Nhau Dzakabhuroka: MIIT Inosimudzira Dzimba DUV Lithography Machina ane ≤8nm Kuwedzeredza Kurongeka

Mumwedzi ichangopfuura, Bazi reIndasitiri uye Ruzivo Tekinoroji (MIIT) yakapa "Nhungamiro Yekusimudzira uye Kushandisa Yekutanga (Set) Major Technical Equipment (2024 Edition)". Izvi zvinovhura nzira yekuzara-maitiro ekugadziriswa kweakakura chip kugadzirwa kwemanodhi pamusoro pe28nm!

Kunyangwe 28nm tekinoroji isiri yekucheka-kumucheto, inobata zvakakosha semutsetse wekuparadzanisa pakati pepasi-kusvika-pakati-kumagumo uye yepakati-kusvika-yepamusoro-machipisi. Kunze kwemaCPU epamberi, maGPU, uye AI machipi, mazhinji maindasitiri-giredhi machipisi anovimba ne28nm kana yepamusoro tekinoroji.

Kushanda Nheyo: Kufambira mberi mune Yakadzika Ultraviolet Lithography

KrF (Krypton Fluoride) uye ArF (Argon Fluoride) lithography michina inowira pasi pechikamu cheDeep Ultraviolet (DUV) lithography. Ose ari maviri anoshandisa chaiyo wavelengths yemwenje inofungidzirwa kuburikidza neoptical masisitimu pane iyo photoresist layer yesilicon wafer, ichiendesa akaoma kunzwisisa edunhu mapatani.

KrF Lithography Machina: Shandisa 248nm wavelength mwenje sosi, uchiwana zvigadziriso pazasi 110nm, inokodzera akasiyana-siyana akabatanidzwa edunhu ekugadzira maitiro.

ArF Lithography Machina: Shandisa 193nm wavelength mwenje sosi, ichipa yakakwirira resolution ye sub-65nm process tekinoroji, zvichiita kuti kugadzirwa kwemaseketi akakwenenzverwa.

Tekinoroji Kukosha: Kukwidziridza indasitiri uye Kuzvimirira

Kuvandudzwa kweiyi michina yelithography kunoratidza chiitiko chikuru mukufambira mberi semiconductor kugadzira uye kuwana kuzvitonga kwemaindasitiri.:

Kubudirira Kwehunyanzvi: Kubudirira kusikwa kweKrF neArF lithography michina inosimbisa kufambira mberi kwakakosha muhunyanzvi hwekupedzisira lithography tekinoroji, ichipa rutsigiro rwakasimba rwehunyanzvi hwekugadzira semiconductor.

Indasitiri Upgrade: Yakakwirira-chaiyo lithography michina inogonesa kugadzirwa kweakaomesesa uye akanyanya-kuita akabatanidzwa maseketi, achityaira hunyanzvi pane yese semiconductor value chain.

Economic and National Security: Nekudzikisira kutsamira kune tekinoroji yekune dzimwe nyika, michina iyi inosimbisa indasitiri yesemiconductor yekuzvimirira, inosimbisa hupfumi nemaindasitiri.

Mvura Chiller : Kiyi yekugadzikana Lithography Machine Performance

Kunyatso kudzora tembiricha kwakakosha kuti uve nechokwadi chemhando uye goho reiyo lithography process. Mvura inotonhorera, sezvikamu zvakakosha zvemaitiro ekutonhodza, inoita basa rakakosha:

Kutonhodza Zvinodiwa: Michina yeLithography inotarisisa zvakanyanya kushanduka kwetembiricha panguva yekuratidzwa, izvo zvinoda kutonhora kwemvura kunopa kwakanyatso uye kwakagadzikana tembiricha kutonga.

Mabasa eChillers: Nekutenderedza mvura inotonhorera, machiller anonyatso bvisa kupisa kunogadzirwa panguva yekushanda, kuchengetedza michina yelaser mukati meyakanyanya tembiricha renji uye kuve nechokwadi chechokwadi uye kuvimbika mukuita lithography.

TEYU Chiller Inopa Professional Kutonhora Solutions yeLithography Machines

TEYU CWUP yakatevedzana ultrafast laser chillers inogona kupa chaiyo uye yakagadzikana tembiricha yekudzora kumichina yelithography. The chiller modhi CWUP-20ANP inowana kugadzikana kwekushisa kwe ±0.08°C, kuendesa kutonhora kwakanyanya kwekugadzira kwakaringana.

Munyika chaiyo yekugadzira semiconductor, michina yelithography ndiyo midziyo yakakosha yekufambisa kwema microcircuit mapatani. Nekufambira mberi kwehunyanzvi, krypton fluoride lithography muchina uye argon fluoride lithography muchina zvave simba rakakosha kusimudzira kusimukira kweindasitiri nekuita kwavo kwakanaka.