Litaba Tse Monate: MIIT e Khothalletsa Mechini ea DUV Lithography ea Lehae ka ho Nepahala ha Overlay ea ≤8nm

Likhoeling tsa morao tjena, Lefapha la Indasteri le Theknoloji ea Tlhahisoleseling (MIIT) le ntšitse "Tataiso ea ho Khothaletsa le ho Sebelisa Lisebelisoa tsa Tekheniki tse Kholo (Sete) tsa Pele (Khatiso ea 2024)". Sena se bula tsela bakeng sa ho fumana sebaka se felletseng sa tlhahiso ea li-chip tse hōlileng tsebong bakeng sa li-node tse kaholimo ho 28nm!

Leha theknoloji ea 28nm e se ea morao-rao, e bohlokoa haholo e le moeli o arolang li-chip tse tlase ho isa bohareng le tse mahareng ho isa holimo. Ntle le li-chip tse tsoetseng pele tsa CPU, li-GPU, le AI, li-chip tse ngata tsa maemo a indasteri li itšetlehile ka mahlale a 28nm kapa a holimo.

Molao-motheo oa ho Sebetsa: Tsoelo-pele ho Lithography e Tebileng ea Ultraviolet

Mechini ea KrF (Krypton Fluoride) le ArF (Argon Fluoride) lithography e oela tlas'a sehlopha sa Deep Ultraviolet (DUV) lithography. Ka bobeli li sebelisa maqhubu a itseng a khanya a shebiloeng ka litsamaiso tsa optical holim'a lera la photoresist la wafer ea silicon, e fetisetsa mekhoa e rarahaneng ea potoloho.

Mechini ea KrF Lithography: Sebelisa mohloli oa leseli la bolelele ba 248nm, o fihlellang liqeto tse ka tlase ho 110nm, o loketseng lits'ebetso tse fapaneng tsa tlhahiso ea potoloho e kopaneng.

Mechini ea Lithography ea ArF: Sebelisa mohloli oa leseli la bolelele ba 193nm, le fanang ka qeto e phahameng bakeng sa mahlale a ts'ebetso a ka tlase ho 65nm, le nolofalletsang tlhahiso ea lipotoloho tse ntle haholoanyane.

Bohlokoa ba Theknoloji: Ntlafatso ea Indasteri le Boitšepo

Nts'etsopele ea mechini ena ea lithography e tšoaea ntlha ea bohlokoa ho ntšetseng pele tlhahiso ea li-semiconductor le ho fihlella boipuso ba indasteri:

Lintlafatso tsa Tekheniki: Ho thehoa ka katleho ha mechine ea lithography ea KrF le ArF ho totobatsa tsoelo-pele e kholo theknolojing ea lithography ea maemo a holimo, ho fana ka tšehetso e matla ea tekheniki bakeng sa tlhahiso ea li-semiconductor.

Ntlafatso ea Indasteri: Mechini ea lithography e nepahetseng haholo e nolofalletsa tlhahiso ea lipotoloho tse kopaneng tse rarahaneng le tse sebetsang hantle, e leng se susumetsang boqapi ho pholletsa le ketane eohle ea boleng ba semiconductor.

Tšireletso ea Moruo le ea Naha: Ka ho fokotsa ho itšetleha ka theknoloji ea linaha tse ling, mechine ena e matlafatsa boikemelo ba indasteri ea semiconductor ea lehae, e matlafatsa tšireletso ea moruo le ea indasteri.

Mochini o Chesang Metsi : Senotlolo sa Ts'ebetso ea Mochini oa Lithography o Tsitsitseng

Taolo e nepahetseng ea mocheso ke ea bohlokoa bakeng sa ho netefatsa boleng le chai ea ts'ebetso ea lithography. Li-water chiller, joalo ka likarolo tsa mantlha tsa litsamaiso tsa ho pholisa, li bapala karolo ea bohlokoa:

Litlhoko tsa ho Pholisa: Mechini ea Lithography e na le kutloelo-bohloko haholo ho feto-fetoha ha mocheso nakong ea ho pepesehela mocheso, e leng se hlokang li-water chiller tse fanang ka taolo e nepahetseng le e tsitsitseng ea mocheso.

Mesebetsi ea Li-Chiller: Ka ho potoloha metsi a pholileng, li-chiller li qhala mocheso o hlahisoang nakong ea ts'ebetso ka katleho, li boloka lisebelisoa tsa laser li le maemong a mocheso a nepahetseng le ho netefatsa ho nepahala le ts'epo ts'ebetsong ea lithography.

TEYU Chiller e fana ka Litharollo tsa Boitseanape tsa ho Pholisa bakeng sa Mechini ea Lithography

TEYU Li-chiller tsa laser tse potlakileng ka ho fetisisa tsa letoto la CWUP li ka fana ka taolo e nepahetseng le e tsitsitseng ea mocheso bakeng sa mechini ea lithography. Mohlala oa chiller oa CWUP-20ANP o fihlella botsitso ba mocheso ba ±0.08°C, o fana ka pholiso e sebetsang hantle haholo bakeng sa tlhahiso e nepahetseng.

Lefatšeng le nepahetseng la tlhahiso ea semiconductor, mechine ea lithography ke lisebelisoa tsa mantlha bakeng sa phetisetso ea mekhoa ea microcircuit. Ka tsoelo-pele ea theknoloji, mochini oa krypton fluoride lithography le mochini oa argon fluoride lithography li fetohile matla a bohlokoa ho khothaletsa nts'etsopele ea indasteri ka ts'ebetso ea tsona e ntle haholo.