Litaba tsa Laser
Taolo e Nepahetseng ea Mocheso bakeng sa Litsamaiso tsa Laser le Lisebelisoa tsa Indasteri Ho tloha ka 2002
Puo
Litaelo tsa MIIT tsa 2024 li khothaletsa ts'ebetso e felletseng ea tlhahiso ea li-chip tsa 28nm+, mohato oa bohlokoa oa theknoloji. Lintlafatso tsa mantlha li kenyelletsa metjhini ea KrF le ArF ea lithography, e nolofalletsang lipotoloho tse nepahetseng haholo le ho matlafatsa boitšepo ba indasteri. Taolo e nepahetseng ea mocheso e bohlokoa bakeng sa lits'ebetso tsena, ka li-chiller tsa metsi tsa TEYU CWUP tse netefatsang ts'ebetso e tsitsitseng tlhahisong ea semiconductor.
Likhoeling tsa morao tjena, Lekala la Indasteri le Theknoloji ea Boitsebiso (MIIT) le ile la fana ka "Litaelo bakeng sa Khothatso le Tšebeliso ea Lisebelisoa tse kholo tsa Theknoloji ea Pele (Khatiso ea 2024)". Sena se bula tsela bakeng sa ts'ebetso e felletseng ea tlhahiso ea li-chip bakeng sa li-node tse kaholimo ho 28nm!
Leha thekenoloji ea 28nm e se ea maemo a holimo, e na le bohlokoa ba bohlokoa joalo ka mola o arolang lipakeng tsa lichifi tse tlase ho isa bohareng le tse bohareng ho isa ho tse holimo. Ntle le li-CPU tse tsoetseng pele, li-GPU, le lichifi tsa AI, lichifi tse ngata tsa boemo ba indasteri li itšetlehile ka 28nm kapa mahlale a holimo.
Molao-motheo oa ho sebetsa: Tsoelo-pele ho Deep Ultraviolet Lithography
Mechini ea lithography ea KrF (Krypton Fluoride) le ArF (Argon Fluoride) e oela tlas'a sehlopha sa Deep Ultraviolet (DUV) lithography. Ka bobeli li sebelisa li-wavelengths tse khethehileng tse hlahisitsoeng ka lisebelisoa tsa optical holim'a lera la photoresist la silicon wafer, ho fetisa mekhoa e rarahaneng ea potoloho.
Mechini ea KrF Lithography: Sebelisa mohloli oa leseli oa 248nm oavelength, ho fihlela liqeto tse ka tlase ho 110nm, tse loketseng lits'ebetso tse fapaneng tse kopaneng tsa tlhahiso ea potoloho.
Mechini ea ArF Lithography: Sebelisa mohloli o khanyang oa 193nm wavelength, e fanang ka tharollo e phahameng bakeng sa mahlale a sub-65nm a ts'ebetso, e nolofalletsang ho etsoa ha lipotoloho tse ntle.
Bohlokoa ba Theknoloji: Ntlafatso ea Indasteri le ho Itšepa
Nts'etsopele ea mechini ena ea lithography e tšoaea mohato o moholo oa ho nts'etsapele tlhahiso ea semiconductor le ho fihlela boipuso ba indasteri:
Lintlafatso tsa Tekheniki: Theho e atlehileng ea mochini oa lithography oa KrF le ArF e totobatsa tsoelo-pele e kholo ho theknoloji ea boemo bo holimo ea lithography, e fanang ka tšehetso e matla ea botekgeniki bakeng sa tlhahiso ea li-semiconductor.
Ntlafatso ea Indasteri: Mechini e nepahetseng haholo ea lithography e etsa hore ho be le lipotoloho tse kopantsoeng tse rarahaneng le tse sebetsang hantle, tse tsamaisang boqapi ho ketane eohle ea boleng ba semiconductor.
Tšireletseho ea Moruo le ea Naha: Ka ho fokotsa ho itšetleha ka thekenoloji ea kantle ho naha, mechini ena e matlafatsa boikemelo ba indasteri ea lehae ea semiconductor, e matlafatsa ts'ireletso ea moruo le indasteri.
Chiller ea Metsi : Senotlolo sa Ts'ebetso e tsitsitseng ea Lithography Machine
Taolo e nepahetseng ea mocheso e bohlokoa bakeng sa ho netefatsa boleng le chai ea mokhoa oa lithography. Li-chiller tsa metsi, joalo ka likarolo tsa mantlha tsa sistimi ea ho pholisa, li bapala karolo ea bohlokoa:
Litlhoko tsa ho Pholisa: Mechini ea lithography e na le maikutlo a matla haholo ho feto-fetoha ha mocheso nakong ea ho pepeseha, ho hloka hore li-chiller tsa metsi li fane ka taolo e nepahetseng haholo le e tsitsitseng ea mocheso.
Mesebetsi ea Li-Chillers: Ka ho potoloha metsi a pholileng, li-chillers li khona ho qhala mocheso o hlahisoang nakong ea ts'ebetso, li boloka lisebelisoa tsa laser ka har'a mocheso o nepahetseng le ho netefatsa ho nepahala le ho tšepahala ts'ebetsong ea lithography.
TEYU Chiller e Fana ka Litharollo tsa Setsebi tsa Pholiso bakeng sa Mechini ea Lithography
TEYU CWUP series ultrafast laser chillers e ka fana ka taolo e nepahetseng le e tsitsitseng ea mocheso bakeng sa mechine ea lithography. Moetso oa chiller CWUP-20ANP o fihlella botsitso ba mocheso oa ± 0.08 ° C, o fana ka pholiso e sebetsang hantle haholo bakeng sa tlhahiso e nepahetseng.
Lefatšeng le nepahetseng la tlhahiso ea semiconductor, mechini ea lithography ke lisebelisoa tsa mantlha tsa phetisetso ea lipaterone tsa microcircuit. Ka tsoelo-pele ea theknoloji, mochine oa krypton fluoride lithography le mochini oa lithography oa argon fluoride li fetohile matla a bohlokoa ho khothalletsa nts'etsopele ea indasteri ka ts'ebetso ea bona e babatsehang.
Re mona bakeng sa hau ha o re hloka.
Ka kopo tlatsa foromo ho ikopanya le rona, 'me re tla thabela ho u thusa.
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TEYU S&A Chiller e thehiloe ka 2002 e na le boiphihlelo ba lilemo tse 23 tsa tlhahiso ea chiller, 'me joale e amoheloa e le pula-maliboho ea mahlale a pholiso le molekane ea tšepahalang indastering ea laser.
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