Izindaba Ezintsha: I-MIIT Ikhuthaza Imishini Yasekhaya Ye-DUV Lithography Ene-≤8nm Overlay Accuracy

Ezinyangeni zakamuva nje, uMnyango Wezimboni Nobuchwepheshe Bolwazi (i-MIIT) ukhiphe "Iziqondiso Zokukhuthazwa Nokusetshenziswa Kwemishini Yobuchwepheshe Eyinhloko (Esethiwe) Yokuqala (Uhlelo Luka-2024)". Lokhu kuvula indlela yokwenziwa kwendawo ephelele yokukhiqiza ama-chip avuthiwe kuma-node angaphezu kuka-28nm!

Nakuba ubuchwepheshe be-28nm bungeyona into esezingeni eliphezulu, bubaluleke kakhulu njengomugqa ohlukanisa phakathi kwama-chip aphansi kuya kwaphakathi kanye naphakathi kuya kwaphezulu. Ngaphandle kwama-CPU athuthukile, ama-GPU, kanye nama-AI chip, ama-chip amaningi ebanga lezimboni athembele kubuchwepheshe be-28nm noma obuphezulu.

Isimiso Sokusebenza: Intuthuko ku-Deep Ultraviolet Lithography

Imishini ye-KrF (Krypton Fluoride) kanye ne-ArF (Argon Fluoride) lithography iwela ngaphansi kwesigaba se-Deep Ultraviolet (DUV) lithography. Yomibili isebenzisa amaza okukhanya athile abonakala ngezinhlelo ze-optical engqimbeni ye-photoresist ye-silicon wafer, idlulisela amaphethini wesekethe ayinkimbinkimbi.

Imishini ye-KrF Lithography: Sebenzisa umthombo wokukhanya we-wavelength ongu-248nm, ufinyelela ukucaca okungaphansi kuka-110nm, ofanele izinqubo ezahlukahlukene zokukhiqiza isekethe ehlanganisiwe.

Imishini ye-ArF Lithography: Sebenzisa umthombo wokukhanya we-wavelength ongu-193nm, onikeza isixazululo esiphezulu kubuchwepheshe benqubo obungaphansi kuka-65nm, okwenza kube lula ukwenziwa kwamasekethe amahle kakhulu.

Ukubaluleka Kobuchwepheshe: Ukuthuthukiswa Kwemboni Nokuzethemba

Ukuthuthukiswa kwale mishini ye-lithography kuphawula ingqophamlando enkulu ekuthuthukiseni ukukhiqizwa kwe-semiconductor kanye nokufinyelela ukuzimela kwezimboni:

Ukuphumelela Kobuchwepheshe: Ukudalwa ngempumelelo kwemishini ye-KrF kanye ne-ArF lithography kugqamisa intuthuko enkulu kubuchwepheshe be-lithography obusezingeni eliphezulu, okunikeza ukwesekwa okuqinile kobuchwepheshe bokukhiqiza ama-semiconductor.

Ukuthuthukiswa Kwemboni: Imishini ye-lithography enembile kakhulu ivumela ukukhiqizwa kwamasekethe ahlanganisiwe ayinkimbinkimbi futhi asebenza kahle kakhulu, okuqhuba ukusungula izinto ezintsha kulo lonke uchungechunge lwenani le-semiconductor.

Ukuphepha Komnotho Nokwezwe: Ngokunciphisa ukuncika kubuchwepheshe bangaphandle, le mishini iqinisa ukuzimela kwemboni yasekhaya ye-semiconductor, iqinisa ukuphepha komnotho nokwezimboni.

I-Water Chiller : Isihluthulelo Sokusebenza Komshini We-Lithography Ozinzile

Ukulawula izinga lokushisa okunembile kubalulekile ukuqinisekisa ikhwalithi kanye nokukhiqiza kwenqubo ye-lithography. Ama-water chiller, njengezingxenye eziyinhloko zezinhlelo zokupholisa, adlala indima ebalulekile:

Izidingo Zokupholisa: Imishini ye-Lithography ibucayi kakhulu ekushintsheni kwezinga lokushisa ngesikhathi sokuchayeka, okudinga ama-water chiller ahlinzeka ngokulawula izinga lokushisa okunembile kakhulu nokuzinzile.

Imisebenzi Yama-Chiller: Ngokuhambisa amanzi apholile, ama-chiller akhipha ngempumelelo ukushisa okukhiqizwa ngesikhathi sokusebenza, agcine imishini ye-laser ngaphakathi kwebanga lokushisa elifanele futhi aqinisekise ukunemba nokuthembeka enqubweni ye-lithography.

TEYU I-Chiller Inikeza Izixazululo Zokupholisa Ezingochwepheshe Zemishini Ye-Lithography

TEYU Ama-laser chiller e-CWUP ochungechunge lwe-ultrafast anganikeza ukulawula izinga lokushisa okunembile nokuzinzile kwemishini ye-lithography. Imodeli ye-chiller ye-CWUP-20ANP ifinyelela ukuzinza kwezinga lokushisa okungu-±0.08°C, okuletha ukupholisa okuphumelelayo kakhulu ekukhiqizeni okunembile.

Ezweni eliqondile lokukhiqizwa kwe-semiconductor, imishini ye-lithography iyithuluzi eliyinhloko lokudlulisa amaphethini e-microcircuit. Ngokuthuthuka kobuchwepheshe, umshini we-krypton fluoride lithography kanye nomshini we-argon fluoride lithography sekuyinto ebalulekile ekukhuthazeni intuthuko yomkhakha ngokusebenza kwawo okuhle kakhulu.