Nkhani Zaposachedwa: MIIT Yalimbikitsa Makina a Domestic DUV Lithography okhala ndi ≤8nm Overlay Accuracy

M'miyezi yaposachedwa, Unduna wa Zamalonda ndi Ukadaulo wa Chidziwitso (MIIT) watulutsa "Malangizo Othandizira Kukweza ndi Kugwiritsa Ntchito Zida Zaukadaulo Zoyamba (Zoseweredwa) (Kope la 2024)". Izi zikutsegula njira yopezera malo ogwirira ntchito a chips okhwima a ma node opitilira 28nm!

Ngakhale ukadaulo wa 28nm si wamakono, ndi wofunika kwambiri ngati mzere wogawa pakati pa ma chip otsika mpaka pakati ndi apakati mpaka apamwamba. Kupatula ma CPU apamwamba, ma GPU, ndi ma chip a AI, ma chip ambiri apamwamba amadalira ukadaulo wa 28nm kapena wapamwamba.

Mfundo Yogwirira Ntchito: Kupita Patsogolo mu Deep Ultraviolet Lithography

Makina ojambulira a KrF (Krypton Fluoride) ndi ArF (Argon Fluoride) ali m'gulu la Deep Ultraviolet (DUV) lithography. Onsewa amagwiritsa ntchito mafunde enieni a kuwala omwe amawonetsedwa kudzera mu makina owonera pa gawo la photoresist la wafer ya silicon, ndikusamutsa mawonekedwe ovuta a circuit.

Makina a KrF Lithography: Gwiritsani ntchito gwero la kuwala la 248nm, kukwaniritsa ma resolution ochepera 110nm, oyenera njira zosiyanasiyana zopangira ma circuit ophatikizika.

Makina a ArF Lithography: Gwiritsani ntchito gwero la kuwala kwa 193nm, lomwe limapereka mawonekedwe apamwamba kwambiri paukadaulo wa sub-65nm, zomwe zimathandiza kupanga ma circuits abwino.

Kufunika kwa Ukadaulo: Kukweza Makampani ndi Kudzidalira

Kupanga makina ojambulira mawu awa ndi chizindikiro chachikulu pakupititsa patsogolo kupanga ma semiconductor ndikupeza ufulu wa mafakitale:

Kupita Patsogolo kwa Ukadaulo: Kupanga bwino makina a KrF ndi ArF lithography kukuwonetsa kupita patsogolo kwakukulu muukadaulo wapamwamba wa lithography, zomwe zimapereka chithandizo champhamvu chaukadaulo pakupanga ma semiconductor.

Kukweza Makampani: Makina ojambulira bwino kwambiri amathandiza kupanga ma circuits ovuta komanso ogwira ntchito bwino, zomwe zimapangitsa kuti pakhale zatsopano mu unyolo wonse wamtengo wapatali wa semiconductor.

Chitetezo cha Zachuma ndi Dziko: Mwa kuchepetsa kudalira ukadaulo wakunja, makina awa amalimbitsa kudzidalira kwa makampani opanga zida zamagetsi zamkati mdziko muno, ndikulimbitsa chitetezo cha zachuma ndi mafakitale.

Chitsulo Choziziritsira Madzi : Chinsinsi cha Kugwira Ntchito kwa Makina Okhazikika a Lithography

Kuwongolera kutentha koyenera ndikofunikira kuti muwonetsetse kuti njira yogwiritsira ntchito lithography ndi yabwino komanso yopindulitsa. Zoziziritsira madzi, monga zigawo zazikulu za makina oziziritsira, zimagwira ntchito yofunika kwambiri:

Zofunikira pa Kuziziritsa: Makina a Lithography amakhudzidwa kwambiri ndi kusinthasintha kwa kutentha akamakhudzidwa, zomwe zimapangitsa kuti pakhale ma water coolers omwe amapereka mphamvu yowongolera kutentha molondola komanso mokhazikika.

Ntchito za Ma Chiller: Mwa kufalitsa madzi ozizira, ma chiller amatha kuyeretsa kutentha komwe kumachitika panthawi yogwira ntchito, kusunga zida za laser mkati mwa kutentha koyenera ndikuwonetsetsa kuti njira yogwiritsira ntchito lithography ndi yolondola komanso yodalirika.

TEYU Chiller Imapereka Mayankho Aukadaulo Oziziritsira Makina a Lithography

TEYU Ma CWUP series ultrafast laser chillers amatha kupereka kuwongolera kutentha kolondola komanso kokhazikika kwa makina a lithography. CWUP-20ANP ya chiller imakwaniritsa kukhazikika kwa kutentha kwa ±0.08°C, zomwe zimapangitsa kuti kuziziritsa kukhale kothandiza kwambiri popanga zinthu molondola.

Mu dziko lenileni la kupanga ma semiconductor, makina a lithography ndiye zida zofunika kwambiri zosamutsira mapatani a microcircuit. Ndi kupita patsogolo kwa ukadaulo, makina a krypton fluoride lithography ndi makina a argon fluoride lithography akhala mphamvu yofunika kwambiri yolimbikitsira chitukuko cha makampani ndi magwiridwe awo abwino kwambiri.