Nhau Dzichangoburwa: MIIT Inosimudzira Michina yeDUV Lithography yeMusha ine ≤8nm Overlay Accuracy

Mumwedzi yapfuura, Bazi reIndasitiri neTekinoroji yeRuzivo (MIIT) rakaburitsa "Nhungamiro dzeKusimudzira neKushandisa Midziyo Yekutanga (Seti) Mikuru yeUnyanzvi (Chinyorwa cha2024)". Izvi zvinovhura nzira yekuisa machipisi akakura munzvimbo dzakazara dzema node ari pamusoro pe28nm!

Kunyangwe tekinoroji ye28nm isiri yepamusoro-soro, inonyanya kukosha semutsetse wekuparadzanisa machipisi ari pakati nepakati uye ari pakati nepamusoro. Kunze kwemaCPU epamusoro, maGPU, uye maAI chips, machipisi mazhinji emhando yepamusoro anotsigira matekinoroji e28nm kana epamusoro.

Nheyo yekushanda: Kufambira mberi muDeep Ultraviolet Lithography

Michina yeKrF (Krypton Fluoride) neArF (Argon Fluoride) lithography inowira pasi pechikamu cheDeep Ultraviolet (DUV) lithography. Dzese dzinoshandisa mawavelength echiedza chaiwo anoratidzwa kuburikidza nemasisitimu ekuona pachikamu chephotoresist chesilicon wafer, zvichitamisa mapatani edunhu akaomarara.

Michina yeKrF Lithography: Shandisa sosi yechiedza che248nm wavelength, ichikwanisa kuwana resolution iri pasi pe110nm, yakakodzera maitiro akasiyana-siyana ekugadzira macircuit akabatanidzwa.

Michina yeArF Lithography: Shandisa sosi yechiedza che193nm wavelength, ichipa resolution yepamusoro kune tekinoroji dzemaitiro dziri pasi pe65nm, zvichigonesa kugadzirwa kwemasekete akapfava.

Kukosha Kwetekinoroji: Kuvandudza Maindasitiri uye Kuzvivimba

Kugadzirwa kwemichina iyi ye lithography kunoratidza danho guru mukusimudzira kugadzirwa kwe semiconductor uye kuwana kuzvitonga kweindasitiri:

Kubudirira kwehunyanzvi: Kubudirira kwekugadzirwa kwemichina yeKrF neArF lithography kunoratidza kufambira mberi kukuru muhunyanzvi hwepamusoro hwe lithography, zvichipa rutsigiro rwakasimba rwehunyanzvi mukugadzira semiconductor.

Kuvandudzwa kweIndasitiri: Michina ye lithography yakanyatsogadzirwa inogonesa kugadzirwa kwemaseketi akabatanidzwa akaomarara uye anoshanda zvakanyanya, zvichitungamira hunyanzvi muketani yese ye semiconductor value.

Kuchengetedzwa Kwehupfumi Nenyika: Nekuderedza kuvimba netekinoroji yekunze, michina iyi inosimbisa kuzviriritira kweindasitiri yemidziyo yemukati menyika, ichisimbisa kuchengetedzeka kwehupfumi neindasitiri.

Chitofu Chemvura : Kiyi Yekushanda Kwemuchina weLithography Wakagadzikana

Kudzora tembiricha nemazvo kwakakosha kuti pave nechokwadi chekuti maitiro e lithography ari kushanda zvakanaka uye anobereka zvakanaka. Zvidziyo zvemvura, sezvinhu zvikuru zvemasisitimu ekutonhodza, zvinoita basa rakakosha:

Zvinodiwa Pakutonhodza: ​​Michina yeLithography inonzwa zvakanyanya kana tembiricha ikachinja-chinja panguva yekuiswa, zvichiita kuti pave nema "water coolers" anopa kudzora tembiricha kwakarurama uye kwakasimba.

Mabasa eChillers: Nekutenderedza mvura inotonhodza, machillers anobvisa kupisa kunobva panguva yekushanda, achichengetedza michina yelaser mukati mekupisa kwakanyanya uye achivimbisa kururama uye kuvimbika mukuita kwe lithography.

TEYU Chiller Inopa Mhinduro Dzehunyanzvi Dzekutonhodza Michina yeLithography

TEYU CWUP series ultrafast laser chillers inogona kupa kudzora tembiricha kwakanyatsojeka uye kwakasimba kwemichina ye lithography. Chiller model CWUP-20ANP inoita kuti tembiricha isanyanya kugadzikana ye ±0.08°C, zvichipa kutonhora kunoshanda zvikuru pakugadzira nemazvo.

Munyika chaiyo yekugadzira semiconductor, michina ye lithography ndiyo midziyo mikuru yekufambisa mapatani e microcircuit. Nekufambira mberi kwetekinoroji, muchina we krypton fluoride lithography nemuchina we argon fluoride lithography zvave simba rakakosha mukusimudzira budiriro yeindasitiri nekushanda kwavo kwakanaka.