Ngā Pūrongo Hou: Ka Whakatairanga a MIIT i ngā Mīhini Whakaahua DUV ā-Rohe me te Tika Paparua ≤8nm

I ngā marama tata nei, i whakaputa te Manatū Ahumahi me te Hangarau Mōhiohio (MIIT) i ngā "Aratohu mō te Whakatairanga me te Whakamahinga o ngā Taputapu Hangarau Matua Tuatahi (Huinga) (Putanga 2024)". Mā tēnei ka whakawātea i te huarahi mō te whakawāteatanga tukanga-katoa o te hanga maramara pakeke mō ngā pona neke atu i te 28nm!

Ahakoa ehara te hangarau 28nm i te mea hou rawa atu, he mea nui tonu hei wehewehe i waenga i ngā maramara iti-ki-waenga me ngā maramara waenga-ki-teitei. Haunga ngā CPU matatau, ngā GPU, me ngā maramara AI, ko te nuinga o ngā maramara taumata ahumahi e whakawhirinaki ana ki ngā hangarau 28nm, neke atu rānei.

Mātāpono Mahi: Ngā Whakatairanga i roto i te Whakaahuatanga Ultraviolet Hōhonu

Kei roto i te kāwai o te whakaahua hihi-ira hohonu (DUV) ngā mīhini whakaahua KrF (Krypton Fluoride) me ArF (Argon Fluoride). E whakamahi ana ēnei mīhini i ngā roangaru mārama motuhake e whakaaturia ana mā roto i ngā pūnaha whatu ki runga i te paparanga photoresist o te papa silicon, e whakawhiti ana i ngā tauira ara iahiko matatini.

Ngā Mīhini Whakairoiro KrF: Whakamahia he pūtake mārama roangaru 248nm, kia tutuki ai ngā taumira i raro i te 110nm, e tika ana mō ngā tukanga hanga ara iahiko whakauru.

Ngā Mīhini Whakaahua ArF: Whakamahia he pūtake mārama roangaru 193nm, e tuku ana i te taumira teitei ake mō ngā hangarau tukanga i raro i te 65nm, e āhei ai te hanga i ngā ara iahiko pai ake.

Te Hiranga o te Hangarau: Te Whakapai Ake i te Ahumahi me te Whakawhirinaki ki a Ia Anō

Ko te whanaketanga o ēnei mīhini whakairo he tohu nui tēnei i roto i te whakatairanga i te hanga haurua-haurua me te whakatutuki i te mana motuhake ā-umanga:

Ngā Ahunga Whakamua Hangarau: Ko te hanganga angitu o ngā mīhini tuhi KrF me ArF e whakaatu ana i te ahunga whakamua nui o te hangarau tuhi teitei, e whakarato ana i te tautoko hangarau pakari mō te hanga haurua-ira.

Whakapai Ahumahi: Mā ngā mīhini whakairo tino tika ka taea te whakaputa i ngā ara iahiko whakauru matatini ake, mahi teitei ake hoki, ka akiaki i te auahatanga puta noa i te mekameka uara haurua-ā-ira katoa.

Te Haumarutanga Ōhanga me te Haumarutanga ā-Motu: Mā te whakaiti i te whakawhirinaki ki ngā hangarau o tāwāhi, ka whakapakari ake ēnei mīhini i te tū motuhake o te umanga haurua-ā-rohe, ka whakapakari ake i te haumarutanga ōhanga me te ahumahi.

Pūwhakamatao Wai : Te Kī ki te Mahi Pūmau o te Mīhini Whakairoiro

He mea nui te whakahaere tika i te pāmahana hei whakarite i te kounga me te hua o te tukanga whakapūtātanga. He mea nui te mahi a ngā pouaka whakamatao wai, hei wāhanga matua o ngā pūnaha whakamatao:

Ngā Whakaritenga Whakamatao: He tino tairongo ngā mīhini whakairoiro ki ngā piki me ngā heke o te pāmahana i te wā e whakaatuhia ana, nō reira e hiahiatia ana he mīhini whakamatao wai e whakarato ana i te whakahaere pāmahana tino tika, pumau hoki.

Ngā Mahi a ngā Mīhini Whakamatao: Mā te tohatoha i te wai whakamatao, ka tohatoha pai ngā mīhini whakamatao i te wera e puta ana i te wā e mahi ana, ka pupuri i ngā taputapu taiaho i roto i te awhe pāmahana tino pai, me te whakarite i te tika me te pono o te tukanga tuhi.

TEYU He Whakamātao Ngaio e Tukuna ana e te Pouaka Whakamatao mō ngā Mīhini Whakairoiro

TEYU Ka taea e ngā mīhini whakamatao taiaho tere rawa o te raupapa CWUP te whakarato i te whakahaere pāmahana tika me te pumau mō ngā mīhini tuhi. Ka tutuki i te tauira whakamatao CWUP-20ANP te pumau pāmahana o te ±0.08°C, e whakarato ana i te whakamatao tino whai hua mō te hanga tika.

I roto i te ao hangahanga semiconductor, ko ngā mīhini lithography ngā taputapu matua mō te whakawhiti i ngā tauira porowhita iti. Nā te whanaketanga o te hangarau, kua noho te mīhini lithography krypton fluoride me te mīhini lithography argon fluoride hei kaha nui ki te whakatairanga i te whanaketanga o te umanga me ā rātou mahi tino pai.