Wararkii ugu dambeeyay: MIIT waxay kor u qaadaysaa Mashiinnada DUV Lithography-ga ee guryaha iyadoo la adeegsanayo ≤8nm Saxnaanta Dulsaarka

Bilihii ugu dambeeyay, Wasaaradda Warshadaha iyo Tiknoolajiyadda Macluumaadka (MIIT) waxay soo saartay "Tilmaamaha Horumarinta iyo Adeegsiga Qalabka Farsamada ee ugu Horreeya (Set) (Daabacaadda 2024)". Tani waxay u gogol xaaraysaa meelaynta buuxda ee wax soo saarka jajabka bislaaday ee qanjidhada ka sarreeya 28nm!

In kasta oo tignoolajiyada 28nm aysan ahayn mid casri ah, haddana waxay muhiimad weyn u leedahay xariiqda kala qaybinta jajabyada hoose ilaa dhexe iyo kuwa dhexe ilaa kuwa sare. Marka laga reebo CPU-yada horumarsan, GPU-yada, iyo jajabyada AI, inta badan jajabyada heerka warshadaha waxay ku tiirsan yihiin teknoolojiyada 28nm ama ka sareeya.

Mabda'a Shaqada: Horumarka Lithography-ga Ultraviolet-ka ee Qoto dheer

Mashiinnada lithography-ga KrF (Krypton Fluoride) iyo ArF (Argon Fluoride) waxay hoos yimaadaan qaybta lithography-ga Deep Ultraviolet (DUV). Labaduba waxay isticmaalaan hirarka iftiinka gaarka ah ee lagu saadaaliyay nidaamyada indhaha iyadoo loo marayo lakabka sawir-qaadista ee wafer silicon ah, iyagoo wareejinaya qaababka wareegga ee adag.

Mashiinnada KrF Lithography: Isticmaal ilo iftiin oo dhererkiisu yahay 248nm, oo gaaraya qaraaro ka hooseeya 110nm, oo ku habboon hababka wax soo saarka wareegga ee isku dhafan.

Mashiinnada Lithography-ga ArF: Isticmaal ilo iftiin oo dhererkiisu yahay 193nm, oo bixiya xallin sare oo loogu talagalay teknoolojiyada habka ee ka hooseeya 65nm, taasoo suurtogalinaysa sameynta wareegyo khafiif ah.

Muhiimadda Tiknoolajiyadda: Casriyeynta Warshadaha iyo Isku-kalsoonida

Horumarinta mashiinnada lithography-ga waxay calaamad u tahay horumar weyn oo ku yimid wax soo saarka semiconductor-ka iyo gaarista madaxbannaanida warshadaha:

Horumarka Farsamada: Abuuritaanka guusha leh ee mashiinnada lithography-ga KrF iyo ArF waxay muujineysaa horumar la taaban karo oo laga sameeyay tignoolajiyada lithography-ga heerka sare ah, iyadoo bixinaysa taageero farsamo oo xooggan oo loogu talagalay wax soo saarka semiconductor-ka.

Cusbooneysiinta Warshadaha: Mashiinnada lithography-ga ee saxsan waxay awood u siinayaan soo saarista wareegyada isku dhafan ee isku dhafan oo aad u adag oo waxqabad sare leh, taasoo horseedaysa hal-abuurnimo dhammaan silsiladda qiimaha semiconductor-ka.

Amniga Dhaqaalaha iyo Qaranka: Iyagoo yareynaya ku tiirsanaanta tiknoolajiyada shisheeye, mashiinnadani waxay xoojiyaan isku filnaanshaha warshadaha semiconductor-ka gudaha, iyagoo xoojinaya amniga dhaqaalaha iyo warshadaha.

Qaboojiyaha Biyaha : Furaha Waxqabadka Mashiinka Lithography ee Xasilloon

Xakamaynta heerkulka saxda ah ayaa lagama maarmaan u ah hubinta tayada iyo wax soo saarka habka lithography. Qaboojiyeyaasha biyaha, oo ah qaybaha asaasiga ah ee nidaamyada qaboojinta, waxay ciyaaraan door muhiim ah:

Shuruudaha Qaboojinta: Mashiinnada Lithography-gu aad bay ugu nugul yihiin isbeddellada heerkulka inta lagu jiro soo-gaadhista, taasoo u baahan qaboojiyeyaal biyo ah oo bixiya xakameyn heerkul oo aad u sax ah oo deggan.

Hawlaha Qaboojiyeyaasha: Iyagoo wareegaya biyaha qaboojinta, qaboojiyaha si wax ku ool ah ayuu u kala firdhiyaa kulaylka ka dhasha inta lagu jiro hawlgalka, isagoo qalabka laysarka ku ilaalinaya heerkul ku filan iyo hubinta saxnaanta iyo isku halaynta habka lithography.

TEYU Chiller waxay bixisaa Xalalka Qaboojinta Xirfadeed ee Mashiinnada Lithography

TEYU Qaboojiyeyaasha laser-ka ee aadka u degdega badan ee taxanaha CWUP waxay bixin karaan xakameyn heerkul oo sax ah oo deggan oo loogu talagalay mashiinnada lithography. Qaabka qaboojiyaha CWUP-20ANP wuxuu gaaraa xasilloonida heerkulka ±0.08°C, isagoo bixinaya qaboojin aad u hufan oo loogu talagalay wax soo saarka saxda ah.

Dunida saxda ah ee wax soo saarka semiconductor-ka, mashiinnada lithography-ga ayaa ah aaladaha ugu muhiimsan ee loogu talagalay wareejinta qaababka microcircuit-ka. Iyadoo la horumarinayo tiknoolajiyada, mashiinka lithography-ga krypton fluoride iyo mashiinka lithography-ga argon fluoride ayaa noqday awood muhiim ah si kor loogu qaado horumarinta warshadaha iyagoo leh waxqabadkooda aadka u wanaagsan.