Nkhani Zaposachedwa: MIIT Imalimbikitsa Makina Apakhomo a DUV Lithography okhala ndi ≤8nm Overlay Kulondola

M'miyezi yaposachedwa, Unduna wa Zamakampani ndi Ukadaulo Wachidziwitso (MIIT) udapereka "Malangizo Olimbikitsa ndi Kugwiritsa Ntchito Zida Zazikulu Zazikulu Zazikulu (Kusindikiza kwa 2024)". Izi zimatsegulira njira yokhazikika yopangira zida zokhwima zopangira ma node pamwamba pa 28nm!

Ngakhale ukadaulo wa 28nm siwotsogola, umakhala wofunikira kwambiri ngati mzere wogawa pakati pa tchipisi totsika mpaka pakati ndi pakati mpaka kumapeto. Kupatula ma CPU apamwamba, ma GPU, ndi tchipisi ta AI, tchipisi tambiri zamafakitale zimadalira 28nm kapena umisiri wapamwamba.

Mfundo Yogwirira Ntchito: Kupita patsogolo kwa Deep Ultraviolet Lithography

Makina a KrF (Krypton Fluoride) ndi ArF (Argon Fluoride) amagwera pansi pa gulu la Deep Ultraviolet (DUV) lithography. Onsewa amagwiritsa ntchito mafunde amphamvu owunikira omwe amapangidwa kudzera mu makina owoneka bwino pamtundu wa photoresist wa silicon wafer, kusamutsa mawonekedwe ozungulira movutikira.

Makina a KrF Lithography: Gwiritsani ntchito gwero la kuwala kwa 248nm wavelength, kukwaniritsa malingaliro pansi pa 110nm, oyenera njira zosiyanasiyana zopangira madera ophatikizika.

Makina a ArF Lithography: Gwiritsani ntchito gwero lounikira la 193nm, lomwe limapereka kuwongolera kwapamwamba pamakina aukadaulo a sub-65nm, ndikupangitsa kupanga mabwalo abwino kwambiri.

Kufunika Kwaukadaulo: Kukweza Kwamakampani ndi Kudzidalira

Kupanga makina a lithography ndi gawo lalikulu pakupititsa patsogolo kupanga semiconductor ndikukwaniritsa kudziyimira pawokha kwa mafakitale:

Kupambana Kwaukadaulo: Kupanga bwino kwa makina a KrF ndi ArF lithography kumawonetsa kupita patsogolo kwakukulu muukadaulo wapamwamba kwambiri waukadaulo, kupereka chithandizo champhamvu chaukadaulo popanga zida zopangira zida zamagetsi.

Kukweza Kwamakampani: Makina olondola kwambiri a lithography amathandizira kupanga mabwalo ophatikizika ovuta komanso ochita bwino kwambiri, ndikuyendetsa luso pa unyolo wonse wamtengo wapatali wa semiconductor.

Economic and National Security: Pochepetsa kudalira ukadaulo wakunja, makinawa amalimbikitsa kudzidalira kwamakampani am'nyumba za semiconductor, kulimbikitsa chitetezo chachuma ndi mafakitale.

Water Chiller : Chinsinsi cha Kukhazikika kwa Makina a Lithography

Kuwongolera kutentha kolondola ndikofunikira kuti muwonetsetse mtundu ndi zokolola za njira ya lithography. Zozizira zamadzi, monga zigawo zikuluzikulu za machitidwe ozizira, zimagwira ntchito yofunikira:

Zofunika Kuziziritsa: Makina a lithography amakhudzidwa kwambiri ndi kusinthasintha kwa kutentha panthawi yomwe ali pachiwonetsero, zomwe zimafunikira zoziziritsa kumadzi zomwe zimapereka kuwongolera kolondola komanso kokhazikika kwa kutentha.

Ntchito za Ozizira: Pozungulira madzi ozizira, zozizira zimataya bwino kutentha komwe kumapangidwa panthawi yogwira ntchito, kusunga zida za laser mkati mwa kutentha koyenera komanso kuwonetsetsa kulondola ndi kudalirika mu ndondomeko ya lithography.

TEYU Chiller Amapereka Mayankho Aukadaulo Oziziritsa Pamakina a Lithography

TEYU CWUP mndandanda wa ultrafast laser chillers ukhoza kupereka kuwongolera kolondola komanso kokhazikika kwa kutentha kwa makina a lithography. Mtundu wa chiller wa CWUP-20ANP umakwaniritsa kutentha kwa ± 0.08 ° C, ndikupereka kuziziritsa kothandiza kwambiri popanga mwatsatanetsatane.

M'dziko lenileni la kupanga semiconductor, makina a lithography ndiye zida zazikulu zosinthira ma microcircuit mapatani. Ndi kupita patsogolo kwaukadaulo, makina a krypton fluoride lithography ndi makina a argon fluoride lithography akhala mphamvu yofunika kulimbikitsa chitukuko chamakampani ndi ntchito zawo zabwino kwambiri.