Nkhani Zaposachedwa: MIIT Imalimbikitsa Makina Apakhomo a DUV Lithography okhala ndi ≤8nm Overlay Kulondola

M'miyezi yaposachedwa, Unduna wa Zamakampani ndi Ukadaulo Wachidziwitso (MIIT) udapereka "Malangizo Olimbikitsa ndi Kugwiritsa Ntchito Zida Zazikulu Zazikulu Zazikulu (Kusindikiza kwa 2024)". Izi zimatsegulira njira yokhazikika yopangira zida zokhwima zopangira ma node pamwamba pa 28nm!

Ngakhale ukadaulo wa 28nm siwotsogola, umakhala wofunikira kwambiri ngati mzere wogawa pakati pa tchipisi totsika mpaka pakati ndi pakati mpaka kumapeto. Kupatula ma CPU apamwamba, ma GPU, ndi tchipisi ta AI, tchipisi tambiri zamafakitale zimadalira 28nm kapena umisiri wapamwamba.

Mfundo Yogwirira Ntchito: Kupita patsogolo kwa Deep Ultraviolet Lithography

Makina a KrF (Krypton Fluoride) ndi ArF (Argon Fluoride) amagwera pansi pa gulu la Deep Ultraviolet (DUV) lithography. Onsewa amagwiritsa ntchito mafunde amphamvu owunikira omwe amapangidwa kudzera mu makina owoneka bwino pamtundu wa photoresist wa silicon wafer, kusamutsa mawonekedwe ozungulira movutikira.

Makina a KrF Lithography: Gwiritsani ntchito gwero la kuwala kwa 248nm wavelength, kukwaniritsa malingaliro omwe ali pansi pa 110nm, oyenera njira zosiyanasiyana zopangira madera ophatikizika.

Makina a ArF Lithography: Gwiritsani ntchito gwero la kuwala kwa 193nm wavelength, lomwe limapereka kuwongolera kwapamwamba pamakina a sub-65nm process, kupangitsa kupanga mabwalo abwino kwambiri.

Kufunika Kwaukadaulo: Kukweza Kwamakampani ndi Kudzidalira

Kupanga makina a lithography ndi gawo lalikulu pakupititsa patsogolo kupanga semiconductor ndikukwaniritsa kudziyimira pawokha kwa mafakitale.:

Zotsogola Zaukadaulo: Kupanga bwino kwa makina a KrF ndi ArF lithography kumawonetsa kupita patsogolo kwakukulu muukadaulo wapamwamba kwambiri waukadaulo, kupereka chithandizo champhamvu chaukadaulo popanga semiconductor.

Kukweza kwa Makampani: Makina olondola kwambiri a lithography amathandiza kupanga mabwalo ophatikizika ovuta kwambiri komanso apamwamba kwambiri, kuyendetsa zinthu zatsopano pa unyolo wonse wamtengo wapatali wa semiconductor.

Economic and National Security: Pochepetsa kudalira ukadaulo wakunja, makinawa amalimbikitsa kudzidalira kwamakampani am'nyumba za semiconductor, kulimbikitsa chitetezo chachuma ndi mafakitale.

Water Chiller : Chinsinsi cha Magwiridwe Okhazikika a Lithography Machine

Kuwongolera kutentha kolondola ndikofunikira kuti muwonetsetse mtundu ndi zokolola za njira ya lithography. Madzi oziziritsa m'madzi, monga zigawo zikuluzikulu za makina ozizirira, amagwira ntchito yofunika kwambiri:

Zofunika Zoziziritsa: Makina opangira ma lithography amakhudzidwa kwambiri ndi kusinthasintha kwa kutentha panthawi yomwe ali pachiwonetsero, zomwe zimafunikira zoziziritsa kumadzi zomwe zimapereka kuwongolera kolondola komanso kokhazikika kwa kutentha.

Ntchito za Chillers: Pozungulira madzi ozizira, ma chillers amataya bwino kutentha komwe kumachitika panthawi yogwira ntchito, kusunga zida za laser mkati mwa kutentha koyenera komanso kuonetsetsa kuti ndizolondola komanso zodalirika pamachitidwe a lithography.

TEYU Chiller Amapereka Mayankho Aukadaulo Oziziritsa Pamakina a Lithography

TEYU CWUP mndandanda wa ultrafast laser chillers ukhoza kupereka kuwongolera kolondola komanso kokhazikika kwa kutentha kwa makina a lithography. The chiller chitsanzo CWUP-20ANP amakwaniritsa kutentha bata wa ±0.08°C, yopereka kuziziritsa kothandiza kwambiri popanga molondola.

M'dziko lenileni la kupanga semiconductor, makina a lithography ndiye zida zazikulu zosinthira ma microcircuit mapatani. Ndi kupita patsogolo kwaukadaulo, makina a krypton fluoride lithography ndi makina a argon fluoride lithography akhala mphamvu yofunika kulimbikitsa chitukuko chamakampani ndi ntchito zawo zabwino kwambiri.