Litaba Tse Tsoang Pele: MIIT e Khothaletsa Mechini ea DUV Lithography ea Lehae e nang le ≤8nm Overlay Accuracy

Likhoeling tsa morao tjena, Lekala la Indasteri le Theknoloji ea Boitsebiso (MIIT) le ile la fana ka "Litaelo bakeng sa Khothatso le Tšebeliso ea Lisebelisoa tse kholo tsa Theknoloji ea Pele (Khatiso ea 2024)". Sena se bula tsela bakeng sa ts'ebetso e felletseng ea tlhahiso ea li-chip bakeng sa li-node tse kaholimo ho 28nm!

Leha thekenoloji ea 28nm e se ea maemo a holimo, e na le bohlokoa ba bohlokoa joalo ka mola o arolang lipakeng tsa lichifi tse tlase ho isa bohareng le tse bohareng ho isa ho tse holimo. Ntle le li-CPU tse tsoetseng pele, li-GPU, le lichifi tsa AI, li-chips tse ngata tsa boemo ba indasteri li itšetlehile ka 28nm kapa mahlale a holimo.

Molao-motheo oa ho sebetsa: Tsoelo-pele ho Deep Ultraviolet Lithography

Mechini ea lithography ea KrF (Krypton Fluoride) le ArF (Argon Fluoride) e oela tlas'a sehlopha sa Deep Ultraviolet (DUV) lithography. Ka bobeli li sebelisa li-wavelengths tse khethehileng tse hlahisitsoeng ka lisebelisoa tsa optical holim'a lera la photoresist la silicon wafer, ho fetisa mekhoa e rarahaneng ea potoloho.

Mechini ea KrF Lithography: Sebelisa mohloli oa leseli la 248nm wavelength, ho fihlela liqeto tse ka tlase ho 110nm, tse loketseng mekhoa e fapaneng ea tlhahiso ea potoloho e kopaneng.

Mechini ea ArF Lithography: Sebelisa mohloli oa leseli la 193nm wavelength, o fanang ka tharollo e phahameng bakeng sa mahlale a sub-65nm a ts'ebetso, a nolofalletsang ho etsoa ha lipotoloho tse ntle.

Bohlokoa ba Theknoloji: Ntlafatso ea Indasteri le ho Itšepa

Ntlafatso ea mechini ena ea lithography e tšoaea mohato o moholo oa ho nts'etsapele tlhahiso ea semiconductor le ho fihlela boipuso ba indasteri.:

Lintlafatso tsa Tekheniki: Theho e atlehileng ea metjhini ea lithography ea KrF le ArF e totobatsa tsoelo-pele e kholo ea theknoloji ea boleng bo holimo, e fanang ka tšehetso e matla ea botekgeniki bakeng sa tlhahiso ea li-semiconductor.

Ntlafatso ea indasteri: Mechini ea lithography e phahameng ka ho fetisisa e etsa hore ho be le lipotoloho tse kopantsoeng tse rarahaneng le tse phahameng tse sebetsang hantle, tse tsamaisang mekhoa e mecha ho pholletsa le ketane eohle ea boleng ba semiconductor.

Tšireletseho ea Moruo le ea Naha: Ka ho fokotsa ho itšetleha ka thekenoloji ea kantle ho naha, mechini ena e matlafatsa boikemelo ba indasteri ea lehae ea semiconductor, e matlafatsa ts'ireletso ea moruo le indasteri.

Sehlahisoa sa Metsi : Senotlolo sa Ts'ebetso e tsitsitseng ea Lithography Machine

Taolo e nepahetseng ea mocheso e bohlokoa bakeng sa ho netefatsa boleng le chai ea mokhoa oa lithography. Li-chillers tsa metsi, joalo ka likarolo tsa mantlha tsa sistimi ea ho pholisa, li bapala karolo ea bohlokoa:

Litlhoko tsa ho Pholisa: Mechini ea lithography e na le maikutlo a matla haholo ho feto-fetoha ha mocheso nakong ea ho pepeseha, e leng se hlokang li-chiller tsa metsi tse fanang ka taolo e nepahetseng haholo le e tsitsitseng ea mocheso.

Mesebetsi ea li-Chillers: Ka ho potoloha metsi a pholileng, li-chillers li khona ho senya mocheso o hlahisoang nakong ea ts'ebetso, ho boloka lisebelisoa tsa laser ka har'a mocheso o nepahetseng oa mocheso le ho netefatsa ho nepahala le ho tšepahala ts'ebetsong ea lithography.

TEYU Chiller e Fana ka Litharollo tsa Setsebi tsa Pholiso bakeng sa Mechini ea Lithography

TEYU CWUP series ultrafast laser chillers e ka fana ka taolo e nepahetseng le e tsitsitseng ea mocheso bakeng sa mechine ea lithography. The chiller ea mohlala CWUP-20ANP finyella botsitso ba mocheso oa ±0.08°C, e fana ka pholiso e sebetsang hantle haholo bakeng sa tlhahiso e nepahetseng.

Lefatšeng le nepahetseng la tlhahiso ea semiconductor, mechini ea lithography ke lisebelisoa tsa mantlha tsa phetisetso ea lipaterone tsa microcircuit. Ka tsoelo-pele ea theknoloji, mochine oa krypton fluoride lithography le mochini oa lithography oa argon fluoride li fetohile matla a bohlokoa ho khothalletsa nts'etsopele ea indasteri ka ts'ebetso ea bona e babatsehang.