Warka Degdegga ah: MIIT Waxay Kor U Qaadaysaa Mashiinnada Lithography ee Guriga ee DUV oo leh ≤8nm Sax ah oo Daboolan

Bilihii la soo dhaafay, Wasaaradda Warshadaha iyo Tignoolajiyada Macluumaadka (MIIT) waxay soo saartay "Hagaha Horumarinta iyo Codsiga Qalabka Farsamo ee Koowaad (Deejinta) Qalabka Farsamada Weyn (2024 Edition)". Tani waxay u gogol xaaraysaa meelaynta hab-socodka buuxda ee soo saarista chip bislaaday ee noodhadhka ka sarreeya 28nm!

In kasta oo teknoolojiyadda 28nm aysan ahayn mid goysa, waxay haysaa muhiimad weyn sida xariiqda qaybinta ee u dhexeeya jajabyada hoose-ilaa-dhexe-dhamaadka iyo bartamaha-ilaa-sare. Marka laga reebo CPU-yada horumarsan, GPU-yada, iyo chips-yada AI, inta badan jajabyada heerka-warshadaha waxay ku tiirsan yihiin 28nm ama tignoolajiyada sare.

Mabaadi'da Shaqada: Horumarrada qotodheer ee Ultraviolet Lithography

KrF (Krypton Fluoride) iyo ArF (Argon Fluoride) mashiinnada lithography waxay hoos yimaadaan qaybta lithografi ee Deep Ultraviolet (DUV). Labaduba waxay isticmaalaan mowjadaha iftiinka gaarka ah ee lagu saadaaliyay hababka indhaha ee lakabka sawir-qaadista ee wafer silikoon, wareejinta qaababka wareegga adag.

Mashiinnada Lithography ee KrF: Adeegso isha mawjadda dhererka 248nm, gaarista xalalka ka hooseeya 110nm, oo ku habboon hababka kala duwan ee wax soo saarka wareegga isku dhafan.

Mashiinnada Lithography ee ArF: Adeegso isha mawjadda dhererka ee 193nm, adoo siinaya xallin sare tignoolajiyada geeddi-socodka-65nm-hoosaadka, taas oo awood u siinaysa abuuritaanka wareegyada wanaagsan.

Muhiimadda Farsamada: Horumarinta Warshadaha iyo Isku-kalsoonaanta

Horumarinta mashiinadan lithography waxay calaamad u tahay horumar weyn oo lagu horumarinayo wax soo saarka semiconductor iyo gaaritaanka madaxbannaanida warshadaha:

Horumarka Farsamada: Abuuritaanka guusha leh ee mashiinnada lithography ee KrF iyo ArF ayaa muujinaya horumar la taaban karo oo laga gaaray tignoolajiyada sare ee lithography, iyadoo siinaya taageero farsamo oo adag wax soo saarka semiconductor.

Casriyeynta Warshadaha: Mashiinnada lithography-ga saxda ah ee saxda ah waxay awood u siinayaan soo saarida wareegyo isku dhafan oo kakan iyo waxqabad sare leh, wadista hal-abuurnimo ee dhammaan silsiladda qiimaha semiconductor.

Dhaqaalaha iyo Amniga Qaranka: Iyaga oo yareynaya ku tiirsanaanta tignoolajiyada shisheeye, mashiinadani waxay xoojiyaan isku-filnaanta warshadaha semiconductor-ka gudaha, xoojinta amniga dhaqaalaha iyo warshadaha.

Qaboojiyaha Biyaha Furaha Waxqabadka Mashiinka Lithography

Xakamaynta saxda ah ee heerkulka ayaa lagama maarmaan u ah hubinta tayada iyo wax-soosaarka habka lithography. Qaboojiyaha biyaha, sida qaybaha asaasiga ah ee hababka qaboojinta, ayaa door muhiim ah ka ciyaara:

Shuruudaha qaboojinta: Mashiinnada lithography waxay aad ugu nugul yihiin isbedbedelka heerkulka inta lagu jiro soo-gaadhista, taas oo u baahan qaboojiyeyaasha biyaha kuwaas oo bixiya xakameyn heerkul aad u sax ah oo deggan.

Hawlaha Chillers: Wareega biyaha qaboojinta, qaboojiyayaashu waxay si wax ku ool ah u baabi'iyaan kulaylka dhasha inta lagu jiro hawlgalka, ilaalinta qalabka laysarka gudaha heerkulka ugu fiican iyo hubinta saxnaanta iyo isku halaynta habka lithography.

Chiller TEYU wuxuu bixiyaa xalal qaboojin xirfadeed oo loogu talagalay Mashiinnada Lithography

TEYU CWUP taxane ultrafast laser chillers ayaa ku siin kara xakamaynta heerkulka saxda ah oo degan makiinadaha lithography. The nooca qaboojiyaha CWUP-20ANP gaaro xasilloonida heerkulka ee ±0.08°C, oo keenaysa qaboojin aad u hufan oo wax soo saar sax ah.

Dunida saxda ah ee wax soo saarka semiconductor, mashiinada lithography ayaa ah aaladaha udub dhexaadka u ah wareejinta qaababka microcircuit. Horumarinta tignoolajiyada, mashiinka lithography krypton fluoride iyo mashiinka lithography argon fluoride waxay noqdeen xoog muhiim ah si kor loogu qaado horumarinta warshadaha oo leh waxqabadkooda wanaagsan.