcircuit qauv. Nrog rau kev nce qib ntawm thev naus laus zis, krypton fluoride lithography tshuab thiab argon fluoride lithography tshuab tau dhau los ua lub zog tseem ceeb los txhawb kev txhim kho kev lag luam nrog lawv cov kev ua tau zoo.
Peb nyob ntawm no rau koj thaum koj xav tau peb.
Thov ua kom tiav daim foos tiv tauj peb, thiab peb yuav zoo siab los pab koj.
ua 
TEYU S&A Chiller tau tsim muaj nyob rau xyoo 2002 nrog 23 xyoo ntawm kev tsim khoom siv chiller, thiab tam sim no tau lees paub tias yog lub tshuab cua txias pioneer thiab txhim khu kev qha tus khub hauv kev lag luam laser.
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